1. Manip 6” Diameter TSP shield Top Level Middle Level Bottom Level Lower Level CF flanges Not threaded except wide bore Table top 3’ high (Al table top) Electro polished + vacuum annealed 8” Diameter REMOVABLE Baffle to shield turbo from TSP Sample (focus) will be offset 1” from chamber center at top level. TSP filament 8” Diameter

2. 8” LEED4.5” QMS 2.75” Sputter 6” Viewport 2.75” Wide bore 2.75” Evap Top Level – focus to a 2” diameter circle at center of chamber on this level. 12” 11” 2” On QMS port bolts come from inside 4.65”

3. 2.75” 4.5” Middle Level – focus to a 2” diameter circle at center of chamber on the top level. 2.75” Wide bore 4.5” 2.75” 2.75” Wide bore 2”

4. Lower Level – point horizontally 4.5” 2.75” Wide bore 2.75” 5”

5. Bottom Level – point horizontally 8” 2.75” 6”