1. Boris N. Chichkov Leibniz University Hannover
Nanomanufacturing
Boris N. Chichkov
Leibniz University Hannover

2. Two-photon polymerization Laser ablation Laser printing
Laser nanomanufacturing technologies
near IR fs-pulses
resin
Two-photon polymerization
Laser ablation
Laser printing

3. Fs laser microstructuring
SEM image of high quality microchip fabricated in 400 µm thick AlN substrate

4. Laser generation of nanoparticles
target
laser
Nano-
particle
Liquid
High purity and stability
Monoatomic materials
Alloy nanoparticles
Particle surface-functionalization
Polymer-embedded nanoparticle
Coatings with nanosized particles
Controlled drug-release
Stoichiometric nanoparticles
Novel methods  better control
J. Phys. Chem. C, 2010
Appl. Phys. A, 2010 4

5. Fabrication of spherical nanoparticles by laser printing
Receiver substrate (glass)
Tightly focused
fs laser pulse
Thin Au film
Donor substrate (glass)
„Laser-induced transfer of metallic nanodroplets for plasmonics and metamaterial application“
JOSA B, Vol. 26, No. 12, B130, 2009 5

6. Controlled fabrication and precise deposition of silicon nanoparticles
200 nm
Receiver substrate (glass)
Bulk silicon
Tightly focused
fs laser pulse
Silicon nanoparticle
Silicon dioxide
Silicon donor layer
50 µm
„Laser printing of silicon nanoparticles with resonant optical electric and magnetic responses“,
Nature Communications, 5, No. 3402, (2014). 6

7. Nanotechnology with lasers
3D nanostructuring by two-photon polymerization
Ormocer
near IR fs-pulses
resin
Opt. Lett. 28, 301, (2003)
Adv. Eng. Mat. 5, 551, (2003)
Deutsches Patent

8. PhCs fabricated in Zr-hybrid polymers
This is the SEM image of the woodpile structure produced by 2PP. The period is 900nm and the rod thickness is 300nm. In the magnified top view one can see throught the four upper layers.
Nature Photonics, v. 3, 450 (2009)

9. Two-photon polymerization (5cm/s)
This is the SEM image of the woodpile structure produced by 2PP. The period is 900nm and the rod thickness is 300nm. In the magnified top view one can see throught the four upper layers.
Commercially available 2PP system
from LZH:

10. Microoptics: Tapered waveguides
Im folgenden Beispiel wurde eine solche 3D Taperstruktur mit Hilfe der 2PP hergestellt.
Der Taper sollte auf der Einkoppelseite einen Querschnitt von 10 µm haben und dann in einen 2 µm Wellenleiter übergehen, der einen Single-Mode Wellenleiter für Licht mit 1500 nm Wellenlänge darstellt.
Man sieht hier erste Ergebnisse zu diesen Strukturen im REM Bild.

11. Fabrication of SRRs by laser direct-writing
Mechanical properties of the polymer allow fabrication of
free standing SRRs
Excitation of magnetic resonance for radiation
incident perpendicular to substrate surface (kz)
FDTD simulation of
single SRR
response
Ring diameter: 5 µm
Wire diameter: 800 nm
Gap width: 800 nm
Resonance:
11 µm wavelength
(RLC model)

12. 3D conductive polymer microstructures
PEG-DA and EDOT blends are used for 2PP and sequential in-situ oxidative polymerization;
Real-3D, physically stable and biocompatible microstructures are produced;
Interpenetrating polymer network of PEG-DA and PEDOT leads to conductivities of up to 0.04 S/cm.
EDOT
PEDOT
PEG-DA : poly(ethylene glycol) diacrylate
EDOT : 3,4-ethylenedioxythiophene
PEDOT : poly(3,4-ethylenedioxythiophene)

13. 3D ultralight and ultra strong materials

14. Surface plasmon-polaritons for data transport
Plasmonics
Photonics
1 THz
1 GHz
Operating speed
Electronics
1 MHz
The
Past
1 kHz
10 nm
100 nm
1 µm
10 µm
100 µm
1 mm
Critical dimension
R. Zia et al., Materials Today 9, 20 (2006) 14

15. Surface plasmon-polaritons
Bandwidth of light:
400 THz – 750 THz
Core size:
~ 8 µm
Bandwidth of
electronics:
~ 10 GHz
pitch:
~ 65 nm 15