1. MHI#10 号機の 1 回目の EP2  Process log  Status of working  Monitor data during EP & Rinsing process Period : 2010/5/11 ～ 5/17 Process : CP @flanges, EP2(20μm) under low current density, Degreasing(FM-20), HPR x 2, Assembly in C.R., Vacuum evacuation, Leak check, Baking @100 ℃ (48hours) Preparation : Washing vacuum components with ultrasonic, Cleaning in C.R. Workers : M. Sawabe, Kirk, M. Satoh (KEK), K. Nakamura, N. Tasaki, F. Tsukada (Assist Engineering Co.), T. Okada, M. Iitake (K-VAC), M. Asano, S. Imada, T. Yanagimachi (Nihon Advanced Technology) Kirk 1 STF Cavity Group Meeting @2010/5/17

2. Process log ① STF Cavity Group Meeting @2010/5/17 2 5/1110:05~CP @flanges (No crack at every flange) 10:45~Attachment of jigs for EP 11:40Set cavity to EP bed with crane 13:08Installation of cathode bar to cavity 13:27Meeting for tomorrow’s working procedure 13:41Pressure test with N 2 gas Set data logger to cavity 13:30~Vacuum parts rinsing with ultrasonic in C.R. 5/12 9:00Working starts 10:05EP2 starts 11:17EP2 stops [1h12m34s] / Idling rotation (3 rpm) 11:37Idling rotation stops 11:38EP acid is removed from cavity (0.023MPa) 12:02First rinsing with ultra pure water starts (0.025MPa) 13:36First rinsing with ultra pure water stops 13:43Detachment of restriction jigs / Data logger detached / adjusting degreaser(FM-20) 13:55Un-installation of cathode bar from cavity / washing cathode bar 14:12transferring cavity from EP bed to wagon / Checking inside cavity (No marks) / Smelling sulfur a little 14:15Detachment of jigs for EP 14:37Detaching every blind flanges 14:38Shower rinsing starts in CP room 14:47Shower rinsing stops / Checking inside cavity (No marks)

3. Process log ② STF Cavity Group Meeting @2010/5/17 3 5/1214:50Attachment of jigs for degreasing 15:00Flowing FM-20 into cavity 15:05Degreasing with ultrasonic starts 17:05Degreasing with ultrasonic stops 17:08Removing FM-20 from cavity 17:20Detachment of jigs for degreasing 17:22Shower rinsing starts in CP room 17:29Shower rinsing stops / Checking inside cavity (No marks) 17:42Transferring cavity from wagon on turntable for HPR using crane 17:45Checking tolerance between position of nozzle and center of beam pipe 17:49Checking HPR machine by rinsing inside cavity in only one stroke 17:59HPR for outside cavity starts 18:311 st HPR for inside cavity starts 23:491 st HPR for inside cavity stops [5h18m] (6 turns) 23:53fin.

4. Process log ③ STF Cavity Group Meeting @2010/5/17 4 5/13 9:00Attachment of blind flanges at every port for 2 nd HPR 9:402 nd HPR for inside cavity with blind flanges starts 14:042 nd HPR for inside cavity with blind flanges stops [5h24m] (6 turns) 14:10Cavity enters into C.R. Preparation for attachment of Pirani gauge to pumping system Slow leak / Shutdown pumping system / Attachment of Pirani gauge Restarts pumping system (rotary pumps stops several times) Exchange for the other pumping system [O.K.] 14:30Assembly in C.R. (Class 10) starts 16:50Assembly in C.R. (Class 10) stops 17:00Vacuum evacuation starts 17:30Leak check (small leak from vacuum pipe) [O.K.] 18:00Baking @100 ℃ starts 19:44Cavity vacuum : 5.5 x 10 -4 Pa @104 ℃ /93 ℃ 5/1418:35Cavity vacuum : 5.39 x 10 -5 Pa @105 ℃ /102 ℃ 5/1522:42Cavity vacuum : 3.61 x 10 -5 Pa @106 ℃ /99 ℃ Baking Off / Ion Pump ON [48hours baking] / Vacuum not so good 23:01Cavity vacuum : 3.76 x 10 -5 Pa @92 ℃ /77 ℃ 5/1622:45Cavity vacuum : 2.96 x 10 -5 Pa / I.P head : 7.2 x 10 -7 Pa 22:48Check pumping system in C.R. 23:042.07 x 10 -5 Pa@ULVAC, 3.37 x 10 -5 Pa@ANELVA, 1.2 x 10 -6 Pa@I.P.

