1. COSMOS Components and Smart Machines with Micro-Nano Surface Embedded Sensors

2. The Vision Improved interaction between human and machines. Smart machines with imbedded sensors will improve safety, lifetime and performance. Short periods with improper operation with critical parameters may be avoided. Create intelligent surfaces of the future.

3. The Goal Develop a sensor embedded into a strong, self lubricating, diamond like carbon (DLC) coating. Substrate CCr-CrN layer CVD DLC Embedded Sensor

4. Cross-disciplinary task Surface embedded sensors Sensor design and technology DLC coating technology 3D structurization Interface: Wiring and electronics Sensor test Coating test

5. The Team Acreo –Peter Leisner Sintef, –N. Peter Østbø Danish Technological Institute –Lars Pleth Nielsen VTT –Helena Ronkainen

6. Danish Technological Institute (DTI) Responsible: Centre Manager, M.Sc., Ph.D. Lars Pleth Nielsen Contribution: –Plasma-enhanced Si 3 N 4 as a potential electric insulator –Wear-resistant PVD/CVD coatings –Ion beam accelerator for metal doping of DLC –Thermocouple based on e.g. copper/constantan –Testing of sensors and coatings

7. Acreo AB, Sweden Responsible: Manager, Ph.D. Peter Leisner Contribution: –3D-micro structuring –Sensor design –Wiring and electronic connectors to sensor unit –Interface to the surrounding

8. Sintef/MiNaLAB, Norway Responsible: Research Scientist, Ph.D. (Dr. ing.) N. Peter Østbø Contribution: –Know-how and capability within piezoelectric thin films –Plasma-enhanced Si 3 N 4 (restricted to compatible substrates) –ALD coatings (advanced oxides, nitrides etc.) –2D-3D micro structuring –Sensor design –Materials and chemistry (polymers, wear-resistant coatings)

9. VTT Technical Research Centre of Finland Responsible: Senior Research Scientist, Dr. (Tech.) Helena Ronkainen Contribution: –Sensor design –Wear-resistant coatings: Diamond like carbon coatings –Integration of piezoelectric material (e.g. AlN) with patterned MEMS structures –Integration of electronics –Tribological test of sensor structures