1. ITRS 2001 ESH Thrust

2. ESH 2001 Objective Maintain a balance between: 1)Solutions to ESH requirements driven by external elements such as regulations and public policy and, 2)Identification of technology driven ESH requirements which truly must be met to enable delivery of a given technology

3. 2001 ITRS ESH Cross-cut Challenges Front End Processing –Hi K Dielectrics Lithography –Chemical Amplifiers in Resist Interconnect –Metalization Factory Integration –Energy & Water Conservation; Space Requirements Assembly & Packaging –Environmental Impact of Products

4. Key ESH Challenge #1 Chemical & Material Assessments Need for quality rapid assessment methodologies to ensure that new chemicals can be utilized in manufacturing, while protecting human health, safety, and the environment without delaying process implementation Chemicals in existing uses require reassessment when new chemical restrictions are identified

5. Chemicals and Materials Management

6. Key ESH Challenge #2 Resource Conservation Natural Resource Conservation (Energy, Water) Need to design more energy and water efficient processing equipment Chemicals And Materials Use Need more efficient utilization of chemicals, and materials Resource Recycling Increase resource reuse and recycling

7. Resource Conservation

8. 2001 ITRS ESH Changes Simplify & Eliminate Redundancy –Combine Technology Tables in Several Cases Refine Table to Reflect Requirements Versus Activities Revise Quantitative Goals, Where Appropriate –Water, Energy, PFCs, Chemicals Split out ESH methods development from technology requirements (Intrinsic ESH Requirements) Added section for DFESH

9. ESH Intrinsic Requirements

10. Design for Environmental, Safety and Health