1. EEE5425 Introduction to Nanotechnology
EMT 532 Nanoelectronic Devices
Mohamad Halim Abd. Wahid
M.H.A.Wahid
EEE5425 Introduction to Nanotechnology

2. Introduction to Nanoelectronics
Chapter One
Introduction to Nanoelectronics

3. What is in a Name? nano: means “dwarf” in Greek
nano: the SI prefix meaning 10-9
nanometer: 10-9 meters; one billionth of a meter
A human hair is 50,000 – 80,000 nanometers wide
and grows ~10 nm every second (~600 nm every minute)

4. Scale of Lengths

5. There's Plenty of Room at the Bottom
Richard Feynman gave a seminal talk on December 29th 1959 at the annual meeting of the American Physical Society at the California Institute of Technology.
I would like to describe a field, in which little has been done, but in which an enormous amount can be done in principle. This field is not quite the same as the others in that it will not tell us much of fundamental physics (in the sense of, ``What are the strange particles?'') but it is more like solid-state physics in the sense that it might tell us much of great interest about the strange phenomena that occur in complex situations. Furthermore, a point that is most important is that it would have an enormous number of technical applications.
What I want to talk about is the problem of manipulating and controlling things on a small scale.
Now, the name of this talk is ``There is Plenty of Room at the Bottom''---not just ``There is Room at the Bottom.'' What I have demonstrated is that there is room---that you can decrease the size of things in a practical way. I now want to show that there is plenty of room. I will not now discuss how we are going to do it, but only what is possible in principle---in other words, what is possible according to the laws of physics. I am not inventing anti-gravity, which is possible someday only if the laws are not what we think. I am telling you what could be done if the laws are what we think; we are not doing it simply because we haven't yet gotten around to it.

6. Nano-Technology
The word “nanotechnology “ was first used in 1974 by Norio Taniguchi in an paper entitled “On the Basic Concept of Nano-Technology”, (with a hyphen) presented at the International Conference on Production Engineering held in Tokyo, Japan. He wrote:
“In the processing of materials the smallest bit size of stock removal, accretion or flow of material is probably of one atom or one molecule, namely 0.1~0.2 nm in length. Therefore, the expected limit size of fineness would be of the order of 1 nm. …”Nano-technology” mainly consists of the processing …separation, consolidation and deformation of materials by one atom or one molecule”
By the 1980s people were regularly using and spreading the word nanotechnology.

7. Nanotechnology
The central point about nanotechnology is not smallness itself, but the abundance of brand new substance properties that can only be uncovered and accessed through the abilities to observe, control, and manipulate the very small. The true value of nanotechnology is derived through capturing these brand-new substance properties and capturing them in cost-effective, market-viable ways. From this perspective, nanotechnology (as opposed to nanoscience) can be defined as:
✦ technologies that lead to applications derived from harnessing new substance properties through the abilities to control and manipulate substances in length scales smaller than 100 nm
✦ that these applications are, or have realistic prospects to become, cost performance superior and market-viable.
Technologies that do not comply with the first requirement are not “nano” technologies.
Those that do not comply with the second will have little significance, as far as being “technology” is concerned. The latter is an especially important consideration. Either we make the technology cost effective enough or find applications with values-added high enough to justify the costs.

8. Why Nanotechnology? Smaller is better
Portable, wearable, lightweigth, less power
Cheaper, less material, more scale
New functions, new phenomena (chemistry, biology, physics)
Revolutionary Technology
Nanotechnology is an enabling technology with diverse applications.
Medicine
Electronics
Defense
Security
Energy
Sports
Food
Environment
Communication
Space

9. Question
If we continue scaling down, will picotechnology and femtotechnology be next?

10. Ever Increasing Scaling
In his seminal talk “There’s Plenty of Room at the Bottom” Feynman set two challenges (Caltech 1960)
• Construct a 1/64 cubic inch motor
– Claimed in 1960
– On display at Caltech today
• Encyclopedia Britannica on head of a pin
– Actually one page in 10 microns2
– Claimed in 1985
– Used electron-beam lithography
Figure (a) Richard Feynman viewing the micromotor built by William McLellan (left) who won the challenge to build the first motor smaller than 1/64th of an inch. (b) The motor, 3.81 mm wide, photographed under an optical microscope. The huge object above it is the head of a pin. (Picture credit: Caltech Archives)

11. Moore's Law
Moore's law describes a trend in the history of computer hardware. The number of transistors that can be inexpensively placed on an integrated circuit is increasing exponentially, doubling approximately every two years. The trend was first observed by Intel co-founder Gordon E. Moore in a 1965 paper as complexity will be doubled in every year and than revised in 1975 as it will double in every two years.

12. 18 Months vs 24 Months ???

13. Moore's Law

14. Then and Now

15. What Scaling Means?

16. Scale of Economics
From sand to ultrapure Si single crystal wafers to CPUs
$35 / ton
$200 / 300mm wafer
$300 / CPU

17. “Top down” vs “Bottom up”
Methods of Scaling
“Top down” vs “Bottom up”
Nanotechnology represents a most fundamental paradigm shift. Until now, technology has been only one way— from the top down—where we start with sizable pieces of materials and work them down toward ever smaller and more precise dimensions. Doing things this way has become ever harder as the dimensions we have to deal with are becoming ever tinier.
We are now in possession of enough tools and capabilities that would allow us to go the other direction—from the bottom up—where we start with building blocks measured in nanometers .
“Top down” “Bottom up”
Self-assembly
Lithography (UV, e-beam)
Deposition
Etching

