1. The Mask-Sphere, M-S Is calibrated by setting it into the conical cup and recording the mask position with a fixed C- CCD. The M-S is rotated 4x by 90° around the vertical axis and the center of the M-S is the mean of those readings. ( ± 2µm) Purpose: The position of a cone can be measured by a CMM (using a sphere) as well as with a C- CCD (using the M-S). Hence calibrating the position of a C-CCD with a CMM. Glass-RASNIK glued to Center of 19mm Brass Sphere MagnetIron plate LEDs Calibration

2. 2 3 5 4- Inverted C-CCD with FOP in middle of alu frame, 5- C-CCD mounted on PCB and sitting on M-S 1 4 M-S Calibration 1- Cone w/ inverted M-S, 2- M-S in cone clamped to vertical stage, 3- Flexible PCB mounted on x-y sage,

3. Surveyed Reference Ruler for CMM for Ruler The “Ruler” measures the distance between two spheres (conical cups) M-S

4. The M-S was rotated to 0°, 90°, 180°, 270° and 360° and the images were analyzed at nine different reference points. The 0° and 360° degree measurments agreed to 3µm and 4µm RMS in x and y. The center of rotation of the M-S was found to be the same for each of the nine points with in a stdev of 2 and 3µ. 1 2 3 4 5.6 7 8 9

5. The stdev of x and y for 0 and 360° measurements was reduced to 2.5µm and 3.3µm. The center of rotation of the M-S was found to be the same for each of the nine points within a stdev of 1.1µm and 0.9µ. The same images were analyzed with the reference point 100µm in x and y from the center of rotation.

6. -125 -100 -3 100 0 ~125 125 100 0 -100 -125 0 16 ~19 ~12.5 3 44 37 -100 -141.4 -165 35 0 -35 21.9 -18.7 0 18.7 7.9 -7.3 -30 30 Calibration & Test Plate for 100/141mm ±2mm Ruler 12 – 100±1mm 8 – 141±1mm 3 rd points to “balance” ruler

7. First Ruler Measurements The ruler can rotate about its single ball changing the y-position of the CCD wrt the M-S. It was set down ten times: 5x somewhat controlling the y- position, 5x w/o any control. The graph shows that the M-S was rotated by about 1/40 radians. Correcting for this rotation reduces the sigma of the distance measurement from 27µm to 4.