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9. Cleanroom Testing and Monitoring

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1 9. Cleanroom Testing and Monitoring

2 Purposes for initial test:
Fulfill the design working correctly and achieving the contamination standards Bench-mark: establish the initial performance of the room to compare the results of routine check or contamination problem in the future. Training the staff: (most important) initial testing is to familiarize and train the staff. Only opportunity to understand how their cleanroom works and learn the methods used to test.

3 initial test Time Tested standards Monitoring
been built/ going to hand over/ reopen Tested standards ISO Monitoring to regularly check the room at the time intervals set by ISO

4 Principles of Cleanroom Testing
Quantity: Turbulently: dilute--air volume (supply and extract) Unidirectional: remove –air velocity Direction (flow direction): from clean area  less-clean areas to minimise the movement of contaminated air. Quality: the air will not add significantly to the contamination within the room Distribution inside cleanroom the air movement has no areas with high concentrations of contamination.

5 Cleanroom Tests

6 Air supply and extract quantities
turbulently ventilated cleanrooms the air supply and extract volumes unidirectional airflow  air velocity. Air movement control between areas: direction The pressure differences between areas are correct. The air direction through doorways, hatches, etc. is from clean to less-clean.

7 Filter installation leak test
a damaged filter between the filter and its housing or any other part of the filter installation. Containment leak testing Contamination is not entering the cleanroom through its construction materials.

8 Air movement control within the room
turbulently ventilated : check that there are no areas within the room with insufficient air movement. unidirectional airflow : check that the air velocity and direction throughout the room is that specified in the design. Airborne particles and microbial concentrations final measurements of the concentration of particles and micro-organisms

9 Additional tests temperature relative humidity
heating and cooling capabilities of the room sound levels lighting levels vibration levels.

10 requirements Guides provided by
the American Society Heating Refrigeration and Airconditioning Engineers (ASHRAE) in the USA, and the Chartered Institute of Building Services Engineers (CIBSE) in the UK.

11 Testing in Relation to Room Type and Occupation State
The type of tests to be carried out in a cleanroom depends on whether the room is unidirectional, turbulent or mixed airflow: ‘as-built’ ---in the empty room, ‘at rest’ --- the room fitted with machinery but no personnel present or ‘fully operational’---these occupancy states are discussed more fully in Section 3.4 of this book.

12 Re-testing to Demonstrate Compliance
The cleanroom checked intervals, these intervals being more frequent in higher specified rooms: ISO

13 Monitoring of Cleanrooms
Use risk assessment to decide what monitoring tests should be done and how often. The variables that are most likely to be monitored are: air pressure difference This might be necessary in high quality cleanrooms such as ISO Class 4, and better. airborne particle count where appropriate, microbiological counts.

14 10. Measurement of Air Quantities and Pressure Differences

15 Purpose A cleanroom must have sufficient clean air supplied to dilute and remove the airborne contamination generated within the room. Air Cleanliness: Turbulently ventilated cleanroom air supply; the more air supplied in a given time, the cleaner the room. unidirectional cleanroom air supply velocity Test: Initial testing of the design Regular intervals check

16 Air Quantities Instruments: Turbulently ventilated rooms
Hoods: air supply volumes Anemometers: air velocities Turbulently ventilated rooms measured within the air conditioning ducts Pitot-static tube

17 Measuring air quantities from within a cleanroom
Air air filter (no diffuser) anemometer at the filter face average velocity  air volume Difficulty: the non-uniformity of the air velocity inaccurate measurement Air air diffusers unevenness of air velocities incorrect air volume Hood: air supply volume average velocity measured at the exit of the hood air volume

18 Anemometers Anemometers: away from the filter of about 30cm (12 inches) Vane Anemometer Principle: Air supply  turning a vane  frequency  velocity Accuracy: velocity is less than about 0.2 m/s (40 ft/min), the mechanical friction affects the turning of the vane

19 Vane Anemometer

20 Thermal Anemometers Principle: Air passing through the head of the instrument cooling effect  the air velocity: Fig.10.3 : a bead thermistor (有孔的電熱調節器) Low velocities can be measured with this type of apparatus

21 Differential Pressure Tests
The units: Pascals, inch water gauge are used (12Pa = 0.05 inch water gauge). Pressure difference: 10 or 15 Pa between clean areas 15 Pa is commonly used between a cleanroom and an unclassified room, 10 Pa between two cleanrooms.

22 Large openings: problems can occur when trying to achieve a pressure difference between areas connected by large openings, such as a supply tunnel. To achieve the suggested pressure drop : Very large air quantities through the tunnel To accept a lower pressure difference

23 Apparatus for measuring pressure differences
Manometer: range of pressure difference of 0-60 Pa ( inch water) inclined manometer; magnehelic gauge; electronic manometer

24 Inclined manometer works by pressure pushing a liquid up an inclined tube. small pressure changes in the inclined tube up to a pressure of about 60 Pa. After that pressure, the tube moves round to the vertical measuring pressure differences can be in the 100 to 500 Pa range.

