1. SUGAR: A MEMS Simulator www.sourceforge.net/projects/mems  Our goal: Be SPICE to the MEMS world  Provide quick simulations for tight design loop  Use structural elements like beams and plates, circuit elements, and elements that capture coupled effects  Be sufficiently simple to use for brainstorming  Be a building block for design synthesis and other simulation-intensive activities  Provide framework for measurement comparison to validate existing models, derive new models, and extract physical parameters David Bindel, Jason V. Clark, David Garmire, Babak Jamshidi, Shyam Lakshmin, Jiawang Nie Alice Agogino, Zhaojun Bai, James Demmel, Sanjay Govindjee, Ming Gu, Kristofer S.J. Pister

2. SUGAR Data Flow Users describe devices using text netlists Models written in C or Matlab describe netlist components Global equations assembled from local model equations Solvers analyze the global equations Users invoke solvers from Matlab, Lua, the web, or other programs Assembly Solvers NetlistModels User Interfaces

3. SUGAR in Action  Continuum element discretization might use O(10 6 ) DOF  SUGAR model is 10K DOF  Described with a few parameterized subnets  Simulated frequency response of micromirror took ~30 sec using model reduction techniques

4. Measurement Feedback  User interface prototyped and measurement code improved (to > 1 frame/sec)  Optical measurement facilities provided by Muller’s Matisse group  Validate simulations by comparison to measured data and improve models

5. M&MEMS: SUGAR on the Web  Hosted on Berkeley Millennium cluster  Requires only a browser  Version 2.0 used in Fall 2001 MEMS course  Version 3.0 will be used in Fall 2002 MEMS course

6. Recent Progress  SUGAR 3.0  Initially released 4/5/2002  Core functionality moved from Matlab to C/C++  Model development  Almost all SUGAR 2.0 models ported  Beam model with anisotropic warping effects (in testing)  Plate model with condensation of internal degrees of freedom (in testing)  Numerics  Model reduction for fast frequency-response  SuperLU for linear solves