1. Comparative Study of Diamond- like Carbon Films Deposited from Different Hydrocarbon Sources Se Jun Park, Kwang-Ryeol Lee Future Technology Research Division Korea Institute of Science and Technology The International Conference On Metallurgical Coatings And Thin films ICMCTF 2006

2. Various Applications of DLC Film

3. Impact Energy (eV) 1 10 100 1000 Hydrocarbon Source Dense Hydro- Carbon PolymerLikeCarbon Plasma Polymers Energy Ion Source Cold Substrate The Effect of Ion Energy on the Structure of DLC Films Graphitic Carbon

4. Hydrocarbon Source for DLC Film CH 4 (Alkane) C 6 H 6 (Aromatic) C 6 H 14 (Alkane) C 2 H 2 (Alkyne)

5. Previous Works A. Grill et al. DRM (1993) 2 1519 High mean ion energy High free H to C ratio High Stress acetylene methane cyclohexane acetylene

6. Previous Works K.-R. Lee et al. Diamon.Rel.Mater. 1994(3) 1230 Methane (CH 4 ) Benzene (C 6 H 6 ) CH 4 : CH 5 + or C 2 H 5 + C 6 H 6 : C 6 H 6 + Difference of

7. Motivation C 6 H 6 (Aromatic) C 6 H 14 (Alkane)  Same carbon atom numbers  Different hydrocarbon structure ?

8. Purposes of Present Work To characterize DLC films from the hydrocarbon source of the different structure Hexane (C 6 H 14 ) : Alkane structure Benzene (C 6 H 6 ) : Aromatic structure To find the relation between the properties of DLC films and the structure of hydrocarbon source

9. Deposition Condition RF PACVD(13.56 MHz) Precursor Gas : C 6 H 6, C 6 H 14 Deposition Pressure : 1.33 Pa Bias Voltage : - 200 - 800 V Substrate : P-type (100) Si-wafer Film Thickness : 500 nm

10. Growth Rate of DLC Films

11. Mechanical Properties of DLC Films from Hexane and Benzene Residual Stress Hardness

12. FT-IR Spectra of DLC Films Benzene Hexane sp 1 C-H sp 2 C-H sp 3 C-H sp 1 C-H sp 2 C-H sp 3 C-H sp 2 C=C

13. FT-IR Spectra of DLC Films Benzene Hexane sp 1 C-H sp 2 C-H sp 3 C-H sp 1 C-H sp 2 C-H sp 3 C-H sp 2 C=C

14. Binding Energy of Hydrocarbons Organic Chemistry, J. McMurry (2004) Ch. Wild et al. JVST A. 5 (1987) 2227 420 KJ/mole 355 KJ/mole 464 KJ/mole

15. Dependence of properties of DLC film on precursor gases

16. Binding Energy of Methane 438 KJ/mole

17. Dependence of properties of DLC film on precursor gases Methane (CH 4 ) K.-R. Lee et al. Diamon.Rel.Mater. 1994(3) 1230 Hexane (C 6 H 14 ),Benzene (C 6 H 6 )

18. Conclusions  The structure and properties of DLC films were strongly dependent on the precursor gases. Energy per mass of ion was the main factor to determine the properties and structure of DLC films As the average ion energy increased, properties of DLC film deposited from the hydrocarbon sources in same functional group showed similar dependence on ion energy.

19. Thank you for your attention!