1. “MEMS based seismic and vibration sensors in Building & Structural Health Monitoring systems”
Sean Neylon: Chief Executive Officer, Colibrys Switzerland SA
Founder
35+ years of experience in Micro-Electronics and Micro-Systems (MEMS)
Former Chairman of NEXUS, the European Microsystems Networking Association
Formerly with GEC Marconi, Plessey, Micronas, CSEM

2. Contents The world of Seismic sensing
SHM in context of Seismic Market supply chain & applications
Sensor Classification & standards
Driving forces for Structural monitoring applications
Technology Roadmap for MEMS based Strong Motion seismic sensors
Conclusions

3. Seismic sensing Applications
Energy
Subsurface imaging (Oil, Gas, Geothermal)
Defense
Nuclear, Tunneling,
Remote monitoring
Civil protection
Civil Engineering
Structural
monitoring
Geoscience
Geotechnics
Volcanic eruptions
Avalanches, landslides
Soil/rock mechanics
Geodesy
Geophysics ‘Free field’
Techtonics
Volcanic
Rapid response, early
warning, public
information
Earthquake
Tsunami
Volcanic explosion
Landslip
Site evaluation
Shake maps
Subsoil, microzonation
Requalification of structures
Land Use planning
Construction
Pile driving, Compaction
Tunneling
Blasting, Mining
Quarrying, Demolition
Industrial equipments
Nuclear Power plants
Dams, embankments
Bridges / Tunnels / Towers
LNG / Oil / Gas storage
Pipeline
Landfills
Tunnel monitoring
Traffic
(Rail and Road) monitoring
Large Buildings
Medical centers

4. Construction & Demolition companies
Market supply chain
Insurance Security
‘Building’ owners
Consultants
Government Agencies
Universities
Construction & Demolition companies
System integrator
Sensors, DS , SW + communications
Regional suppliers
N. America: Nanometrics, Kinemetric/Metrozet, Reftek
EMEA:
Syscom, Geosig, Guralp
Asia:
Mitsubishi, Kokusai, Aimil
Hardware integrator
Sensors + data recording + interface electronics
Sensor Technology
SM FBAs: Nanometrics, Kinemetrics, Guralp, Harbin
SM MEMS: Colibrys, SDI, ADI
Strain, Velocity
Sensor manufacturer

5. Structural Health Monitoring Sensors
Broadly 4 families of sensors
Velocity: Broadband (high sensitivity), Short period and Strong motion velocity
Accelerometers: „Strong Motion“ Class A-D
Strain/Displacement:
Positioning: GPS
Important Standards:
National e.g. USGS....
Regional e.g. State of California......

6. Classification - Strong Motion
Class A
Typically electromechanical Force Balance Accelerometers
5g (±3.5g +1g)
High sensitivity, high linearity, low frequency response
Expensive, fragile, low volume capacity, medium power
Primary application: National (>70km spacing) and Regional (3-30km) networks
Class B
Typically MEMS closed loop sensor design
Medium sensitivity, medium linearity, medium frequency response, medium power
Relatively inexpensive, robust, medium volume,
Primary application: Regional, Urban (<4Km) networks and Structural Health monitoring, Shake maps, modelling validation
Class C
Typically MEMS open loop based sensors
Low dynamic range/resolution, low linearity, medium frequency response, low power
Inexpensive, robust, Medium / high volume,
Primary application: Earthquake detection & intervention

7. Strong Motion Standards Class A
Specifications: USGS & ANSS specifications (13 June 2007)
Technical:
Range: >± 4.5 g , (± 3.5 g + 1 g gravity)
Noise:
Must: 145dB (0.02-2Hz); 130dB (2-50Hz)
Nonlinearity: ≤ 1 % (at full scale)
Temperature: Operating range: -20°C to 70°C, Temperature error over full Temperature span: < 2%, Offset drift: < 0.5 mg /°C
Self-test: Must
No steps in Bias
Lifetime: 5 years

8. Strong Motion Standards Class B
State of California specifications are a dominant standard
Technical:
Range: ± 5 g , (± 4 g + 1 g gravity)
Noise:
Must: .03 mg RMS over .02 to 100 Hz BW (87.3dB (0.1-35Hz)
Wish: < 500 µg/√Hz in 1 to 100 Hz band
Nonlinearity: ≤ 1 % (at full scale)
Temperature: Operating range: -20°C to 70°C, Temperature error over full Temperature span: < 2%, Offset drift: < 0.5 mg /°C
Self-test: Must
No steps in Bias
Lifetime: 10 years

