1. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 1 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 香港理工大學 工業及系統工程學系 先進光學製造中心 Advanced Optics Manufacturing Centre Department of Industrial and Systems Engineering The Hong Kong Polytechnic University 自由曲面光學元件的超精密加工技術的發展及其應用 Development of Ultra-precision Freeform Machining Technology and its Applications Dr. Sandy To 杜雪博士

2. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 2 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 提纲 超精密加工技术的 发展 超精密自由曲面加工技术及应用 实际案例分析 先进光学制造中心简介

3. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 3 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室

4. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 4 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 It is forecast that the global market value for photonics will increase to US5200 billions from 2002 to 2010 Significant growth can be found in CCD camera in mobile and telecommunication products, flat panel displays and various LED lighting systems. Background of the Project 项目背景 Growth of market for Camera in Mobile phones Market for the applications of LED lighting

5. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 5 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Market trend in the application of LED LED 應用的市場趨勢 With the advantages of energy saving, long life, environmentally friendly characteristics, steadily enhancement of output flux, and decreasing LED prices, the application of LED is forecasted to be around 9000 million US dollar in 2011 in worldwide market.

6. 6 Optical design 光學設計 Lighting design Imaging design Precision injection moulding 精密注塑技術 Ultra-precision machining technology 超精密加工技術 Freeform Surface Measurement 超精密表面測量 Manufacturing Process of Precision Optics 精密光學元件的制造过程

7. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 7 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室  Rotational Symmetric: flat, spherical, aspheric, diffractive  Freeform and Microstructures: non-rotational symmetric Photonics (Optics) – Geometries 光学元件 – 根据几何结构分类 Freeform: Scanner optics, progressive ophthalmic optics, toroidal and cylindrical optics for diode laser and astronomy Microstructure: Pyramid like structures for displays, lens arrays for automotive lighting, grooved connector for fiber optics

8. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 8 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Introduction to Ultra-precision Machining Technology 超精密加工技術 Single-point diamond turning technology Ultra-precision grinding technology Ultra-precision freeform machining technology

9. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 9 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Single-point Diamond Turning 单点金刚石加工技术 The process is capable of producing components with micrometer to sub-micrometre form accuracy and surface roughness in nanometer range. Single-point Diamond Turning (SPDT) is a machining process making use of a single crystal diamond cutting tool which possesses nanometric edge sharpness, excellent form reproducibility and wear resistance. The usual depth of cut in SPDT is in the order of a micrometer of less.

10. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 10 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Micro-optics used in mobile phone cameras Optical lens module Micro-optics with diffractive surface Micro-optics for cameras in mobile phones 用於手機相機的微型光學元件

11. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 11 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Aluminum cone mirror Machine: 2-axis Ultra-precision Machine (Precitech Nanoform 200) Application:Laser leveling equipment Material:Aluminum Profile: 45 deg. Cone surface Spindle speed2000rpm Feed Rate1.5mm/min Depth of cut2µm Tool tip radius0.5mm Cutting Parameters Ultra-precision machining of cone mirrors Application: Laser Leveling and Alignment equipment Cone mirror Cone mirrors Machined mirror surface

12. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 12 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Copper fresnel mold insert Machine: 2-axis Ultra-precision Machine (Precitech Nanoform 200) Application:Security systems Material:Copper Profile: Fresnel surface Spindle speed2000rpm Feed Rate1mm/min Depth of cut2µm Tool TypeHalf radius diamond tool Tool tip radius0.1mm Cutting Parameters Ultra-precision machining of copper fresnel mold inserts Copper mould insert Application: Security systems Fresnel surface

13. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 13 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Manufacturing Freeform Optics and Microstructures 自由曲面和光學微結構加工方法 2 Linear, C-axis machining Off-axis machining Fast Tool Servo Slow Tool Servo Spiral Milling Spiral Grinding Micro-milling Micro-grinding 2 Linear, Height Adjust (3D) Grooving 3 Linear Axis (3D) Raster Milling Raster Grinding Micro-milling Micro-grinding Grooving

