1. Jason Choi Professor Andrei Shkel Adam Schofield, Alex Trusov, Ozan Anac

2.  UCI Micro Systems Laboratory  Introduction to Gyroscopes  Introduction to Resonators ◦ Basic building blocks of tuning fork gyroscopes  Gyroscope Characterization  Our Approach to Characterizing Devices ◦ Microvision with a Stroboscopic Algorithm  Our System  Results

3.  Development of MEMS Inertial Sensors ◦ Gyroscopes  Tuning Fork Gyroscope  Nuclear Magnetic Resonance Gyroscope  Design  Modeling  Fabrication  Characterization

4.  What is a gryoscope? ◦ A device that can measure angular motion or displacement  Applications ◦ Aerospace  Inertial guidance systems ◦ Automotive  Angular rate sensor ◦ Entertainment  Pointing devices, Gaming controller ◦ Medical  Vestibular prosthesis http://mems.eng.uci.edu/ http://www.army.mil http://www.aa1car.com

5.  Coriolis Effect Drive Oscillation Coriolis Acceleration http://www.li-bachman.net

6. Design and Fabricated by Alex Trusov http://mems.eng.uci.edu/ 3 mm

7. Image taken by Alex Trusov

8. AC Voltage Ground Drive Oscillation 3 mm Design and Fabricated by Alex Trusov Thickness of Each Comb = 6 micons

9. Drive Oscillation

10.  Frequency Response ◦ Resonant Frequencies  Maximum Amplitudes  Difficulty ◦ Small Micro-Scale Devices (mm) ◦ Vibration at High Frequency (kHz)  Thousands of vibrations per second ◦ Vibration Amplitudes are small (few microns)

11.  Capacitive Sensing ◦ Change in the gap between two electrodes changes the capacitance. ◦ Two electrical terminals are used other than the driving terminals.  Drawbacks ◦ Changes in capacitance are small. ◦ Indirect method to measure deflection  Calculation of physical deflection is done by theoretical calculations.

12.  Proven Characterization Method ◦ Jasmina Casals  Main Idea ◦ Video record the vibration of device ◦ Extract vibration amplitudes from the extracted frames of the video  Advantages ◦ Optical, Non-Contact Characterization Method ◦ Minimal Control Electronics

13.  Standard Image  Limited FPS (frames per second) of video camera  Stroboscopic Technique ◦ Solution: Stroboscopic Technique  N x (Frequency of Strobe) = Frequency of Vibration  N = Positive Integer  Example: If Frequency of Vibration = 30KHz  One solution: Frequency of Strobe = 30Hz, N = 1000 Picture by Alex Trusov

18. Computer Image Pro - Capture Image - Image Processing MATLAB - Data Processing - Sinusoidal Fit AC/DC Source Strobe Light CCD Camera MEMS Device Microscope Trigger Signal

19. AC/DC Source CCD Camera Microscope MEMS Device Stroboscope Computer Trigger Source

20. MEMS Device

25. Yellow: non-moving part of device Pink: moving part of device

28.  One Example  Freq. of Motion ◦ 2460Hz  Freq. of Strobe ◦ 55.909Hz ◦ N = 44  Amp. of Motion ◦ 5.77 ± 0.05 micron

29.  Successful Final Product ◦ Measure amplitudes of vibration  Image Pro Macro Programming  MATLAB Data Processing ◦ Amplitude Precision  (standard deviation of nonmoving object)  ± 0.05 microns ◦ Successful Upgrade in Camera  Better Images ◦ Optional LabVIEW VI to automatically actuate device and set strobe frequency

30.  Verify Accuracy of Amplitudes with Electrical Capacitance Measurements  Characterize Devices  Continue Project to Characterize 3-D Movement

31.  Said Shokair  Professor Andrei Shkel  Jasmina Casals  Adam Schofield  Alex Trusov  Ozan Anac  IM-SURE Fellows

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