1. Why Is There Vacuum? (The sequel to Bill Cosby’s “Why Is There Air?”) Matthew C. DeLong University of Utah OptoElectronic Materials Laboratory 7 January 2008

2. Ranges of Vacuum Low: 1 atm to 1 Torr Medium: 10 -3 ( 1  m) to 1 Torr High: 10 -8 to 10 -3 Torr Ultra High: 10 -12 to 10 -8 Torr Extreme: < 10 -12 Torr Note: low vacuum ↔ high pressure Drying, drinking straws Sputtering Thermal evaporation, e- gun, SEM STEM, FIM, AES, SIMS Anti-particle accumulators, space simulation

3. Pressure: Units of Measure Pressure exerted by a column of fluid: P ≡ F/A = mg/A =  ghA/A =  gh  h 1 Atm (mean sea level) = 760 Torr = 1013 mBar = 1.01x10 5 Pa = 101.3 kPa = 14.7 psi = 34 ft. water Average atmospheric pressure in SLC is about 635 Torr, 12.3 psi, 28.4 ft water…

4. “Kinds of Pressure” Gauge Pressure: measured with respect to ambient. Absolute pressure: measured with respect to vacuum Car tires, basketballs, boilers, LN2 tanks, JFB compressed air supply… Vacuum systems, cathode ray tubes, light bulbs, barometers

5. Measurement Techniques Low Medium High Ultra High Extreme Mechanical (Bourdon), Hg column, capacitance Thermocouple, Pirani Ionization [hot and cold (Penning) cathode] Ionization (hot cathode: Bayard-Alpert) Modulator Bayard-Alpert

6. Bourdon Gauge (Mechanical)

7. Capacitance Manometer A = Annular electrode D = Disk electrode S = Substrate G = Getter (in vacuum space) Differential capacitance between annulus and disk depends on pressure difference between Test Chamber and “Getter”.

8. Heat Transfer of Gases Conductivity is linear in pressure over about 2 orders of magnitude. Molecular flow regime Pirani and thermocouple gauges

9. Ionization gauges Hot cathode: more sensitive; less forgiving Cold cathode: less sensitive; more forgiving

11. Chambers et al. P.84

12. Mean Free Path in Gases With sufficient accuracy for approximate calculations we may take: λ = 7 x 10 -3 /p mbar-cm λ = 5 x 10 -3 /p Torr-cm λ = 5/p μmHg-cm

13. Roughing pump comparisons: Oil Sealed Pumps TypeAdvantagesDisadvantages Rotary vaneLow ultimate pressure. Low cost Long pump life. Backstreams oil. Produces hazardous waste. Rootes LobeVery high pumping speed Frequent maintenance. Requires a purge gas. Requires a backing pump. Must be absolutely horizontal. Rotary pistonHigh volume Low cost Noise. Vibration Safety Valve.

14. Roughing pump comparisons: Dry Roughing Pumps ScrollClean. Low "dry" ultimate pressure. Easily serviceable Quiet. Technology is well known. Limited bearing life. Limited scroll life. Permeable to small gases. Not hermetically sealed. Clean applications only. DiaphragmLow cost. Quiet. Easily serviced. Low pumping speed. High ultimate pressure. Frequent service required. Hook and Claw No backstreaming. Low ultimate pressure Expensive Screw rotorLow ultimate vacuum. Less maintenance than hook & claw Expensive Dry pistonLow ultimate pressureExpensive SorptionCleanRequires LN2.

15. Rotary Vane Mechanical Pump Robust Inexpensive Operates to ambient pressure Single stage and two stage

16. Sorption Pump Clean: no oil Very inexpensive: 170,000 Torr-liters for $1000 + 8.5 l LN2 Requires LN2 Air adsorbs onto zeolite at 77K 10 -3 Torr capability

17. Oil Vapor Diffusion Pump Vacuum system Robust (silicone oil!) Low maintenance: no moving parts Requires backing 10 -3 – 10 -7 Torr

19. Turbomolecular Pump Requires backing: Operates only <1 Torr Clean: no oil Expensive: Approximately triple the cost of a rotary vane mechanical pump and oil diffusion pump Limited lifespan

20. Getter pump Low maintenance: no moving parts 10 -4 – 10 -10 Torr Requires backing Clean: no oil Based on chemical reaction of “air” with very reactive metals

21. Vac-Ion Pump (Sputter/Getter) Clean: no oil 10 -4 – 10 -10 Torr Not cheap! Require backing

22. References A. Chalmers, B.K. Fitch, and B. S. Halliday, Basic Vacuum Technology, IOP Publishing, Bristol (1998). TJ/940/C45/1998. D. Hucknall, Vacuum Technology and Applications, Butterworth-Heinemann, Oxford (1991). TJ/940/H83 (1991). Vacuum Equipment, Granville-Phillips Co., Boulder CO. TJ/940/G7. R. R. LaPelle, Practical Vacuum Systems, McGraw-Hill, New York (1972). David Joy, “New Lecture 3” on course website.