1. Hiden Analytical Excellence in plasma diagnostics An Introduction to the Hiden EQP Excellence in Plasma Diagnostics An Introduction to the Hiden EQP www.HidenAnalytical.com Introduction

2. Hiden Analytical Excellence in plasma diagnostics An Introduction to the Hiden EQP Excellence in Plasma Diagnostics Plasma Processes  Techniques  DC Magnetron  Pulsed Plasma  Laser Ablation  RF Driven  TCP  ICP  Electron Cyclotron Resonance  Applications  PECVD  Etching  PVD  Plasma Spray  Hard Coatings  Ion implantation

3. Hiden Analytical Excellence in plasma diagnostics An Introduction to the Hiden EQP Excellence in Plasma Diagnostics Factors Affecting Plasma Constituents  Macroscopic  Power Feeds  Gas supply  Pressure  Electric Fields  Magnetic fields  Heating / cooling  Leaks  Contamination  Physical factors  Microscopic  Neutrals  Positive / Negative ions  Electrons  Radicals  Gas phase reactions Complex System To Predict Factor Affecting Plasma Constituents

4. Hiden Analytical Excellence in plasma diagnostics An Introduction to the Hiden EQP Excellence in Plasma Diagnostics What can the EQP do for you? The Hiden EQP is a combined Mass / Energy analyser for the analysis of IONS, NEUTRALS, and RADICALS from plasma processes The Hiden EQP system comprises:  Ion extraction optics  Ioniser  Sector field energy analyser  Triple filter mass analyser  Pulse ion counting detector  PC data system with Windows software

5. Hiden Analytical Excellence in plasma diagnostics An Introduction to the Hiden EQP Excellence in Plasma Diagnostics The Hiden EQP. Collector QUADRUPOLE ENERGY ANALYSER Pumping Orifice Extractor Lens 1 Filaments F1, F2, e - Energy Source cage Axis Lens 2 Quad, Vert, Horiz Axis Focus Suppressor 1 st Dynode

6. Hiden Analytical Excellence in plasma diagnostics An Introduction to the Hiden EQP Excellence in Plasma Diagnostics The Hiden EQP The Hiden EQP. Laser Drilled Orifice  User defined dimension from 30  m  +ve / -ve ions, neutrals or radicals  Pre-thinned for optimum sampling  Software control for minimum plasma effects  Plasma electrode coupling option – allows the user to configure the orifice to exactly follow electrode conditions during operation.

7. Hiden Analytical Excellence in plasma diagnostics An Introduction to the Hiden EQP Excellence in Plasma Diagnostics The Hiden EQP The Hiden EQP. Extractor / Lens Assembly  Software controlled extraction / Focus  Discriminates +ve, -ve, e -, radicals  Fully tuneable for optimal detection  Integrated ionisation source

8. Hiden Analytical Excellence in plasma diagnostics An Introduction to the Hiden EQP Excellence in Plasma Diagnostics The Hiden EQP 45° Electrostatic Sector Analyser  Optimum transmission cf. Bessel box  Minimum perturbation of ion flight path  Constant ion transmission at all energies  Energy resolution down to 0.25 eV FWHM  Energy scan at increments from 0.05 eV  Floating option up to 10 KeV

9. Hiden Analytical Excellence in plasma diagnostics An Introduction to the Hiden EQP Excellence in Plasma Diagnostics The Hiden EQP The Hiden EQP. Triple Filter Quadrupole  Discrete ioniser as standard  RF only pre / post filters  Minimises effects of fringe fields  Enhanced peak separation / transmission  Detection to 5 PPB  Enhanced long term stability  Enhanced contamination resistance  Full source control, e - attachment option

10. Hiden Analytical Excellence in plasma diagnostics An Introduction to the Hiden EQP Excellence in Plasma Diagnostics The Hiden EQP The Hiden EQP. Channeltron PIC  7 decades continuous dynamic range  24 bit counter for 1c /s resolution  Faraday Cup for high density plasmas  Signal gating with 1  s resolution – energy & mass distributions vs time  TTL / DDE data export options

11. Hiden Analytical Excellence in plasma diagnostics An Introduction to the Hiden EQP Excellence in Plasma Diagnostics EQP Options  2500 amu option for polymer and cluster studies  Gating input for pulsed plasma applications  Positive and negative ion capability  Etching or deposition studies

12. Hiden Analytical Excellence in plasma diagnostics An Introduction to the Hiden EQP Excellence in Plasma Diagnostics EQP Options. 2500 amu EQP with z drive EQP with RF driven electrode EQP Options

13. Hiden Analytical Excellence in plasma diagnostics An Introduction to the Hiden EQP Excellence in Plasma Diagnostics The Hiden EQP may be configured for:  Analysis through a --- viewport --- grounded electrode --- driven electrode  High pressure plasmas with double differential pumping  Magnetically confined plasmas with Mu-metal & radio-metal shielding  Analysis of high mass (1000 amu)  Analysis of high energy (1000 eV)

14. Hiden Analytical Excellence in plasma diagnostics An Introduction to the Hiden EQP Excellence in Plasma Diagnostics Example Data EQP measuring every 20 ms 100 ppb C + at ~20ppb

15. Hiden Analytical Excellence in plasma diagnostics An Introduction to the Hiden EQP Excellence in Plasma Diagnostics Electron Energy Spectra The data compares the appearance potentials for the principle cluster ions formed from Buckminsterfullerene

16. Hiden Analytical Excellence in plasma diagnostics An Introduction to the Hiden EQP Excellence in Plasma Diagnostics Negative Ions/Ion Energy Distribution Negative Ions / Ion Energy Distributions The data show the presence of O - formed from e - + CO 2  O - + … Discrete paths at e - energies of 70, 8.5 and 4.2 eV. The ion energy distribution of these species is seen to be a function of the electron energy involved.

17. Hiden Analytical Excellence in plasma diagnostics An Introduction to the Hiden EQP Excellence in Plasma Diagnostics Energy Analysis of Plasma Components SF + Energy V SF 2 + Energy V SF 3 + Energy V F + ions  Even in an apparently homogeneous plasma the individual component species can exhibit a wide variation in energies.

18. Hiden Analytical Excellence in plasma diagnostics An Introduction to the Hiden EQP Excellence in Plasma Diagnostics Examination of Plasma-Specific Processes H - /CH 4 Plasma Off e - + H 2 = H - H - /CH 4 Plasma On  The plasma produces activated species as well as electrons.  These species can interact and react in highly specific fashion e.g. hydride anion formation.

19. Hiden Analytical Excellence in plasma diagnostics An Introduction to the Hiden EQP Excellence in Plasma Diagnostics Electron Attachment Analysis  O - species may be formed from various precursors e.g. CO, CO 2, N 2 O via electron attachment and subsequent dissociation. However the low energy resonant electrons required for this process are characteristic of the precursor involved.

20. Hiden Analytical Excellence in plasma diagnostics An Introduction to the Hiden EQP Excellence in Plasma Diagnostics Also available: Langmuir Plasma Probes.  RF compensated Langmuir Probe with Z-drive  Automatic analysis with real time trend display of key plasma parameters including:  Ion Density  Plasma Potential  Electron Energy  Debye Length Also available