1. TM New Directions in SP76.00.02 Modular Substrate Systems Steve Doe Parker Hannifin Corporation

2. TM Topics Design History & Drivers ™  IntraFlow ™ System Overview Further Development Plans Acknowledgements New Directions in SP76.00.02 Modular Substrate Systems

3. TM Design History NeSSI Involvement Since ISA-2000

4. TM Design History NeSSI Involvement Since ISA-2000 Initial Design: Radical Approach

5. TM Design History NeSSI Involvement Since ISA-2000 Initial Design: Radical Approach Next Generation: 1 1 / 8 ” Semiconductor

6. TM Design History NeSSI Involvement Since ISA-2000 Initial Design: Radical Approach Next Generation: 1 1 / 8 ” Semiconductor Yet Another Semicon Generation

7. TM Design History NeSSI Involvement Since ISA-2000 Initial Design: Radical Approach Next Generation: 1 1 / 8 ” Semiconductor Yet Another Semicon Generation “I thought NeSSI systems were small?!”...said everyone who saw this version...

8. TM Design History NeSSI Involvement Since ISA-2000 Initial Design: Radical Approach Next Generation: 1 1 / 8 ” Semiconductor Yet Another Semiconductor Generation Finally: IntraFlow ™  Finally: IntraFlow ™ patent pending

9. TM Design Drivers Semiconductor  Semiconductor,“Linear Flow Path” system requirements,Cumbersome 3-way functionality,Lower level manifolds required for direction change,Welding inherent to technology Substrate Limitations Substrate Limitations

10. TM Design Drivers  Simplicity Overcomes Limitations ™ IntraFlow ™ Fitting

11. TM IntraFlow ™ Sample System Overview

12. TM IntraFlow ™ Sample System Overview ISA/ANSI SP76.00.02 Compliant

13. TM IntraFlow ™ Sample System Overview Same screw size throughout ISA/ANSI SP76.00.02 Compliant

14. TM IntraFlow ™ Sample System Overview Same screw size throughout ISA/ANSI SP76.00.02 Compliant Mounting “Pegboard”

15. TM Slip-fit intra- fitting connectors IntraFlow ™ Sample System Overview Same screw size throughout ISA/ANSI SP76.00.02 Compliant Mounting “Pegboard”

16. TM Slip-fit intra- fitting connectors IntraFlow ™ Sample System Overview Same screw size throughout ISA/ANSI SP76.00.02 Compliant Mounting “Pegboard” Field connectors (top or end)

17. TM Slip-fit intra- fitting connectors IntraFlow ™ Sample System Overview Same screw size throughout ISA/ANSI SP76.00.02 Compliant Mounting “Pegboard” Field connectors (top or end) Same plane flowpaths

18. TM IntraFlow ™ Sample System Overview Pegboard Options

19. TM IntraFlow ™ Sample System Overview Pegboard Options Standard - non-heated - multiple sizes

20. TM IntraFlow ™ Sample System Overview Pegboard Options Standard - non-heated - multiple sizes Heated - electric - steam - multiple sizes

21. TM IntraFlow ™ Sample System Overview Pegboard Options Standard - non-heated - multiple sizes Configure your own! Heated - electric - steam - multiple sizes

22. TM IntraFlow ™ Sample System Overview SpecificationsPressure,Vacuum to 500 psig (standard pegboard),Vacuum to >6000 psig (heated pegboard) Temperature

23. TM IntraFlow ™ Sample System Overview Standard Functional Clusters,Basic Fast Loop Sample Inlet To Analyzer Bypass Return

24. TM IntraFlow ™ Sample System Overview Standard Functional Clusters Sample Inlet Bypass Return From Grab Sample To Grab Sample Purge Inlet To Analyzer

25. TM IntraFlow ™ Sample System Overview Topwork Components Metering Valve Adapter Regulator Manual & Air Op 2-way Diaphragm Inline & By pass Filters - Sintered & Borosilicate Toggle Relief Check Needle Non-Spill Quick Disconnect

26. TM IntraFlow ™ Sample System Overview Cool Topwork Components Rotometer Adapter:.045” Offset to compensate for 1.53” SP76 centerline requirements

27. TM IntraFlow ™ Sample System Overview More Cool Topwork Components Rotometer Adapter:.045” Offset to compensate for 1.53” SP76 centerline requirements 2 & 3-way manual ball valves

28. TM IntraFlow ™ Sample System Overview Really Cool Topwork Components Rotometer Adapter:.045” Offset to compensate for 1.53” SP76 centerline requirements 2 & 3-way manual ball valves Air Actuated 3-way R-Max™ ISA/ANSI SP76.00.02 Compatible!

29. TM IntraFlow Design- Pro ™ Software Currently in Development System: - Design Tool - Configurator - BOM Generator - Tagging Generator - System Ordering Tool Web Based IntraFlow Design-Pro™

30. TM ISA SP76 (proposed) symbol library User defined grid “palette” IntraFlow Design- Pro ™ Software

31. TM Drag & Drop Windows Functionality Optional tagging function Notice of un- configured components IntraFlow Design- Pro ™ Software

32. TM Direct access to component catalog information IntraFlow Design- Pro ™ Software

33. TM Keep populating & connecting dots IntraFlow Design- Pro ™ Software

34. TM Toggle to substrate view Component & flowpath defines fitting requirement IntraFlow Design- Pro ™ Software

35. TM Toggle to design view Generate Documentation IntraFlow Design- Pro ™ Software

36. TM Output files: - BOM - Fitting Layout - System Layout - System Definition IntraFlow Design- Pro ™ Software

37. TM IntraFlow Design- Pro ™ Software Beta Test Target - End March, 2004 IntraFlow Design-Pro™

38. TM IntraFlow ™ End Game Smaller, Less $, Easier to Build & Modify 17-1/2” 19-1/2” 29” 30”

39. TM Acknowledgements Frank Ruiz Consultant to Parker Inventor of IntraFlow Ken Reid Parker IntraFlow Design Engineer

40. TM Patent Pending Parker IntraFlow ™ Thank You!