25 Methods of checking pressure differences
pressure differences between areas adjusting the pressure differences : extract be reduced to increase the pressure, and increased to decrease it. If manometers are not permanently installed, a tube from a pressure gauge is passed under the door, or through an open by-pass grille or damper into the adjacent area. In some ventilation systems, the pressures within rooms are measured with respect to one reference point. When this type of system is being checked, the pressure difference across a doorway can be calculated by subtracting the two readings of the adjoining spaces.


27 11. Air Movement Control Between and Within Cleanrooms

28 Purposes To show that a cleanroom is working correctly, it is necessary to demonstrate that no contamination infiltrates into the cleanroom from dirtier adjacent areas. Cleanroom Containment Leak Testing Airborne contamination: doors and hatches, holes and cracks in the walls, ceilings and other parts of the cleanroom fabric

29 Contamination can be pushed into the cleanroom at
ceiling-to-wall interface filter and lighting housings-to-ceiling interfaces ceiling-to-column interface the cladding of the ceiling support pillars Service plenums and the entry of services into the cleanroom: electrical sockets and switches, and other types of services providers. Particularly difficult to foresee and control in a negatively pressurized containment room.


31 Methods of checking infiltration
Smoke test (dust test) flow direction: open door, or through the cracks around a closed door, cracks at the walls, ceiling, floor and filter housings, service ducts or conduits. Difficulty where the containment originates from may be unknown, and it is often difficult to find the places to release test smoke.

32 Containment leak testing
Timing handing it over to the user major reconstruction work has been carried out ISO lists the ‘containment leak’ test as an ‘optional’ test and suggest a re-testing interval of two years

33 Air Movement Control within a Cleanroom
sufficient air movement dilute, or remove airborne contamination prevent a build-up of contamination turbulently ventilated cleanroom: good mixing, critical areas: where the product is exposed to the risk of contamination unidirectional flow cleanroom critical areas should be supplied with air coming directly from the high efficiency filters. However, problems may be encountered because of: heat rising from the machinery and disrupting the airflow obstructions preventing the supply air getting to the critical area obstructions, or the machinery shape, turning the unidirectional flow into turbulent flow contamination being entrained into the clean air.

34 Air movement visualization
Objective: sufficient clean air gets to the critical areas qualitative methods Visualization: Streamers smoke or particle streams Streamers (threads or tapes): high surface-area-to-weight ratio, ex. recording tapes A horizontal flow: 0.5 m/s (100 ft/min) streamer 45° to the horizontal about 1m/s (200 ft/min) almost horizontal.

35 Streamers

36 smoke or particle streams
oil smoke  contamination Water vapour : from solid C02 (dry ice) or by nebulizing water

37 putter and smoke tube': Titanium tetrachloride (TiCl4)produces acid  corrodes some surfaces harmful to sensitive machinery or harm the operator's lungs.

38 Air Movement in turbulently ventilated rooms
working well: quickly dispersed not working well Areas: not disperse quickly contamination build up  improved by adjusting the air supply diffuser blades, removing an obstruction, moving a machine.

39 Air Movement in unidirectional flow
air moves in lines Visualisation techniques: smoke stream Still picture

40 Air velocity and Direction measurement
A permanent record: velocity and direction


42 Recovery Test Method A quantitative approach
A burst of test particles introduced into the area to be tested mixed with their surroundingsthe airborne particle count should be measured, A useful endpoint is one-hundredth of the original concentration, and the time taken to reach there can be used as an index of efficiency.


44 Ch. 12 Filter Installation Leak Testing

45 HEPA test Manufacturer's factory and packed OK
Unpacked and fitted into the filter housings maybe damage Leakage problems casing housing Testing : artificial test aerosol

46 Leakage areas in a HEPA filter
A - filter paper-to-case cement area C- gasket D - frame joints. B - filter paper (often at the paper fold)

47 Gasket and casing leaks from filter inserted up from cleanroom
Gasket leaks from filters inserted down from ceiling

48 Figure 12.4 Filter-housing gel seal method

49 Artificial Smoke and Particle Test
Cold-generated oils Di-octyl phthalate (DOP)鄰苯二甲酸二辛酯 oily liquid, potentially toxic effects, no longer used Di-octylsebacate (DOS)葵二酸二辛酯 常用 poly alpha olefin (PAO)聚烯茎油

50 Cold-generated oil Test
Air+ oil particle Laskin nozzle air (high pressure) 0.5 mm Air pump oil

51 Hot generated smokes inert gas: CO2 Evaporation chamber oil smoke oil
vaporize Evaporation chamber oil smoke condense oil aerosol 0.3 mm

52 Hot oil smoke generator

53 Semiconductor manufacturing
'outgassing' chemical products harmful to filter 使用Polystyrene Latex Spheres (PLSs) 聚苯乙烯乳膠球(0.1 ~ 1mm)

54 Apparatus for Measuring Smoke Penetration
Photometer光度計 28 1/min (1 ft3/min) of airborne particles particles refract the light electrical signal concentration: between μg/1 and 100 μg/1.