5. Process log ④ STF Cavity Group Meeting @2010/5/17 5 5/17 1:050.91 x 10 -5 Pa@ULVAC, 2.92 x 10 -5 Pa@ANELVA, 7.7 x 10 -7 Pa@I.P. 8:59Check pumping system in C.R. Leak check for every vacuum components [O.K.] Leak check cavity flange [O.K.] Leak check by hood method [O.K.] Leak check environment around cavity [O.K.] 5.5 x 10 -8 Pa@I.P. No leak! 10:02Turbo  I.P. 13:548.98 x 10 -6 Pa@ULVAC, 2.94 x 10 -5 Pa@ANELVA, 8.3 x 10 -7 Pa@I.P.

6. Status of working ① STF Cavity Group Meeting @2010/5/17 6

7. Status of working ② STF Cavity Group Meeting @2010/5/17 7

8. Status of working ③ STF Cavity Group Meeting @2010/5/17 8

9. Status of 1 st EP2 for MHI#10 ① 9 current voltage T cavity T reservoir T room T cavity average current density 平均電流密度が 30mA/cm 2 程度になる ように電圧を調整する。 (low current density EP) さらに、窒素ガスを流している。

10. Status of 1 st EP2 for MHI#10 ② STF Cavity Group Meeting @2010/5/17 10 左図は平均電流密度と電圧の相関 右図は定常状態での分布 target

11. Status of 1 st EP2 for MHI#10 ③ STF Cavity Group Meeting @2010/5/17 11 #1#2#3#4#5#6#7#8#9#10 EP2 の間の空洞温度の状況。

12. Status of 1 st EP2 for MHI#10 ④ STF Cavity Group Meeting @2010/5/17 12 #1#2#3#4#5#6#7#8#9#10 一次洗浄中の空洞温度の状況。 超純水導入後に、空洞下部から 温度上昇が起こっているのが わかる。

13. Status of 1 st EP2 for MHI#10 ⑤ STF Cavity Group Meeting @2010/5/17 13 #1#2#3#4#5#6#7#8#9#10 一次洗浄中の空洞温度の状況。 （前ページの拡大図） 空洞下部からの温度上昇の タイミングは各セル間で微妙に ずれており、水が徐々に溜って いくことを示している。

14. STF Cavity Group Meeting @2010/5/17 Status of HPR for MHI#10 14 ノズルは 1st HPR では６往復、 2nd HPR では５往復させた。 Particle が over-range している 1 往復目の TOC は うまく測れていないみたい 蓋付き HPR ではいずれも激減している

15. 今回の処理で変更したところ Degreasing (FM-20) を２時間にした。 degreasing 後のシャワー洗浄を入念に行った。 温水超音波洗浄をスキップした。 HPR 室の雰囲気を良くするために、事前に空放水を行った。 おかげで、 TOC の振る舞いは以前のような正常なものに戻った。 いつも使用している空洞排気系が故障したため、急きょお隣の 排気系で代用した。 イオンポンプの引きがすごく悪化している。 ベーキング終了後、一日経過しても真空がなかなか下がらなかった。 STF Cavity Group Meeting @2010/5/17 15 低電流密度 ( ～ 30mA/cm 2 )EP や EP2 及び一次洗浄中の窒素ガス導入などに変更無し！