1. Making nanostructures: Top down Approach
Photolithography
Electron beam lithography
Micromechanical structures
Thin films, including MBE
Self-assembled masks
Focused Ion Beam milling
Stamp technology
Nanojunctions

2. Copyright Stuart Lindsay (2008)
Photolithography
Ex. PPMA
Ex. HF
Copyright Stuart Lindsay (2008)

3. Oxidation: place a protective layer (100-2000 nm) on the surface
Masking: features are open in the layer window by light
Implantation: doping step of the exposed sites
Etching: remove the protective layer
Metalization: contacting by metal deposition
Lift-off: complement of etching. Deposition of layers on a patterned photoresist

4. Copyright Stuart Lindsay (2008)
Photolithography with micron-scale resolution is a useful precursor tool for generating nanostructures by other methods.
Optical lenses resolution: 0.5 μ
Incident wavelength
Resolution
Numerical Aperture of the optical lens
Current top resolution of photolithography: ≈ 50 nm
Copyright Stuart Lindsay (2008)

5. Evolution of Electronics
1947
1959 Texas
Instrs.
First Integrated Circuit
Bell
Labs
First
Transistor
(Intel)
65 nm

6. Excimer Laser Stepper 248-157 nm
(Reprinted with permission of ASML Corporate Communications)
Stepper Motor: Scanning the wafer with nanometer scale accuracy

7. Electronics made by Lithography
Diffusion through holes /masking/metal coating
(Reprinted with permission John Wiley and Sons)
CMOS: Complementary Metal Oxide on Silicon

8. Copyright Stuart Lindsay (2008)
E-beam Lithography
The E-beam is turned on/off and directed in a prearranged pattern over the surface of the resist.
Copyright Stuart Lindsay (2008)

9. Copyright Stuart Lindsay (2008)

10. Copyright Stuart Lindsay (2008)
10 kV
20 kV
Monte Carlo simulation of spatially distributed beams in electron-beam lithography, D.F. Keyser, N.S. Viswanathan, J. Vac. Sci. Technol. Vol. 12, 1975
The resolution is limited by the scattering of secondary electrons, that cause damage of the photoresist even at energies as low as a few eVs.
Copyright Stuart Lindsay (2008)

11. Micro-electro-mechanical structures (MEMS)
Micron-scale free standing structures made by undercutting
Ex. AFM Probes
Copyright Stuart Lindsay (2008)

12. Complete Cantilever Fabrication
(Reprinted with permission from IOP Publishing Ltd.,
And courtesy of Professor Anja Boisen)
Copyright Stuart Lindsay (2008)

13. MEMS mirror projection array
Each mirror is separated by 0.5μ
Optical switch made from a silicon mirror, composed by 800,000 electronically tiltable mirrors.
Electronics and transducers are located under each mirror.

14. Thin Film Technologies
From the kinetic theory of gases:
RMS speed in cm/s from the equipartition theorem
Number of molecules hitting a surface per unit time
For O2 at 300K this is ca molecules·cm-2 at 10-6 Torr:
≈ a monolayer of adsorbed molecule per second.
A vacuum of 10-9 torr is required.

15. Modes of epitaxial growth
Layer-by-layer uniform growth
2D-growth favourite with respect to 3D-growth.
3D-growth favourite with respect to 2D-growth.
Epitaxial growth: in a homogeneous system, element x is deposited onto a surface of a single crystal of the same element.

16. Vacuum deposition Sputtering
Bombardment of the material by an energetic ion beam
Thermal evaporation
Chemical Vapour Deposition (CVD)
Creation of reactive chemical species close to the surface.
Ex. SiH4  Si + 2H2

17. UHV Thin Film Deposition System
(Courtesy of Professor Robert Lad, Laboratory for Surface Science and Technology, University of Maine)

18. Molecular Beam Epitaxy (MBE)
MBE: Epitaxial growth of atomic layers on a substrate

19. Copyright Stuart Lindsay (2008)
trapping of adatoms at special sites
diffusion on the surface
association/dissociation rate of small clusters
formation rate of stable clusters
(Courtesy of Professor Jeff Drucker, Department and School of Materials, Arizona State University)
Strain energy limits thickness
Kinetic factors
Copyright Stuart Lindsay (2008)

20. Copyright Stuart Lindsay (2008)
Semiconductor superlattice
(Reprinted from Journal of Crystal Growth, Volume 271, T. Aoki, M. Takeguchi, P. Boieriu, R. Singh, C. Grein, Y. Chang, S. Sivananthan and David J. Smith,
"Microstructural characterization of HgTe/HgCdTe superlattices" Pages 29-36, Copyright 2004, with permission from Elsevier. )
Copyright Stuart Lindsay (2008)

21. Copyright Stuart Lindsay (2008)
Block copolymer masks
Phase separation of incompatible block copolymers
Immiscible polymers phase-separate into a quite ordered domain structure
Copyright Stuart Lindsay (2008)

22. Polystyrene/polybutadiene 36/11
Self-assembled masks
Polystyrene/polybutadiene 36/11
Spontaneously forms nanometer scale phase-separated domains.
Polybutadiene is selectively etched by ozone treatment.

23. Structures made with block-copolymer masks
TEM images showing (A) a spherical micro-domain monolayer film after removal of poly butadiene by ozone treatment, (B) the resulting array of holes in silicon nitride after RIE, (C) cylindrical microdomains in which the darker regions are osmium stained poly butadiene domains and (D) the resulting cylindrical pattern etched into the silicon nitride surface.

24. Focused Ion Beam

25. Focused Ion Beam
Gallium liquid metal ion source. Typical energies of ion beams are 5-30 kV.

26. Copyright Stuart Lindsay (2008)
Ions are thousands of times heavier than electrons:
Electrostatic fields are more efficient than magnetic fields
(electrostatic focusing)
collection of the scattered ions (ion beam imaging)
collection of secondary electrons
implantation of Gallium ions
Copyright Stuart Lindsay (2008)

27. Focused Ion Beam Ion beam irradiation of a gold film
SEM image of an insulator defect.
The sample was prepared by a FIB.
Resolution: few tens of nanometers

28. Chemical patterning by soft imprint lithography.
Stamp Technology
Thermoplastic
Chemical patterning by soft imprint lithography.

29. “Stamped” MOSFET with 60nm gate
Fabrication of 60 nm transistors on 4-in wager using nanoimprint at all lithography levels

30. Nanoscale Junctions
Gold nanowire broken by conventional nanolitography.
High current densities lead to substantial local heating, causing electromigration.
Strachan D.R. et al., 2008 Phys. Rev. Lett., 100,