55 Single particle counters
sample a volume of air and this is collected in a set time

56 Methods of Testing Filters and Filter Housings
Scanning methods a probe with a photometer, or single particle counter, Scan speed : not more than 5cm/s leaks : media, filter case, its housing The most common leaks: around the periphery of the filter the casing-to-housing seal, the casing joints

57 Repair of leaks Filter media leak replaced at the fold of the paper
repaired on site with silicon replaced

58 Ch. 13 Airborne Particle Counts

59 Cleanroom test air supply volume, pressure differences,
air movement within and between cleanrooms, filter integrity airborne particle concentration

60 Particle counter Particle counter : both counts and sizes
Photometer : mass of particles

61 principle of Particle Counter

62 Particle Counter

63 Airborne particle counter: flow rate: 28 1/min (1 ft3/min) of air
size range: regular 0.3 μm or 0.5 μm high-sensitivity: 0.1 μm but with a smaller air volume. Check: p-counter.pdf Opc-8240.pdf

64 Continuous Monitoring Apparatus for Airborne Particles
sequential simultaneous

65 Sequential monitoring system

66 Simultaneous monitoring system
best but most expensive

67 Particle Counting in Different Occupancy States
Occupancy state: as built, at rest, operational. cleanroom contractor: 'as built' ‘rule of thumb: ‘as built’ room will be about one class of cleanliness cleaner than when ‘operational’.

68 Measurement of Particle Concentrations (ISO 14644-1)
Principles: The number of sampling locations must reflect the size of the room and its cleanliness. The methods: (a) number of sampling locations and (b) the minimum air volume

69 Sample locations and number (ISO standard 14644-1)
Minimum number of locations: Where NL rounded up to a whole number A is the area of the cleanroom, or clean air controlled space, in m2. evenly distributed and height

70 Airborne sampling volume
Minimum volume at each location: the air volume should be large enough to count 20 particles of the largest particle size specified V= 20/C x 1000 where V is the minimum single sample volume per location, expressed in litres. C is the class limit (number of particles/m3)

71 One or more samples : at each location
The volume sampled at each location: at least two liters The minimum sample time : at least one minute

72 Acceptance criteria( ISO 14644-1)
the average particle concentration at each of the particle measuring locations falls below the class limit when the total number of locations sampled is less than 10, the calculated 95% Upper Confidence Limit (UCL) of the particle concentrations is below the class limit.

73 Example 4m x 5m size. ISO Class 3 in the 'as built' condition at a particle size of >= 0.1 μm. Number of locations A= 4m x 5m.  N = √4x5 = 4.475 The minimum number of locations is 5 Minimum air sampling volume V= 20/C x 1000 C: ISO Class 3 room is 1000/m3. ∴Minimum volume = 20/1000 x 1000= 20 litres

74 particle counter flow rate of 28.3 liter/min,
i.e. 20liter, time = 42 s ISO requires a minimum sample time of 1 minute  1 minute

75 first part of the ISO requirement is therefore satisfied(<1000).OK
As less than nine samples were taken 95% UCL does not exceeded the class limit. ???

76 Calculation of 95%UCL the 'means of averages': M
Standard deviation (s.d). Standard deviation s.d.=69 95﹪UCL = M+[UCL factor x (s.d/√n)] As number of locations is 5, the t-factor is 2.1. ∴ 95﹪ UCL for particles > 0.1 μm = [ 2.1 x 69/√5 ]= 661<1000

77 The cleanroom is therefore within the required class limit.
The way to avoid any 95% UCL problems is to always test more than nine points in the room

78 Ch.14 Microbial Counts

79 People are normally the only source of micro-organisms in a cleanroom
as built/ at rest  little value Operational: micro-organisms are continually dispersed from people in the room.

80 Microbial Sampling of the Air
Volumetric air sampler Settle plate sampling

81 Volumetric' air samplers
a given volume of air is sampled; also known as 'active' sampling. impact micro-organisms onto agar media; remove micro-organisms by membrane filtration.

82 Agar: jelly-type material with nutrients added to support microbial growth.
Micro-organisms landing  temperature, time colony (millimetres diameter)

83 Settle plate sampling where micro-organisms are deposited, mainly by gravity, onto an agar plate. Impaction onto agar: inertial impaction centrifugal forces.

84 Time and Temperature to grow
Bacteria : 48 hours at 30° C to 35° C; Fungi: 72 hours at 20° C to 25° C

85 Inertial impaction samplers
Flow rate: 30 to 180 litres/min (1 ft3/min to 6 ft3/min) of air Air Inertial impactors  slit or hole  accelerate (20~30m/s)

86 Centrifugal air samplers
Air rotating vane centrifugal force  agar surface


88 The impaction surface is in the form of a plastic strip with rectangular recesses into which agar is dispensed

89 Membrane filtration A membrane filter is mounted in a holder vacuum draw air  microbe-carrying will be filtered out by membrane  The membrane placed an agar plate A membrane filter with a grid printed on the surface will assist in counting the micro-organisms.

