1. Micro to Nano Technologies By: Brent Hare Lenox laser March 30, 2004

2. Micro to Nano Technologies Micro - Prefix meaning one millionth, 1/1,000,000 Nano – Prefix meaning one billionth, 1/1,000,000,000

3. The Powers of 10 10 +0 1 Meter 10 -1 10 Centimeters 10 -2 1 Centimeters 10 -3 1 Millimeter 10 -4 100 Microns 10 -5 10 Microns 10 -6 1 Micron 10 -7 1,000 Angstroms 10 -8 100 Angstroms 10 -9 1 Nanometer 10 -10 1 Angstrom 10 -11 10 Pico meters 10 -12 1 Pico meter 10 -13 100 Fermis 10 -14 10 Fermis 10 -15 1 Fermi 10 -16 0.1 Fermis 10 -17 0.01 Fermis 10 -18 0.001 Fermis

4. Current Micro Technologies Photonics - Optical Apertures and Flow Orifices Electronics – Semiconductor chips, anodic bonding MEMS – Micro Electro Mechanical Systems Communication – Fiber optics, switching interconnects Biotechnology - cell filtration, drug discovery

5. Current Nano Technologies Molecular manufacturing – Precision down to the atomic level Nanotubes – Building advanced lightweight materials as well as advancements in LCD technologies Medicine – Devices that will flow through the circulatory system Nanocomposites – Assisting in vast improvements in material compositions Electronics – Advanced CMOS and silicon transistor integration with lithography

6. mms://stream.techtv.com/windows/bigthinkers/2 002/bt020225b_165_0.asf Micro scaling to Nano Click Picture to watch Nanotechnology movie

7. http://www.memsoptical.com/prodserv/products/ microlensar.htm Micro - Optics Ability to drill to ½ micron for half the wavelength Micromirrors for next generation telescope optics Micromirrors Microlens Arrays

8. http://www.geek.com/procspec/intel/pic2p4- 13.htm Micro - Electro Pentium 4- Top speed – 3.4ghz Built on a 0.13 micron die 168 million transistors on 200mm 2

9. http://www.utnl.jp/~mada-lab/research.html Micro - Chemical Miniature fuel cells Micro channels Chemical reactors 50 Micron Chemical Reactor Micro Chemical Channel Micro Fuel Cell

10. Photos from Pittcon Micro Flow Devices = Swagelock has begun to minaturize its flow components 3ft. X 4ft. 6in. x 18in.

11. http://www.memx.com/image_gallery.htm Micro - Engineering Micro gears Micro embossing and stamping Microactuators (Tiny Motors) Micro-valves Micro embossing Complex Ratchet

12. http://us.st.com/stonline/prodpres/dedicate/mem s/technolo/micro/photo.htm Micro - Mechanical Microactuators – tiny motors

13. http://www.memx.com/image_gallery.htm Micro Mechincal Worlds smallest steam engine, the pistons are 5 microns and it actually works Micro Clutch mechanism, gears are 50 microns

14. http://www.sensorsmag.com/articles/0700/10/m ain.shtml Microfluidics Capillary uptake Piezoelectric inkjets Flow sensing Drug dispensing Flow based separation Print Cartridges Lab-On-Chip for DNA Detection and Analysis Micro Canals

15. http://www.lucent.com Micro Communications Full optical switching technologies Most fiber optic backbone in the United States ranges from 1.3 to 1.5 micrometers and can transmit over 5 GBps and can span 93 miles Fiber optic switching

16. e-blox (Scaleable, Interfaceable, Stackable) Micro to nano interfaces for simple solutions e-blox allows you to build backbones connecting Gas, Liquid, Electro, Optical – Fiber/Micro, and nanotechnologies in order to build unique devices for MEMS and other technologies Imagine devices built with the integration of all of these competing technologies on a Scaleable, Interfaceable, Stackable solution at the micro and nano level

17. http://www.smalltimes.com/document_display.cf m?document_id=5340 MEMS (Powder Metal Die Casting for building small parts) The ability to arrange particles and then compress them into a die to build ultra small parts that can be used in MEMS technologies i.e. e-blox They have the ability to create miniature tools and dies to help build MEMS technologies Micro Sensor 0.051mm

18. http://www.solid-edge.com/ Rapid Prototyping Use of 3D CAD modeling with SolidEdge 3D Scanning Technologies – Use of lasers and optics to scan surface objects 3D Holography Technologies – Holograms for real visualizations 3D CAD Model

19. http://www.epner.com/electroforming_intro.ssi Electroforming Technologies Electroforming is the process of fabricating a part from the plating itself. A shaped mandrel is plated long enough to build up a "stand alone" thickness. The mandrel is then removed by melting, chemically etching or exploiting differences in thermal coefficients of expansion between the electroformed part and the mandrel.

20. http://www.memsnet.org/mems/beginner/etch.ht ml Etching Technologies Wet Etching – Dissolves materials with chemicals and the use of masks Dry Etching - ion etching (RIE), sputter etching, and vapor phase etching are used by blasting the material surface with ion gases

21. http://www.intel.com/research/silicon/lithography.htm Lithography Technologies Lithography is a printing process where image areas and non-image areas are separated chemically Silicon semiconductor companies use extremely small masks to mark silicon wafers with 248 nm, 193nm, and now 13.4nm wavelengths of light

22. Piezeo electronics (for micro to nano movement) Pizeoelectronics are materials that produce an electrical response to a mechanical force. Can be used in Vibration Monitoring, Imaging Arrays, Doppler Probes, Biotech, Pharmaceutical, and Industrial & Process Control

23. http://www.sciam.com/article.cfm?chanID=sa00 2&articleID=000CE8C4-DC31-1055- 973683414B7F0000&pageNumber=4&catID=2 First NanoChips Integrated circuits can be made down to 50nm 50nm chips are made using 193nm lithography (smaller than a wavelength so they use diffraction corrections)

24. http://www.sciam.com/article.cfm?chanID=sa00 2&articleID=000CE8C4-DC31-1055- 973683414B7F0000&pageNumber=4&catID=2 Next Generation Nano Lithography To build chips smaller than 50nm, new lithography technologies must be created – The above technology can use 13nm ultraviolet wavelengths

25. http://www.sciam.com/article.cfm?chanID=sa00 2&articleID=000CE8C4-DC31-1055- 973683414B7F0000&pageNumber=4&catID=2 Nano Biotechnologies Scientists have developed a way to use DNA for minuscule wires that can be used in nanoelectronics Ability to have insulated wires sized at 25nm and 20 microns in length

26. http://www.lbl.gov/Science- Articles/Archive/images4/nanotubes-model.jpg Nanotubes Conductive and high- strength composites Energy storage and energy conversion devices Sensors Medical drug delivery and DNA research Nanometer-sized semiconductor devices, probes, and interconnects Nanotubes are built by arranging several atoms in a closed pattern to form an unbelievably small tube