18. Mimicking the Greatest Engineer

19. Mimicking the Greatest Engineer
DNA
2-3 nm per base pair
Human genome contains ~ 109 base pairs
Proteins
typically 1-10 nm in size
100,000 different proteins in human genetic code
all are synthesized enzymatically (bottom up)
Biological Nano-motors
ATP synthase
Kinesin, Actin important for muscle movement
Nanotechnology is important for life itself

20. Mimicking the Greatest Engineer
ATP Synthase
10 nm nanomachine at the mitochondria membrane
Uses proton gradient to convert ADP to ATP
Extremely important for metabolism

21. Mimicking the Greatest Engineer
Lithography can do 10 nm
Tricks to 2 nm
Biosystems can add 2 carbon atoms at a time
Typical in lipid biosynthesis
Enzymes are nano machines
We do not know how to design enzymes, only copy them
As such, nanotechnology does not yet exist according to Drexler’s definition

22. Nanotechnology is Interdisciplinary
Nanotechnology is engineering about the practical applications of various disciplines of science including physics, chemistry, material science and biology.
In turn its applications are in many different fields. Nanotech disciplines can be broken into seven main areas:
Nanomaterials (Nanoparticles, nanowires etc.)
Nanoelectronics
Nanophotonics
Nanomechanics (NEMs, nanoscale heat transfer etc.)
Nanomagnetics
Nanofluidics
Nanobioelectronics
In this course, Nanoelectronics is emphasized although all other fields are also briefly introduced.

23. Nanotechnology is Interdisciplinary
Some nanotechnology uses
Nanoparticles:
Catalysts for industrial chemical processing
Nanocapsules
Possible organ specific drug delivery
Nanomaterials
Improved strength and weight
E.g. carbon nanotube based materials could be stronger and lighter than steel
Nanomechanical devices
RF signal processing
Nanofluidic devices
Lab on a chip
Nanoelectronic devices (focus of this course)
Computation
Communication
Nano-bio-electronic interfaces
Chemical and biological weapons detection
DNA sequencing
Point-of-care clinical diagnoses
Fundamental studies of molecular biology

24. Nanotechnology is Expensive!
Million dollars
National Nanotechnology Initiative budgets.
Source: NIN website:

25. Nanotechnology is Expensive!
Top Ten Countries in Public Nanotechnology R&D, (2006)
Source: CRS Report for Congress: “Nanotechnology and U.S. Competitiveness: Issues and Options” 2008

26. And Requires Big Investments
Governments around the world are among the only investors that can afford to take the long term financial plunge. Private industry usually expects investments to pay off in 5 to 10 years, sometimes even faster. As such federal nanotech funding in US, Europe and Asia tends to support fundamental research, intended to build the scientific knowledge base upon which businesses can capitalize. Governmental investments in science do not necessarily require immediate economic benefits.
Still, large multinational R&D giants such as IBM, GE and HP have made significant internal investments in research and development programs. While outcomes are historically difficult to predict, basic research is vital to technological growth. It is where the lucrative scientific surprises come from. It is not surprising, then, that more than half of the thirty companies in the Dow Jones Industrial Index have lunched some type of nano initiative.

27. But Big Investments are Good
Especially for grad students
Estimates pegged the number of people working in nanotech research in 2005 at around 20,000. Within 15 years, this number is expected to reach 2 million.
Your next job may be nano-related!

28. IP Production in Nanotechnology
Publications on nanoscale science and engineering topics since (2006)
International patent activity in nanotechnology (2006)
Source: Lux Research Report (2007)

29. A New “Gold Rush”??
A deluge of patent applications has resulted in what some are calling a “land grab” for intellectual property. This gold-rush mentality has led to thousands of US patents issued, with thousands awaiting judgment. Most of these fall into five nanomaterials categories:
(1) dendrimers (2) quantum dots (3) carbon nanotubes (4) fullerenes (5) nanowires.
Review s of these patents have revealed much overlap and fragmentation, meaning that to avoid infringement, many entrepreneurs will first need to strike agreements with numerous patent holders before cashing in on the technology.

30. Some Dystopia
Grey goo is a hypothetical end-of-the-world scenario involving molecular nanotechnology in which out-of-control self-replicating robots consume all matter on Earth while building more of themselves,[ a scenario known as ecophagy ("eating the environment").
Self-replicating machines of the macroscopic variety were originally described by mathematician John von Neumann, and are sometimes referred to as von Neumann machines. The term grey goo was coined by nanotechnology pioneer Eric Drexler in his 1986 book Engines of Creation.

31. A Word of Warning
Don’t expect the goals of nanotechnology to be achieved in just one or two years
• If we promise too much, nanotechnology boom will go the way of the dot coms
• In contrast to the dot coms, I hope to convince you in this course that there is truly new technology and science, which will one day be useful, and possibly revolutionary.

33. Projects Many more you can develop… Conduction in DNA (is it a wire?)
Nanotubes as interconnects
Nanowire lasers
Nanoelectronic devices – CMOS
Single electron transistor
Quantum computing -
experimental realizations
Quantum dot lasers
Photonic crystal devices
Nanomechanical resonators
Nanoimprint lithography
Limits in conventional lithography
Molecular electronics
Spintronics
Nanoscale magnetism
Nanopores for DNA sequencing
Nanowire/Nanotube chemical
Sensors
Self assembly of nanoparticles
Block copolymer self-assembled
structures
Device applications of nanoparticles
Integrated nanoscale biological
systems
Metal nanowires
Semiconducting nanowires
Nanowire photovoltaics
Nanowire thermoelectric
Nanowire thermophotoelectric
Nanomaterials for batteries
Many more you can develop…