90 Membrane holder with filter

91 Microbial Deposition onto Surfaces
Indirect measurementvolumetric sampling direct method settle plate sampling

92 Settle plate sampling micro-organisms skin particles 10 to 30μm by gravity onto surfaces at an average rate of about 1 cm/s Settle plate sampling: Petri dishes (diameter:90mm) containing agar medium  opened and exposed  time (4~5 hours) particles to deposit Petri dishes

93 Calculation of the likely airborne contamination

94 Microbial Surface Sampling
contact sampling swabbing

95 Contact surface sampling
surface (flat) RODAC (Replicate Organisms Detection and Counting) dishes Fig 14.5 are usedThe agar is rolled over the cleanroom surface Micro-organisms stick to the agar incubated time and temperature micro-organisms grow & counted.

96 Contact Slides

97 Swabbing uneven surfaces: bud swab rubbed surface and then rubbed over an agar plate.

98 Copan Swab Rinse Kits

99 Personnel sampling Personnel are the primary source of micro-organisms in a cleanroom. The methods commonly used are: Finger dabs. The person's fingers tips, or their gloved hand, is pressed or wiped on an agar plate and the number of micro-organisms ascertained. Contact plates or strips. The person's garments are sampled by pressing the plate or strip onto their clothing. This is best done as they come out of the cleanroom. Body box. If a person wearing normal indoor clothing exercises within a body box their dispersion rate of airborne micro-organisms can be ascertained.

100 Dip Slide

101 15. Operating a Cleanroom: Contamination Control

102 Purpose considering the sources and routes of contamination within a cleanroom and how to control these.

103 Control contamination
assessing risk during manufacturing: such as Fault Tree Analysis (FTA) and Failure Mode and Effect Analysis (FMEA). (Electrical and mechanical systems)

104 Hazard Analysis and Critical Control Point (HACCP) system.
HACCP has a seven-step approach: Identify the sources of contamination in the cleanroom. Assess the importance of these sources Identify methods that can be used to control these hazards. Determine valid sampling methods to monitor either the hazards, or their control methods, or both.

105 Establish a monitoring schedule with 'alert' and 'action' levels
Verify that the contamination control system is working effectively by reviewing the product rejection rate, sampling results and control methods and, where appropriate, modifying them. Establish and maintain appropriate documentation. Train the staff.

106 Identification of Sources and Routes of Contamination
Sources of contamination dirty areas adjacent to the cleanroom; unfiltered air supply; room air; surfaces; people; machines, as they work; raw materials; containers; packaging.

107 Airborne and contact routes of transfer
The two main routes of transfer are airborne and contact. Airbone: particles are small; fibres, chips or cuttings fall directly on to the product. Contact: machines, containers, packaging, raw materials, gloves, clothes, etc.

108 Construction of a risk diagram
Risk diagram: possible sources of contamination; their main routes of transfer; methods of controlling this transfer. Figure 15.1 is an example of a risk diagram; the manufacturing process has been shown

109 Sources and routes of particle and microbial contamination in a
cleanroom along with preventative measures

110 Sources and routes of control associated with process machinery.

111 Assessment of the Importance of Hazards
Possible sources of contamination routes of transmission risk assessment Risk factors: risk factor A: the amount of contamination on, or in, the source that is available for transfer risk factor B: the ease by which the contamination is dispersed or transferred risk factor C: the proximity of the source to the critical point where the product is exposed risk factor D: how easily the contamination can pass through the control method

112 Risk factors for assessing hazards
Risk rating = A x B x C x D Low: a risk rating of less than 4 Medium: between 4 and 12 High: higher than 12

113 Identification of Methods to Control Hazards
Identify the contamination hazards their degree of risk assessed methods available to control them.

114 Figures 15.1 and 15.2 show methods that can be used to control the routes of spread of contamination. These are: HEPA or ULPA air filters  supply air Airborne contamination from areas outside the cleanroom air moves from the cleanroom outward The contamination from the floors, walls and ceiling  cleaning People’s mouth, hair, clothing and skin Cleanroom garments and gloves Contamination from machines  design of the machine, the use of exhaust air systems to draw the contamination away. Cleaning  dirt on the machine. Raw materials, containers and packaging  made from materials that do not generate contamination; manufactured in an environment have minimal concentrations of contamination; correctly wrapped to ensure that they are not contaminated during delivery

115 Sampling Methods to Monitor Hazards and Control Methods
Monitoring: collection efficiency of sampling instruments; calibration of the instruments; determination that the hazard is of sufficient importance to need to be monitored; determination that the sampling method used is the best available for directly measuring the hazard, or its control method.

