1. November 2004 Low Hanging Fruit Low Cost Energy Efficiency Opportunities in Cleanrooms

2. Free Cooling

3. Psychrometric Chart for San Jose 3,200 Hours Minimum

4. Free Cooling Configuration #2 - Series PCW Only

6. An Innovative Layout Possibility Dual Temperature Chilled Water Plant

7. Pumping Problems

8. Current Primary - Secondary Pumping

9. VFD Chillers

10. Lower Chiller Condenser Water Temperatures

12. Use Variable Speed Drives n Good for fans, even better for pumps, which are typically controlled and balanced by throttling

13. Remove Booster Pumps and close bypasses

14. Close 3-way Valves n B8 has a highly variable load due to air washer capacity, yet a constant flow

15. Aim for Highest Possible CHW Delta T

16. Exhaust Optimization Exhaust Reduction Amount Annual Electricity Savings (kWh) Annual Gas Savings (Therms) Annual Energy Cost Savings ($) 5,000 cfm223,40024,350$20,800 10,000 cfm440,00048,700$41,200 20,000 cfm854,00097,400$81,300 n Tool exhaust can be optimized via tracer gas or other accepted test methods n In most cases tool exhaust can be reduced 10 – 50% n Fume containment testing required for optimization also verifies worker safety n Case Study Savings Opportunity:

17. When replacing broken or worn out equipment Select the most efficient option n Efficiency often has little relationship to cost of equipment n E.G. ----- n Pumps n Electric Motors n Fans n etc.

18. Variable Speed Drive Compressors and waste heat regen dryers n VSD Compressors address the cycling problem

19. Commissioning / Retrocommissioning n Retrocommission - on a regular basis commission key components of system n E.G. - Develop standard tests for key control loops

20. Effect - Supply Air Temperature is Deficient Design Supply Air Temp is 55 deg F with no SAT reset

21. Cause Chilled Water Temperatures

23. Commission to avoid cycling

24. Control Optimization

25. THANK YOU! Rumsey Engineers, Inc. 99 Linden Street Oakland, CA 94607 (510) 663-2070 www.RumseyEngineers.com prumsey@RumseyEngineers.com