14. 14 There is no NC programming software that is available to take the freeform optical design and can directly output a useable NC program for ultra-precision freeform machining. Difficult to accurate represent of the freeform surfaces with micrometer to sub-micrometer level of form accuracy. This is particular true when fitting a surface based on a cloud of points. Surface quality testing techniques which are still not available commercially worldwide. Challenges in Ultra-precision Freeform Machining 超精密自由曲面加工技术的挑戰

15. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 15 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Fabrication of Non-Rotationally Symmetric, Optical Surfaces Using XZC Positioning 採用 XZC 軸加工非旋轉對稱軸光學表面 Off-axis Parabola Progressive Torics Servoform 3D Slow Tool Servo 10mm amplitudes at 2 Hz* *Larger excursions available at lower frequencies. 70 Hz bandwidth X Z C Source: Precitech

16. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 16 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Application of Slow Tool Servo Machining Application 04.10-1STS Machine: 4-axis, Nanotech ® 350 machine with Upx ™ control system configured with positioning C-axis for Slow Tool Servo Material: Aluminum Surface: 2 x 3mm tilted flat Machining Results Form Accuracy P-V 0.093 µm Surface Roughness Determined in four points over entire circumference (every 90º) 1 - Ra 4.455nm 2 - Ra 2.921nm 3 - Ra 5.138nm 4 - Ra 3.631nm Average of 4 points 4.042nm Surface Machining Parameters Rough Cut Work Spindle: 50 RPM Depth of cut: 8µm Feed Rate: 25µm/rev. Tool: 1.56mm tool radius Final Cut Work Spindle: 150 RPM Depth of cut: 8µm Feed Rate: 4µm/rev. Tool: 1.56mm tool radius Aluminum Tilted Flat Application: Aluminum tilted flat for leveling measurement system Tilted Flat

17. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 17 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Freeform surface – Slow Slide Servo Machine: 4-axis Ultra-precision Machine with Slow Slide Servo (Moore Nanotech 350FG) Application:Freeform progressive lens Material:Nickel Copper Surface: Radial feed0.002mm/r ev Surface Increment 0.01mm Depth of cut2µm Tool tip radius0.5mm Cutting Parameters Mould insert Application of Slow Tool Servo Machining Application: Freeform progressive lenses

18. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 18 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Head- Mounted Display Optical System 頭盔顯示器 Freeform prism Mobile Head-Mounted TV and Display

19. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 19 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 FTS enables the diamond turning of optical microstructures such as micro-prisms, torics, off-axis aspherics, and various lens array formations at either 35 microns to 6mm of stroke. The axial position of the tool is real-time calculated with the use high resolution angular feedback on the work spindle and the linear position feedback of the machine translational slide. Fast Tool Servo (FTS) Machining 兩軸超精密加工快刀加工伺服器

20. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 20 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Departure 200 - 400 micron, frequency 200/100Hz Departure 200 - 400 micron, working frequency 200/100Hz FTS Facet Mirror 快刀加工多面鏡

21. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 21 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 FTS - Lenslet array 微透镜快刀加工 Machining Parameters Speed: 250 RPM Depth of cut: 4µm Feed Rate: 1mm/min. Application 03.11-1DT Machine: 2-axis, Nanoform ® 200 machine with FTS 70 Fast Tool Servo System Material: Electroless Nickel ElNi - 12mm diameter Surface: 10.9mm radius concave hexagonal lenslets on a 2mm pitch Ra 3.705 nm NewView of single lens Source: Precitech

22. 22 Mould insert Microlens array moulded using the mould insert Lens Array - Fast Tool Servo Machine: 2-axis Ultra-precision Machine with Fast Tool Servo (Precitech Nanoform 200) Application:Microlens array used in LED backlight module for mobile LCD Material:Nickel Copper Surface: Microlens array: Radius (concave) =0.24mm Pitch = 0.3mm Depth = 10µm to 30µm Aperture = 0.16 to 0.37mm Spindle speed50rpm Feed Rate1mm/min Depth of cut2µm Tool tip radius0.03mm Cutting Parameters SEM photography Application: Microlens array for LCD panel Application of Fast Tool Servo Machining