116 Establishing a Monitoring Schedule with Alert and Action Levels
'alert' and 'action' conditions; 'warning' and 'alarm' levels. The 'alert' level should be set to indicate that the contamination concentrations are higher than might be expected, but are still under control. The 'action' level should be set such that when it is exceeded there should be an investigation. Analysing the monitoring results and setting 'alert' and 'action' levels is quite a complicated subject if a statistical approach is used. Knowledge of statistical techniques, especially the use of trend analysis.

117 Verification and Reappraisal of the System
The method is correctly implemented  rejection rate of the product; measurement of the particle, or microbial, levels in samples of the final product. We can now reassess the following: the relative importance of the hazards the necessity and the methods for controlling the hazards the effectiveness of the control methods the correctness of the monitoring schedule whether the 'action' and 'alert' levels should be lowered or raised.

118 Documentation An effective contamination control system will document
(1) the methods described in the preceding steps of this chapter, (2) the monitoring procedures, and (3) results from the monitoring. Regular reports should be issued of an analysis of the monitoring results and any deviations from the expected results.

119 Staff Training They first arrive at the cleanroom
Train at regular intervals throughout their careers.

120 16. Cleanroom Disciplines

121 Personnel source of contamination micro-organisms particles and fibres

122 People Allowed into Cleanrooms
Walking: produce 1,000,000 particles >= 0.5 mm several thousand microbe-carrying particles per minute

123 Suggestions contain criteria that can discriminate against some personnel
Skin conditions: skin cells, dermatitis, sunburn or bad dandruff. Respiratory conditions: coughing, sneezing Biocleanroom: allergic conditions, which cause sneezing, itching, scratching, or a running nose allergic to materials used in the cleanroom, (a) garments (polyester) (b) plastic or latex gloves, (c) chemicals: acids, solvents, cleaning agents and disinfectants, and (d) products manufactured in the room, e.g. antibiotics and hormones.

124 Personal Items Not Allowed into the Cleanroom
General rule: nothing should be allowed into the cleanroom that is not required for production within the room.

125 Prohibited items: food, drink, sweets and chewing gum
cans or bottles, smoking materials radios, CD players, Walkmans, cell phones, pagers, etc. newspapers, magazines, books and paper handkerchiefs pencils and erasers wallets, purses and other similar items.

126 Disciplines within the Cleanroom
Within a cleanroom: rules-of-conduct: written procedures; 'does and don'ts' posted in the change or production area Air transfer: come in and out through change areas: buffer zone; not use emergency exit Doors: not be left open; not be opened or closed quickly: open inwards into the production room

127 Personnel behaviour No Silly behaviour: The generation of contamination is proportional to activity. motionless: 100,000 particles >=0.5 μm/min head, arms and body moving: 1,000,000 particles >= 0.5 mm/min walking: 5,000,000 particles >= 0.5 μm/min

128 Personnel product position themselves correctly
not lean over the product; working in unidirectional air: not between the product and the source of the clean air, i.e. the air filter. 'No-touch' techniques should be devised: from gloved hand onto the product.

129 Oil and skin particles would contaminate the wafer with catastrophic results.
not support material against their body No personal handkerchiefs Washing, or disinfection when required, of gloves during use should be considered.

130 Handling materials The movement of materials between the inside and outside of a cleanroom should be minimized. Waste material: collected frequently into easily identified containers and removed frequently from the cleanroom.

131 Maintenance and Service Personnel
Enter a cleanroom with permission. Maintenance be trained  cleanroom techniques, or closely supervised when they are within the cleanroom. Wear the same cleanroom clothing as cleanroom personnel Technicians should ensure they remove dirty boiler suits, etc. and wash their hands before changing into cleanroom clothing.

132 Tools  cleaned and sterilized; stored for sole used within the cleanroom; Tool’s materials  not corrode. Only the tools or instruments needed within the room should be selected, decontaminated, and put into a cleanroom compatible bag or container. instructions or drawings can be photocopied onto cleanroom paper, or laminated within plastic sheets, or placed in sealed plastic bags. Particle generating operations such as drilling holes, or repairing ceilings and floors should be isolated from the rest of the area. A localized extract or vacuum can also be used to remove any dust generated.

133 17. Entry and Exit of Personnel

134 Features of cleanroom clothing:
Skin and clothing: millions of particles and thousands of microbe-carrying particles Features of cleanroom clothing: not break up and lint: disperse the minimum of fibres and particles filter: against particles dispersed from the person's skin and their clothing.

135 The type of cleanroom clothing
contamination control is very important: a coverall, hood, facemask, knee-length boots and gloves contamination is not as important: less enveloping clothing such as a smock, cap and shoe covers

136 Prior to Arriving at the Cleanroom
Frequency of bathe or shower: remove the natural skin oils; dispersion of skin and skin bacteria; dry skin may wish to use a skin lotion What clothing is best worn below cleanroom garments? Artificial fibres: polyester are better than those made from wool and cotton Close-woven fabrics: more effective in filtering and controlling the particles and microbe-carrying particles Cosmetics, hair spray, nail varnish removed rings, watches and valuables removed and stored

137 Changing into Cleanroom Garments
The best method of changing into cleanroom garments is one that minimises contamination getting onto the outside of the garments. The design of clothing change areas is divided into zones: Pre-change zone Changing zone Cleanroom entrance zone.

