1. Innovating Test Technologies Microvue 1 Cascade Microtech’s Wavevue Measurement Application Software September 19, 2003

2. Wavevue Measurement Studio Innovating Test Technologies Microvue 2 Test Software considerations Are you concerned by the costs associated with Development time, maintenance and support costs ? Are you concerned with the time the measurement system is not being utilized whilst doing modeling extraction ? Are you satisfied with the time, procedure and quality of your current report generation capabilities ? Are you utilizing an additional tool to address this issue ?

3. Wavevue Measurement Studio Innovating Test Technologies Microvue 3 Implications of any of these Projects being delayed Projects running over budget Missed market window – Lost revenue Higher training costs Reduced productivity Increased cost of ownership Increased backlog due to poor asset utilization Reduced ROI on IC-CAP

4. Wavevue Measurement Studio Innovating Test Technologies Microvue 4 What is Wavevue ? Wavevue is a commercial software application designed to automate common forms of RF & DC device characterization measurements in both wafer and fixtured environments. It is a complete, enterprise solution designed to meet the requirements of test definition, measurement, and data presentation within a company. It is complimentary Cascade Microtech’s Nucleus and WinCal products and to Agilent’s ICCAP and ADS products.

5. Wavevue Measurement Studio Innovating Test Technologies Microvue 5 Wavevue will help to Ensure a large amount of cost savings Increase lab productivity Reduce the cost of test Improve asset utilization Reduce number of design iterations Getting products to market faster

6. Wavevue Measurement Studio Innovating Test Technologies Microvue 6 Modular Architecture Wavevue Measurement Studio Shell DC Curves & Bias Module S-Parameter Module Wafer Module DC CHARACTERIZATION Temp Control Module DEVICE BIASRF CHARACTERIZATION AUTOMATION C-V Module I-V Module

7. Wavevue Measurement Studio Innovating Test Technologies Microvue 7 Measurement Capability S-Parameters of 1 and 2 port passive and active devices. (Non-frequency translating). Automated DC Biasing of active devices and components including bias search algorithms. DC Curves for quick device evaluation and determination of operating points. IV Measurements (Gummels, CE IV, Resistor ladders [TLM], Forward and reverse breakdowns). CV Measurements versus AC signal level, bias and frequency. All the above measurements can be captured across a wafer and versus temperature. Multiple measurements can be combined using switch matrices.

8. Wavevue Measurement Studio Innovating Test Technologies Microvue 8 Fully Integrated Modeling System Test System Model Libraries Transfer Data in MDM Format IC-CAP Extract Model Parameters xxxxx xxxxxx xxxx xx xxxx xxx xxxxx xxx xxxxxxx xxxx xxxxxxx XXXXXXX Wavevue Test System Test Setups Measured Data Measurements and Model extraction Performed In parallel

9. Wavevue Measurement Studio Innovating Test Technologies Microvue 9 Two versions to serve the Enterprise Instrument Edition: Provides full control of the measurement system and full software capability Office Edition: Has all the capability of the IE except it cannot control the test equipment. It can be used for Setting up test plans in the office without utilizing the equipment Viewing and analyzing data Creating reports Exporting data to CAD tools or Microsoft Word

10. Wavevue Measurement Studio Innovating Test Technologies Microvue 10 Enterprise Deployment

11. Wavevue Measurement Studio Innovating Test Technologies Microvue 11 Project Based Project based user environment provides a single point of focus that combines the file components necessary to execute a measurement test plan and organize data. Measurement Setups Instrument Setups Wafer Plan Setups Report Setups Script Setups Device & Connection Setups Calibration Setups Cal DataMeas Data PROJECT WRAPPER Simple, single point of entry into the project … Simple selection and execution of script …

12. Wavevue Measurement Studio Innovating Test Technologies Microvue 12 Data Manager Select and Load data from various measurement sessions into memory. Use to compare, analyze data in reports. Filter … Tags … Rename …

13. Wavevue Measurement Studio Innovating Test Technologies Microvue 13 Deembedding Deembed or Embed your device S-Parameters automatically using data from file or in-situ measurement for pad parasitic measurement.

14. Wavevue Measurement Studio Innovating Test Technologies Microvue 14 Test Sequence Generation  Scripts are generated automatically from the GUI  Advanced users can modify them as necessary to generate sophisticated test sequences. Easy Script Generation: Click here … Code automatically appears here! Most application features Accessible through the script.

15. Wavevue Measurement Studio Innovating Test Technologies Microvue 15 Report Generation Smoothing Quad Layouts Tabular

16. Wavevue Measurement Studio Innovating Test Technologies Microvue 16 Case Study Situation Company’s strategic objective was to establish a new device characterization lab in support of a new device technology. They wanted a completely integrated device characterization solution in support of process development, process monitoring, and device modeling activities. Approach Proposed a complete enterprise software solution consisting of Office and Instrument Editions. Results Enabled IC-Cap to be used for exclusively for modeling and replaced in-house software that had previously been used for this measurement and data presentation activity. Offloaded the use of Mat-Lab as a secondary data analysis and presentation tool. Provided 10 instrument and 5 office editions that are used by test engineers, designers and Time to test was improved by 3X, retest requirements reduced 25%.