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Silicon VLSI backplanes which shows cracking in the Al mirror Image provided by Dr Neil Collings.

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Presentation on theme: "Silicon VLSI backplanes which shows cracking in the Al mirror Image provided by Dr Neil Collings."— Presentation transcript:

1 Silicon VLSI backplanes which shows cracking in the Al mirror Image provided by Dr Neil Collings

2 Silicon VLSI backplanes showing "punch through" of the transistor underlying the mirror. Image provided by Dr Neil Collings

3 Wafer1.tif: From Mark Mann. First image of CNTs grown by a new type of furnace. This shows morphology and size distribution of the grown nanotubes. SEM was used to compare this across the width of the 4" wafer.

4 Yps42c1.tif: from Mark Mann. Checking for CNTs grown on the top of sharply etched tungsten contained within a Schottky module. The CNT operates as a field emission source. The SEM is used to check the CNT's length & rough diameter. It also checks for alignment.

5 Images provided by: Husnu Emrah Unalan Demonstrating supergrowth Further details awaited

6 Lewis06secondchipTT: Provided by Mark Mann. Fabrication of aligned, sparse arrays of multi-walled carbon nanotubes for use as a field ionizer for mass spectroscopy. Taken at 25 deg. tilt - some tips are >20 um high. They have spacing twice their height for optimum field v current density. The SEM is vital to help achieve a greater uniformity in the grown CNTs.

7 Vertically aligned Multiwalled Carbon Nanotubes Contributed by Shupei Oei We check by SEM for a) alignment b) growth c) morphology- height, width d) identify tip or base- growth, by observing position of catalyst particle. Resolution is not quite sufficient for for imaging of single walled carbon nanotubes.


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