138 Approaching the pre-change zone
blow nose, go to the toilet shoe cleaner Sticky cleanroom mats or flooring: two general types


140 Pre-change zone street or factory clothes removed
Watches and rings removed. Items such as cigarettes and lighters, wallets and other valuables should be securely stored. Remove cosmetics and apply a suitable skin moisturizer (no chemicals used in the formulation cause contamination problems in the product being manufactured) Put on a pair of disposable footwear coverings, or change into dedicated cleanroom shoes. wash the hands, dry them and apply a suitable hand lotion. Cross over from the pre-entry area into the change zone.

141 Changing zone The garments to be worn are selected.
A facemask and hood (or cap) is put on Temporary gloves known as 'donning gloves' are sometimes used The coverall (or gown) should be removed from its packaging and unfolded without touching the floor.

142 Cleanroom entrance zone
rossover bench: allows cleanroom footwear (overshoes or overboots) to be correctly put on. Protective goggle can be put on. These are used not only for safety reasons but to prevent eyelashes and eyebrow hair falling onto the product.

143 goggle

144 The garments should be checked in a full-length mirror to see that they are worn correctly.
If donning gloves have been used they can be dispensed with now. They can, however, be kept on and a pair of clean working gloves put on top. Two pairs of gloves can be used as a precaution against punctures, although sensitivity of touch is lost.

145 Low particle (and if required, sterile) working gloves should now be put on. In some cleanrooms this task is left until the personnel is within the production cleanroom.

146 Exit Changing Procedures
When leaving a cleanroom, personnel will either discard all their garments and on reentry use a new set of garments (this is normally only employed in an aseptic pharmaceutical cleanroom) discard their disposable items, such as masks and gloves, but reuse their coverall, smock, etc. on re-entry. clothing  rolled up; footwear  pigeon holes; The hood (or cap) can be attached to the outside of the coverall (or gown)  hung up, preferably in a cabinet. Garment bags can be used.


148 18. Materials、Equipment and Machinery

149 Materials used in a cleanroom
For manufacturing Packaging for the product Process machinery and equipment Tools used for the maintenance, calibration or repair of equipment and machinery; Clothing for personnel, such as suits, gloves and masks;

150 Materials for cleaning, such as wipers and mops;
Disposable items such as writing materials, labels and swabs.

151 Materials used in a cleanroom for manufacturing
pharmaceutical manufacturing: containers and ingredients microelectronics industry: silicon wafers and process chemicals;

152 Contamination on materials can be:
particles micro-organisms chemicals electrostatic charge molecular outgassing.

153 Prohibited material: abrasives or powders;
aerosol-producing cans or bottles; items made from wood, rubber, paper, leather, wool, cotton and other naturally occurring materials that break up easily; items made from mild steel, or other materials that rust, corrode or oxidise;

154 items that cause problems when machined or processed, e. g
items that cause problems when machined or processed, e.g. they may smoke or break up; paper not manufactured for use in cleanrooms. pencils and erasers; paper correcting fluid; personal items listed in Section 16.2 should not be brought in by cleanroom personnel; disposable items such as swabs, tapes and labels that are not cleanroom compatible.

155 Transfer of Items and Small Pieces of Equipment through an Airlock
Transfer area with a bench door (uncontrolled area) opened and the person enters The package should be placed on the 'wrapped receiving' or 'dirtier' part of the pass-over bench

156 The wrapping is then cleaned and removed

157 The outer packaging is now removed and deposited into a suitable container. The item is then be placed on the 'wrapping removed' or 'clean' part of the bench

158 The person leave. The airlock may be left for a few minutes to allow the airborne contamination to come down to a concentration. Cleanroom personnel now enter the cleanroom and pick up items that have been left (Figure 18.6).


160 Entry of Machinery Machines, and other heavy and large bulky items of equipment, are occasionally taken in or out of a cleanroom. The best solution to the movement of bulky items is to design the materials airlock to be large enough to allow the entry and exit of every piece of machine to be brought in or out of the room.

161 19. Cleanroom Clothing

162 Contamination source: people  clothing  product
Cleanroom clothing: originated from hospitals Function: reducing inert particles and microbe-carrying particles.

163 Sources and Routes of Inert Particle Dispersion
More activity  more particles disperse Dispersion is dependent on the clothing worn, but can be in the range of 106 to 107 per minute for particles >= 0.5 μm, i.e. up to 1010 per day. People may disperse particles from: Skin; clothing they wear under cleanroom garments; cleanroom clothing mouth and nose.

164 Sources of particles and mechanisms of release
Skin: People shed approximately 109 skin cells per day. Skin cells are approximately 33μm x 44 μm Skin cells: released onto clothing and laundered away; others are washed away in the bathtub or shower. a large number are dispersed into the air.