23. 23 o Work Spindle = 150 RPM o Depth of cut = 6µm o Feed Rate = 0.8mm/min o Tool = 1mm radius w/ 0º rake Lens Array - Fast Tool Servo Form Accuracy - Corner Cube Height Form Accuracy - Panel P-V 0.12 um P-V 0.097 um The surface machined was a series of concave corner cubes (4.5mm x 6.5mm x 30µm high) in OFHC with a diameter of 50mm. Source: Precitech Application: Multi-facet lens for vehicle turn signal light Mould insert Application of Fast Tool Servo Machining

24. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 24 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 The Configuration of Freeform Machine Freeform machine with three linear axes (X,Y,Z) together with rotating B and C axes for both raster milling and grinding of freeform surfaces including F-theta lens and V-groove. 5-axis Ultra-precision Freeform Machining System 五軸超精密自由曲面加工系统

25. 25 (Machine Tool) (Workpiece) Ultra-Precision Multi-Axis Raster Milling Machine 超精密五軸飛刀加工中心

26. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 26 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Machine: 5-axis ultra-precision freeform machining system (Precitech Freeform 705G) Material:Aluminum Surface: Machining Result: St=6.34 um and Sq=0.496um Spindle speed4000rpm Feed Rate6 mm/min Depth of cut20µm Tool tip radius2.529mm Cutting Parameters Freeform machining of a F-theta Lens 自由曲面加工 F-theta 透鏡 Application: F-theta lens for scanners Mould insert 26

27. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 27 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Raster Milling of micro-groove insert in Copper 微铣槽銑削加工 Cutting Parameters Spindle speed (rpm) Feed rate (mmpm) Rapid speed (mmpm) Depth of Cut (mm) Step distance (mm) Cutter tip radius (mm) Machining time (h) 400023000.0050.06015.5 Machine: 5-axis ultra-precision freeform machining system (Precitech Freeform 705G) Application:V-groove lenses used in camera flashlight system Material:Copper Surface: Micro-groove on a 16.0mm (length)  7.0mm (width). Application: Optical grooves for camera flash lighting systems Mould insert

28. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 28 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Ambilight enhances immersion and involvement in the content Optical light guide for entertainment devices 用於影音娛樂設備的光學導光板 Design and simulation Optical light guide

29. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 29 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Cylindrical surface Machine: 4-axis Ultra-precision Machine with Slow Slide Servo (Moore Nanotech 350FG) Application:Cylindrical collimating lens for bike LED lighting Material:Nickel Copper Surface: Cylindrical and TIR surfaces Feed Rate (Y axis)500mm/s Surface Increment0.002mm Depth of cut2µm Tool tip radius0.216364mm Cutting Parameters Freeform machining of cylindrical surfaces 自由曲面加工柱面 Application: Bike LED Lighting cylindrical collimating lens

30. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 30 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 30 ItemsCDDVDCBHDBD LD Wavelength (nm)780650405 Numerical Aperture0.450.60.650.85 Track Pitch (um)1.60.740.40.32 Mark Length (um)0.80.40.2040.14 Capability650M4.7G15GB25G As BD, CBHD and DVD are different in optical and configuration parameters, the optical pick-up need to be specialized designed to be compatible. 蓝光 DVD 光学系统的研发

31. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 31 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 31 Sag equation of surface 2 Design of Objective Lens 物镜的设计

32. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 32 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 32 LED 光學系统 250W Metal Halide Lamp Poor light pattern, Freeform lenses is needed to Increase output light efficiency to maximum Minimize occurrence of the dazzle effect Generate the rectangular light pattern

33. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 33 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Freeform reflectors LED roadlamp Freeform optical reflectors for LED road lamp 用於路燈的自由曲面二次光學元件

34. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 34 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 3-unit LED collimating lens Lens arrays Freeform Optics for Automotive Illumination 用於汽車照明的自由曲面光學元件 LED collimating lens Freeform reflector 7-unit LED collimating lens

35. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 35 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 CPV:Concentrator Photovoltaic System 光电收集系统 There are two type of CPV systems: -Using only ＜ Fresnel Lens ＞ -Using ＜ Fresnel Lens+Rod Lens ＞ ( From Isuzu Glass Co.Ltd http://www.isuzuglass.com/