9. Market size by application & grade
100dB
1 µg/√Hz
120dB
300ng/√Hz
140dB
30ng/√Hz
Class C
Class B
Class A
100
Energy
Oil and gas, discovery & reservoir monitoring
Market Size $Mio
National earthquake monitoring 10
Regional & Urban earthquake monitoring
‘Ground shake’ maps, Structural modeling & monitoring
The position of the SiFlex™ as the “Highest performance sensor” in
Earthquake detection & intervention
Subsurface
Mining & Downhole imaging 1
TAM: Internal estimates
Sensor level valuation
Market size and growth are drivers in innovation!
Performance
S/N Dynamic range dB 9 9

10. Competitive supply base - today
100dB
1 µg/√Hz
120dB
300ng/√Hz
140dB
30ng/√Hz
Class C
Class B
Class A
Nanometrics
Kinemetrics
Electromechanical
FBA
1000
Harbin
SF1600
SF1500
SF2006
SF2005
Price per axis ($)
100
MS9005
Colibrys
Consumer
MEMS
The position of the SiFlex™ as the “Highest performance sensor” in 10
MEMS Open loop
MEMS Closed loop
FBA
Performance
S/N Dynamic range dB 10 10

11. Closed Loop Sigma-Delta ASIC PCB + electronic components
SF2006 Product Parts
Mechanical Sensor
Closed Loop Sigma-Delta ASIC
PCB + electronic components
Derivative of Oil/Gas ‘geophone’
Class B +/-5g seismic sensor
State of California compliant
RoHS compliant

12. Competitive position - today

13. Competitive position - today
100dB
1 µg/√Hz
120dB
300ng/√Hz
140dB
30ng/√Hz
Class C
Class B
Class A
Electromechanical
FBA
Nanometrics
Kinemetrics
1000
Harbin
SF1600
SF1500
SF2006
SF2005
Price per axis ($)
100
MS9005
Colibrys
Consumer
MEMS
The position of the SiFlex™ as the “Highest performance sensor” in 10
MEMS Open loop
MEMS Closed loop
FBA
Performance
S/N Dynamic range dB 13 13

14. Competitive position - Roadmap
100dB
1 µg/√Hz
120dB
300ng/√Hz
140dB
30ng/√Hz
Class C
Class B
Class A
Episensor
Kinemetrics
1000
Electromechanical
FBA
Harbin
MEMS
Class A/B
Price per axis in USD
MEMS Class B
100
Colibrys
MSxxxx
Lower cost
MEMS
The position of the SiFlex™ as the “Highest performance sensor” in 10
MEMS Open loop
MEMS Closed loop
FBA
Performance
Dynamic range dB 14 14

15. MEMS based Class B sensors
Strong Motion Roadmap
MEMS based Class B sensors
Smaller size, lower power, improved linearity, extended FS range
Integrated wireless
Lower power / energy harvesting
MEMS based ‘Class A’ sensors
Lower cost, more robust, lower power, smaller size

16. Target specifications
Goal is to replace traditional electromechanical devices (FBA) with closed loop MEMS technology
Products
Kinemetrics Class A FBA
MEMS Class A
Target values
Colibrys Class B MEMS
Applications
Seismic monitoring
Seismic & Structural monitoring
Seismic & structural monitoring
Full scale rang g
± 4 g
± 5 g
Noise
<100 ng/√Hz (0.01 to 100 Hz)
1 µg/√Hz (0.1 to 100 Hz)
Resolution (S/N ratios)
24 bits (50 Hz BW) (137 db)
20 bits (50 Hz BW) (117 db)
Output
Digital (SPI?)
Power
< 120 mW
< 100 mW

17. Class A MEMS Sensor prototype
10 g FS
Inertial MEMS sensor
Sensor component
MEMS and FE ASIC in ceramic MCM
PCB board
FPGA
Power supplies, clock
Ethernet controller (for testing)
Size
Current board: 10 cm x 10 cm x 4mm
Potential to make it much smaller
Market Beta site sampling 2011/12
Conceptual drawing

18. Conclusions: MEMS continue to be a strong technology for new Strong Motion Seismic sensor development My interests are today to: 1. Find potential interested partners for new MEMS Class A sensors? 2. Understand objectives of Seismic sensor development within MEMCON FP7 ? 3. Confirm if our market assessment is realistic? 4. Increase awareness: Europe has a real solution in hand to counter US/HP long term roadmaps

19. Many thanks for listening to me
Many thanks for listening to me! Many thanks to Philippe Krebs at Colibrys for his assistance in providing market details. “multi-cultural, small, fast, flexible, a symbol of creativity and fertility, strongly territorial, successful through intelligent mutation” – culture of Colibrys