165 Sources and routes of particles and microbe containing particles from people

166 Skin surface showing skin cells and beads of sweat

167 Clothing under cleanroom clothing
natural fabrics: such as a cotton shirt, cotton jeans and woollen jerseylarge quantities of particles. natural materials have fibres that are both short and break up easily. synthetic fabric: the particle challenge can be reduced by 90% or more.

168 Cotton fabric photographed through a microscope
Cotton fabric photographed through a microscope. Magnification about 100 times

169 Cleanroom clothing synthetic plastic materials: such as polyester or nylon.

170 Routes of transfer of particles
Pores: between 80μm and 100μm The particles generated from the skin and the inner clothing therefore pass through easily. Personnel move: particles be pumped out of closures at the neck, ankles, wrists and zips. Secure closures tight tears or holes, particles can easily pass through.

171 Microcolony of bacteria on surface of skin

172 Routes of microbial dispersion
The routes of transfer the same as with inert particles: the pores in the fabric poor closures at the neck, sleeves and ankles damage to the fabric, i.e. tears and holes. expelled from the mouth: speaking, coughing and sneezing. When males wear ordinary indoor clothing, the average rate being closer to 200 per minute. Females will generally disperse less.

173 Types of Cleanroom Clothing
Clothing designs The most effective type: completely envelopes a person; be made from a fabric that has effective filtration properties have secure closures at the wrist, neck and ankle. The choice of clothing will depend on what is being produced in the cleanroom. A poorer standard of cleanroom may use a cap, zip-up coat (smock) and shoe covers

174 In a higher standard of cleanroom a one-piece zip-up coverall, knee-high overboots and a hood that tucks under the neck of the garment will be typical

175 Cleanroom fabrics The most popular type of clothing is made from woven synthetic fabrics. Non-woven fabrics, such as Tyvek, are used as single, or limited reuse, garments. They are popular for visitors and are used by builders when constructing the room. They are also popular in pharmaceutical manufacturing facilities in the USA. Membrane barrier fabrics, such as GoreTex, which use a breathable membrane sandwiched onto, or between, synthetic woven fabrics, are very efficient; they are expensive, and hence are used in the higher standard rooms.

176 Garment construction To prevent the raw edges
To minimise shedding, the zippers, fasteners and shoe soles should not chip, break up or corrode. Choice of garments IEST Recommended Practice RP-CC

177 Table 19.2 Garment systems for aseptic cleanrooms (IEST RP CC-003.2)
R = recommended NR == not recommended AS = application specific (NR*) = not recommended in nonunidirectional flow Table 19.2 Garment systems for aseptic cleanrooms (IEST RP CC-003.2)

178 Processing of Cleanroom Garments and Change Frequency
to be reused cleanroom laundry antistatic treatment and disinfection or sterilisation Frequency of change semiconductor industry ( the highest specification), changed once or twice a week. fresh garments are put on every time personnel move into an aseptic pharmaceutical production area.

179 Body box: a, metronome; b, bacterial and particle sampler

180 Comparison of clothing made from different fabrics
Bacterial dispersion (counts/min) in relation to fabrics

181 Particle dispersion rate per minute in relation to fabric

182 20. Cleanroom Masks and Gloves

183 Dispersion from the month
sneezing, coughing and talking; these droplets contain salts and bacteria. Saliva particles and droplets : about 1 to 2000μm; 95% of them lie being between 2 and 100μm, with an average size of about 50μm; bacteria in saliva is normally over 107 bacteria per ml. A 100μm particle will drop 1 metre in about 3 seconds, but a 10μm particle takes about 5 minutes.

184 Drying time: Particles of water 1000μm in diameter will take about 3 minutes to evaporate, a 200μm particle will take 7 seconds, a 100μm particle about 1.6 seconds and a 50 μm particle about 0.4 seconds.

185 Efficiencies of over 95% for particles expelled from the mouth are usually obtained by most masks. A loss in efficiency is caused by particles passing round the side of the mask, and much of this is due to small particles (reported to be < 3μm in the dry state).

186 Number of inert and microbe-carrying particles emitted by a person

187 Particles emitted when pronouncing the letter `f’

188 Face masks surgical-style with straps and loops: disposable surgical-type

189 Consideration: pressure drop across the mask fabric; masks  high filtration efficiency against small particles give a high-pressure drop across the mask that causes the generated particles to be forced round the outside of the mask.  'veil' or 'yashmak' type, one of these types being exposed to show its shape in Figure The normal way it is worn is shown in Figure 20.5.


191 Powered exhaust headgear
These provide a barrier to contamination coming from the head, as well as the mouth. The exhaust from the helmet and face-shield is provided with a filtered exhaust system so that contamination does not escape into the cleanroom. An example is shown in Figure 20.6.

192 Cleanroom Gloves Hand contamination and gloves
There are two types of gloves associated with cleanrooms. Knitted or woven gloves are used for lower classes, i.e. ISO Class 7 (Class 10,000) and poorer areas, as well as undergloves. The knit or weave should be tight and a number of loose threads minimised. Barrier gloves, which have a continuous thin membrane covering the whole hand are used in the majority of cleanrooms.

