1. Copyright National Air Filtration Association 2006 Rev. 2 Clean Spaces

2. Copyright National Air Filtration Association 2006 Rev. 2 Do you have a clean room or a cleanroom A clean room is what your mother always wanted from you And a cleanroom is what we are discussing today

3. Copyright National Air Filtration Association 2006 Rev. 2 What is a Cleanroom? By definition a “Cleanroom” is: A room in which the air supply, air distribution, filtration of air supply, materials of construction, and operating procedures are regulated to control particle concentrations so that appropriate air cleanliness levels, as defined in FED-STD-209, can be met. (IEST-RP-CC006.2)

4. Copyright National Air Filtration Association 2006 Rev. 2 What is a Cleanroom? By definition a “Cleanroom” is: “A room in which the concentration of airborne particles is controlled and which is constructed and used in a manner to minimize the introduction, generation and retention of particles inside the room, and in which the relevant parameters, e.g. temperature, humidity and pressure are controlled as necessary” --ISO-14644-1

5. Copyright National Air Filtration Association 2006 Rev. 2

6. Copyright National Air Filtration Association 2006 Rev. 2 History of HEPA Filters High Efficiency Particulate Air filter

7. Copyright National Air Filtration Association 2006 Rev. 2 To Be A HEPA Filter “Throwaway extended-medium dry-type filter in rigid frame having minimum particle-collection efficiency of 99.97% (that is a maximum particle penetration of of 0.03%) for 0.3 µm particles of thermally- generated DOP particles or specified alternative aerosol.” --IEST

8. Copyright National Air Filtration Association 2006 Rev. 2 Background on HEPA Filters

9. Copyright National Air Filtration Association 2006 Rev. 2 Background on HEPA Filters Atomic Energy Commission Microelectronics Pharmaceutical Medical Device Food Processing

10. Copyright National Air Filtration Association 2006 Rev. 2 Background on HEPA Filters

11. Copyright National Air Filtration Association 2006 Rev. 2 IMPACTION DIFFUSION INTERCEPTION RELATIVE EFFECT OF PARTICLE COLLECTION MECHANISMS 99 98 95 40 60 70 50 30 20 0.11.010.00.01 PARTICLE DIAMETER (MICRONS) COLLECTION EFFICIENCY(%) OVERALL EFFICIENCY Typical Air Filtration Principles

12. Copyright National Air Filtration Association 2006 Rev. 2 PARTICLE DIAMETER (MICRONS) THEORETICAL HEPA FILTER COLLECTION EFFICIENCY 0.3µm 99.999 0.11.010.00.01 99.99 99.97 99 90 50 10 COLLECTION EFFICIENCY(%) HEPA Filter Mechanisms

13. Copyright National Air Filtration Association 2006 Rev. 2 99.999% Ultra Low Penetration Air

14. Copyright National Air Filtration Association 2006 Rev. 2 99.9999% Super Ultra Low Penetration Air

15. Copyright National Air Filtration Association 2006 Rev. 2 Testing at the FACTORY for grading of the filters – IEST-RP-CC001.4 A, B, C, D, E, F, G H, I, J, K Type of HEPA Filters

16. Copyright National Air Filtration Association 2006 Rev. 2 Industry Standards

17. Copyright National Air Filtration Association 2006 Rev. 2 In-Situ Integrity Testing what is the difference between hand scanned and total penetration ?  total penetration will take a 1cfm (28.3L/m) sample from the entire flow volume of the tested filter -- approximately a 1:750 ratio  hand scanned will sample more on an-- approximate 1:1 ratio

18. Copyright National Air Filtration Association 2006 Rev. 2 HEPA Filter Integrity Testing

19. Copyright National Air Filtration Association 2006 Rev. 2 Why Test a HEPA Filter

20. Copyright National Air Filtration Association 2006 Rev. 2 In-Place Integrity (full media scan) also includes joints, frames, ceiling, gaskets and other seals HEPA Filter Integrity Testing Methodology

21. Copyright National Air Filtration Association 2006 Rev. 2 Laskin nozzle generator HEPA Filter Integrity Testing

22. Copyright National Air Filtration Association 2006 Rev. 2 thermal generator for challenge HEPA Filter Integrity Testing

23. Copyright National Air Filtration Association 2006 Rev. 2 Who Designed Your Facility?

24. Copyright National Air Filtration Association 2006 Rev. 2

25. Copyright National Air Filtration Association 2006 Rev. 2 Summary Systems using HEPA or ULPA filters that are both factory and in-situ tested provide the cleanest air to the space.