1. Enabling Next Generation MEMS with Integrated Porous Anodic Alumina Tyler Preston Advisors: Conrad R. Stoldt & Ken Gall Dept. of Mechanical Engineering University of Colorado, Boulder

2. October 15, 2004 2MCEN 5208 Motivation Create ultra-sensitive micro-scale sensors Create ultra-sensitive micro-scale sensors Merge nano-structures with MEMS Merge nano-structures with MEMS * C.R. Stoldt et al., 2004

3. October 15, 2004 3MCEN 5208 Background * The Ångström Laboratory, 2003 Porous Anodic Alumina (PAA) Al 2 O 3 Porous ceramic material Porous ceramic material Created by annodizing (oxidizing) aluminum Created by annodizing (oxidizing) aluminum Thermal/Electrical insulator Thermal/Electrical insulator

4. October 15, 2004 4MCEN 5208 Techniques 1.Thin film Al & Nb deposited on Si substrate -Films deposoited using Molecular Beam Epitaxy (MBE) 2. Chemical back-etch is used to remove Si and Nb material 3. Nanoindenter is used to create “dimples” in Al surface 4.Al film is oxidized using electrochemical techniques -Annodization creates 10-100 nm dia. pores

5. October 15, 2004 5MCEN 5208 Proposed Application Integrated sensors Integrated sensors Size exclusion filter for nanoparticles/bio- molecules Size exclusion filter for nanoparticles/bio- molecules Template for interfacing nano-structures with MEMS Template for interfacing nano-structures with MEMS