1. Ceramic Material Grades
CERAMIC Materials
SiC
Si3N4
AlN
Y2O3
Al2O3-TiC
ZrO2
SiO2
Si3N4,TiN
Al2O3,TiC
ZrO2,Y
ZrO2,M
998
990
960
99.99
Density
g/cm3
3.18
3.4
3.5
3.3 5
4.25
6.05
5.7
3.98
3.85
3.7
2.2
Hardness HV
2500
1600
1500
1100
600
2100
1250
1200
1700
1350
900
Bending Strength
MPa
450
850
950
330
140
800
700
400
350
300 90
Compression Strength
3500
4000
3000
N/A
1800
2300
Fracture Toughness
MPam1/2
5.2
5.5 3
1.4 6 9
Young’s Modulus
Gpa
430
290
310
170
410
200
390
360
320 74
Poisson’s ratio
0.16
0.28
0.22
0.31
0.2
0.3
0.23
0.17
Thermal Conductivity
W/(mK)
100 25 40 14 35 30
1.38
CTE
10-6/K
4.0
3.0
9.1
7.5 11 10
7.9
Thermal Shock ΔT
150
250
Maximum temp °C
1300
1400
500
Grain size Μm
0.7 1
2.5
Volume Resistivity Ω㎝
105
1012 -
1014
1012-
1014-
Chemical Durability
Acid
Excellent
Good
Normal
Alkali
Poor

2. Properties of SiC Grades
Items
CVD
SIC (Directed)
RBSC(Si-SiC)
Measuring method
Grade M T P
A100
A200
A300
Density (g/cm3)
3.20
3.15
3.18
3.02
3.07
2.95
3.08
3.11~3.16
Archimedes’ method
Component (wt%)
SiC < 100
SiC ~ 99
B,C ~1
SiC ~90
Si ~ 15
SiC ~80
Si ~ 20
SiC ~ 90
Si ~ 10
SiC ~ 92
Si ~ 8
EDS, XRD, Density
Crystal Size(um)
3 ~ 10
5~30
50~200 10
SEM
Hardness (Hv)
2700
2500
1900
1500
2000
<2100
<2200
Vickers 9.8N
Fracture Toughness
(MPa×m1/2)
3.5 ±0.1
3.5
2.5
Indention method
Bending Strength
(MPa)
480
450
550
270
250
350
4 point MOR
Volume Resistivity
(ohm-cm)
10-1
105
101
10-2
3X10-2
2X10-1
102
4points probe, ASTM
Thermal Expansion Coeff.
(10-6/K)
4.0
4.3
4.5
ASTM C372
Thermal Conductivity
(W/m.k)
200
150
180
100
130
ASTM C408