1. Nikon NSR-2005I10C Stepper
Ⅰ. Nikon NSR-2005I10C I line Stepper Configuration
Currently Configured for 200mm wafer size
Model : Nikon NSR-2005I10C I LINE STEPPER
MFG Data : 1995
Location : Japan
Electric Source : NEMA BOX For CVCF
Condition : ASIS
Chamber Type : Maker SENDAI (1995) S04
Chamber Size : Body (1950mm)
Computer Type : NEST3
HP LASER : 5517B
LAMP Power : 1.75kw
LSA LASER : 5mW/10mW
Reticle Microscope : Fixed
Wafer Condition : Silicon
Other Wafer Stage : Ball Screw

2. Nikon NSR-2005I10C Stepper
Ⅰ. Nikon NSR-2005I10C I line Stepper Configuration
Currently Configured for 200mm wafer size
Chuck Type : Ring (Special)
OF Detection Type : Nikon Original Type
Wafer Loader Type : Type1
Wafer Type : Flat
Wafer Carrier Table : Right /
Extra In-Line : No
Reticle Size : 6 inch
FIA/LIA : FLA (yes), LIA (no)
Reticle Library Type : Nikon
Slot : Main : (O) Slot /13, Exit LIB (O) Slot 13
PPD/PD : PPD (no), PD (no)
Rack Type : Normal (Right)
SHRINC Type : 1
Note : Missing Parts : No

3. Nikon NSR-2005I10C Stepper
Ⅱ. Nikon NSR-2005I10C I line Stepper Photo (1)

4. Nikon NSR-2005I10C Stepper
Ⅱ. Nikon NSR-2005I10C I line Stepper Photo (2)

5. Nikon NSR-2005I10C Stepper
Ⅱ. Nikon NSR-2005I10C I line Stepper Photo (3)

6. Nikon NSR-2005I10C Stepper
Ⅱ. Nikon NSR-2005I10C I line Stepper Photo (4)