36. 36 Solar Flux Fresnel Lens 1X 300X- 500X Solar Cell Receiver Superconductor Development of secondary optics to effectively collect the solar power so as to miniaturize the solar energy systems and reduce the use of solar panel A solar cell module Mould insert Large Fresnel lens for solar-energy systems

37. 37 Research on Multi-Functional Bionic Nanostructures The structure of the shark skin The structure of the lotus leaf surface The structure of the Butterfly wing surface Lotus leaf and butterfly wings which possess the specific structure giving them superhydrophobicity or self-cleaning properties. Compound eyes from insects which show excellent visual acquisition with possible future applications in high-speed motion detection and sensors in different areas Shark skin to manage the flow of liquid. For example, shark skin structure can reduce friction in water and drag reduction for other technical applications, e.g. high- efficiency heat exchanging copper tube. Swimsuits with shark skin structure Dragonfly ‘s compound eyes

38. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 38 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Machining of the micro-structure by raster milling Freeform request Freeform Design Surface Model Toolpath Generator Post Processor CNC Machine NC Code Cutting Parameters Products Measurement Free-interference toolpath Setting Tools Design

39. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 39 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Office Show room Reception Room and Meeting Room State Key Laboratory for Ultra-precision Machining Technology 超精密加工技术国家重点实验室

40. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 40 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Integrated Services provide by AOMC for Optics Design, Machining and Measurement of Ultra-precision Freeform Surfaces Precision Moulding of Plastic Lenses & components Optics Design Ultra- precision Freeform Machining Freeform Surface Measurement & Surface Characterization Customer need Freeform Optical Products

41. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 41 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Advanced Facilities for Ultra-precision Machining Technology Ultra-Precision Machines 7-axis Freeform Polishing Machine High-precision Injection Moulding Machines Freeform Nano- metrology Optics Testing Equipment

42. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 42 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Advanced Facilities for Ultra-precision Machining Technology Ultra-Precision Machines 7-axis Freeform Polishing Machine High-precision Injection Moulding Machines Freeform Nano- metrology Optics Testing Equipment 7-axis Ultra-precision Freeform Polishing Machine - Zeeko IRP 200

43. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 43 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Advanced Facilities for Ultra-precision Machining Technology Ultra-Precision Machines 7-axis Freeform Polishing Machine High-precision Injection Moulding Machines Freeform Nano- metrology Optics Testing Equipment

44. 44 Alicona IFM G4: 3D Optical Measuring System To measure complex details such as steep flanks, cutting angles and cutting edge radii; perform “Profile Analysis”, “Area Analysis”, “Form Analysis ”, “Volume Analysis”, “2D Image Analysis”. Advanced Facilities in Precision Measurement 先進的表面測量設備 Microlens array V-groove with steep slope Shark skin Irregular profile with steep slope

45. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 45 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Advanced Facilities for Ultra-precision Machining Technology Toyo Si 80 Battenfeld HM250/60 ARBURG 270U Ultra-Precision Machines 7-axis Freeform Polishing Machine High-precision Injection Moulding Machines Freeform Nano- metrology Optics Testing Equipment

46. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 46 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Advanced Facilities for Ultra-precision Machining Technology Ultra-Precision Machines 7-axis Freeform Polishing Machine High-precision Injection Moulding Machines Freeform Nano- metrology Optics Testing Equipment

47. 47 Fasda Enterprises Co., Ltd. Wynnewood Corporation Ltd. Asia Optical Industries Ltd. Morphotron Co., Ltd. Chang Chun Dongya Optical Co., Ltd. Sunrise Industrial (H.K.) Ltd. Soode Optik Pte Ltd. Ginfax Development Ltd. Photonics Packaging Service Ltd. Hongrita Plastic Mould Ltd.

48. THE HONG KONG POLYTECHNIC UNIVERSITY 香港理工大學 48 State Key Laboratory in Ultra-precision Machining Technology 超 精 密 加 工 技 術 國 家 重 點 實 驗 室 Contact us Thank You! 謝 謝 ! Dr. Sandy To http://www.aomc.hk Sandy.To@inet.polyu.edu.hkSandy.To@inet.polyu.edu.hk Tel: 852 2766 6587 Fax: 852 2764 7657 1 号馆 / Hall 1 展位 B 289-290