1. CENTRE FOR QUANTUM COMPUTER TECHNOLOGY The Melbourne Node Microanalytical Research Centre M A R C

2. CENTRE FOR QUANTUM COMPUTER TECHNOLOGY The Melbourne Node Test structures created by single ion implantation Atom Lithography and AFM measurement of test structures Theory of Coherence and Decoherence Node Manager: Steven Prawer

3. CENTRE FOR QUANTUM COMPUTER TECHNOLOGY Test structures created by single ion implantation Node Team Leader: Steven Prawer Atom Lithography and AFM measurement of test structures Theory of Coherence and Decoherence The Melbourne Node

4. CENTRE FOR QUANTUM COMPUTER TECHNOLOGY Students –Paul Otsuka –MatthewNorman –Elizabeth Trajkov –Brett Johnson –Amelia Liu * –Leigh Morpheth –David Hoxley * –Andrew Bettiol –Deborah Beckman –Jacinta Den Besten –Kristie Kerr –Louie Kostidis –Poo Fun Lai –Jamie Laird –Kin Kiong Lee Key Personnel Academic Staff –David Jamieson –Steven Prawer –Lloyd Hollenberg Postdoctoral Fellows –Jeff McCallum –Paul Spizzirri –Igor Adrienko –+2 Infrastructure –Alberto Cimmino –Roland Szymanski –William Belcher –Eliecer Para –Geoff Leech * DeborahLouGreig –Ming Sheng Liu –Glenn Moloney –Julius Orwa –Arthur Sakalleiou –Russell Walker –Cameron Wellard *

5. CENTRE FOR QUANTUM COMPUTER TECHNOLOGY Existing Infrastructure NEC 5U Pelletron accelerator with RIEF funded upgrade to make it one of the brightest accelerators in the world for nuclear microprobe operation($2,000,000+) Two MeV ion microprobe beam lines and associated instrumentation ($1,000,000 each) Dilor confocal Raman spectrometer ($500,000) Joel UHV AFM ($700,000) Distributed computer network ($100,000). Pulsed Laser Deposition System ($1,000,000) This combination of instruments is unique worldwide for one research Centre!

6. CENTRE FOR QUANTUM COMPUTER TECHNOLOGY The Science Creation of an array of phosphorous ions ina Si m

7. CENTRE FOR QUANTUM COMPUTER TECHNOLOGY Accelerator Specimen Chamber The Melbourne Pelletron Accelerator Installed in 1975 for nuclear physics experiments. National Electrostatics Corp. 5U Pelletron. Now full time for nuclear microprobe operation. Will be state-of-the-art following RIEFP upgrade Capable of delivering a single ion into an area 0.25 mm in diameter

8. CENTRE FOR QUANTUM COMPUTER TECHNOLOGY JEOL Variable Temperature UHV AFM/STM Imaging RT-800K Cantilever based AFM STM imaging with tip or AFM cantilever All imaging modes available In situ evaporation source. In situ ion sputtering.

9. CENTRE FOR QUANTUM COMPUTER TECHNOLOGY Si (111) 2 x 1 surface obtained by cleavage in UHV from Haneman and Adrienko Au deposited in-situ on Si (111) surface 2 x 1 reconstruction Atom Lithography: Key Imaging & Fabrication Technology

10. CENTRE FOR QUANTUM COMPUTER TECHNOLOGY 100 x 100 nm 20 nm Alberto Cimmino leaves his mark 1 atom deep, 10 atoms wide Programmed Lithography for nanofabrication

11. CENTRE FOR QUANTUM COMPUTER TECHNOLOGY AFM imaging of surfaces: Atomic Force Microscope Image of Si 7 x 7 surface reconstruction. Each dot is a single Si atom. 1nm

12. CENTRE FOR QUANTUM COMPUTER TECHNOLOGY Test structures created by single ion implantation The basic idea Previous work Potential problems and solutions

13. CENTRE FOR QUANTUM COMPUTER TECHNOLOGY Single Ion Implantation Fabrication Strategy Resist layer Si substrate MeV 31 P implant Etch latent damage & metallise Read-out state of “qubits”

14. CENTRE FOR QUANTUM COMPUTER TECHNOLOGY MeV ion etch pits in track detector Single MeV heavy ions are used to produce latent damage in plastic Etching in NaOH develops this damage to produce pits Light ions produce smaller pits 1. Irradiate 2. Latent damage 3. Etch From: B.E. Fischer, Nucl. Instr. Meth. B54 (1991) 401. Scale bars: 1  m intervals Heavy ion etch pit Light ion etch pits

15. CENTRE FOR QUANTUM COMPUTER TECHNOLOGY From Huang and Sasaki, “Influence of ion velocity on damage efficiency in the single ion target irradiation system” Au-Bi2Sr2CaCu2Ox Phys Rev B 59, p3862 1  m 3  m 5  m 7.5  m Depth Single ion tracks Latent damage from single-ion irradiation of a crystal (Bi 2 Sr 2 CaCuO x ) Beam: 230 MeV Au Lighter ions produce narrower tracks ! 3 nm

16. CENTRE FOR QUANTUM COMPUTER TECHNOLOGY Project Management - A distributed system Director Clark Deputy Director Milburn Theory/ModellingArray fabricationReadout SET Dzurak Magnetic Resonance (LANL) Quantum Optics Rubeinstein- Dunlop Single Ion Implantation Jamieson Atom Lithography Prawer Silicon MBE Simmons

17. CENTRE FOR QUANTUM COMPUTER TECHNOLOGY Potential Problems