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Dolan Bridge Zoom Show
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Optical Bridge Zoom Show
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Post Liftoff Zoom Show
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Working Optical Dolan Bridge Process 7-16-03 Spin on LOR20B 3000 rpm 45 s Bake 150 C for 2 minutes on hotplate Spin on S1813 3000 rpm 45 s Bake 115 C for 1 minute on hotplate Expose for 17 s with mask Develop with 1:2 MF312:DI for 105 seconds Rinse in running DI for 15 seconds Blow off with nitrogen
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Working Optical Dolan Bridge Process (continued) Double angle ±50° Aluminum evaporation Liftoff in 60° Nano Remover PG for 15-45 minutes Spray with methanol to clean off solvent Blow off with canned air
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