1. Studying micro-objects with SEM (Scanning electron microscope) Student: Michał Łępicki (Warsaw University of Technology) Supervisor: Oleg Leonidovich Orelovich Center of Applied Physics of Flerov Laboratory of Nuclear Reactions JINR

2. Introduction

3. Introduction

4. Introduction

5. Introduction

6. Introduction

7. Introduction

8. Introduction

9. Introduction

10. Introduction

11. Introduction

12. Introduction

13. Program of practices Layout and performance of SEM Layout and performance of SEM Preparing and coating samples Preparing and coating samples Operating SEM Operating SEM Electron data processing Electron data processing

14. Layout and performance of SEM 1-3Electron gun 4, 10Aperture 5-6Condenser lenses 7Scanning coils 8Stigmator 9Objective lens 11X-ray detector 12Pre-amplifier 13Scanning circuits 14Specimen 15Secondary electron detector 16-18Display/Control circuits

15. Layout and performance of SEM

16. Preparing and coating samples General view of ion sputter

17. Preparing and coating samples

18. Reasons of coating specimens The surface of sample must be electro conductive to minimalize charging from beam The surface of sample must be electro conductive to minimalize charging from beam The surface must be thermo conductive to minimalize local heating The surface must be thermo conductive to minimalize local heating The material of sample must have a high atomic number to increase secondary electron emission The material of sample must have a high atomic number to increase secondary electron emission

19. Preparing and coating samples

20. Gold coated sampleSample without coating

21. Operating SEM

22. Preparing and coating samples Tilt 0 deg – shadowless illumination Tilt 30 deg

23. Operating SEM Tilt 0 deg Tilt 30 deg TILT

24. Electron data processing A/D

25. Electron data processing N=1,75*10^7 [channels/cm^2]R=0,5μm average channel radius 13,8% surface cross section (SCS) SCS= Pi*R^2*N*100%

26. Drain water 70ml filtrated

28. Puddle water 50ml filtrated

30. Me operating SEM