193 Cleanroom gloves are not usually manufactured in a cleanroom; they therefore require cleaning before being used. Gloves may be required in some cleanrooms to prevent dangerous chemicals, usually acids or solvents, attacking the operator's hands. Some operator's skin is allergic to the materials that gloves are made from. Other glove properties: chemical resistance and compatibility, electrostatic discharge properties, surface ion contribution when wet, contact transfer, barrier integrity, permeability to liquids, heat resistance and outgassing.

194 Glove manufacturing process
Gloves are generally manufactured by dipping a 'former' (porcelain or stainless steel), shape of a hand, molten or liquid glove material removed from the molten or liquid material a layer of material stripped by release agent Release agents are a problem in cleanrooms  Release agents kept to a minimum. When stripped from the formers, latex gloves are 'sticky'. To correct this, latex gloves are washed in a chlorine bath. The free chlorine combines chemically with the latex chemical bonds and lead to a 'case-hardening' of the surface of the glove, which prevents them sticking to each other. This washing also helps to clean to the gloves.

195 Types of gloves Polyvinyl chloride (PVC) gloves Latex Gloves
Other Polymer Gloves

196 Polyvinyl chloride (PVC) gloves
These plastic gloves are also known as vinyl gloves and are popular in electronic cleanrooms; can not sterilised, not used in bioclean rooms. They are available in normal and long-sleeve length. Consideration should be made of the fact that plasticisers make up almost 50% of a vinyl glove. Plasdcisers come from the same group of chemicals used to test the integrity of air filters, i.e. phthalates, antistatic properties, outgassing

197 Latex Gloves This is the type used by surgeons, and the 'particle-free' type is now used in cleanrooms. Latex gloves can be produced 'powder-free', and those gloves that are washed further by use of filtered, deionised water are often used in ISO Class 4 (Class 10) or ISO Class 3 (Class 1) cleanrooms. They have good chemical resistance, giving protection against most weak acids and bases, and alcohols, as well as having a fairly good resistance against aldehydes and ketones. They are slightly more expensive to buy than the PVC type, but cheaper than any other polymer. They can be sterilised. Because of their elasticity, the glove can securely incorporate the cuff of a garment under the sleeve.

198 Other Polymer Gloves Polythene gloves Neoprene and nitrile gloves
are used in cleanrooms and have the advantage of being free of oils and additives, as well as resistant to puncturing. They are not resistant to aliphatic solvents. The main drawback of this glove type is that they are constructed from float sheets and the seams are welded. Manual dexterity is reduced with these gloves. Neoprene and nitrile gloves are chemically similar to latex gloves, but have the advantage of having a better resistance to solvents than latex gloves. They are slightly more expensive than latex. Polyurethane gloves are strong, very thin, quite inflexible, and expensive. They may be manufactured with microporous material for better comfort, or with carbon in the formulation which makes them conductive. PVA gloves are resistant to strong acids and solvents, but not water in which they are soluble. They are expensive. Gore-Tex gloves have welded seams and are hypoallergenic. They are breathable because of their porous membrane. They are expensive.


200 21. Cleaning a Cleanroom

201 Why a Cleanroom Must be Cleaned?
Particles: cleanroom clothing, over 100,000 particles >= 0.5 μm and over 10,000 particles >= 5.0μm. Machines also disperse millions of particles. Microbe-carrying particles: People can also disperse hundreds, or thousands, of microbe-carrying particles per minute. Because these micro-organisms are carried on skin cells, or fragments of skin cells, their average equivalent diameter is between 10 μm and 20 μm. Transfer: Cleanrooms surfaces get dirty be transferred by personnel touching a cleanroom surface and then the product.

202 Cleaning Methods and the Physics of Cleaning Surfaces
Forces hold particles to cleanroom surfaces: The main force : the London-van der WaaP’s force, this being an inter-molecular force. Electrostatic forces can also attract particles to a surface. A third force can arise after wet cleaning. Particles that are left behind will dry on the surface, and may adhere to it

203 The methods that are generally used for cleaning a cleanroom, are:
Vacuuming (wet or dry): immersing the particle in a liquid, as occurs in wet pick-up vacuuming Wet wiping (mopping or damp wiping): an aqueous-based detergent is used then the London-van der WaaFs force and electrostatic forces can be reduced or eliminated. The particle can then be pushed or drawn off from a surface by wiping, mopping or vacuuming. Picking-up with a tacky roller.

204 Vacuuming Dry vacuuming :
depends on a jet of air moving towards the vacuum nozzle and overcoming the adhesion forces of particles to the surface Figure 21.1 : efficiency of dry vacuuming against different sizes of sand particles on a glass surface. Wet vacuum: Water and solvents have much higher viscosity than air, so that the drag forces exerted by liquids on a surface particle are very much greater.

205 Efficiency of dry vacuuming

206 Wet -wiping Tacky rollers
Wet wiping, with wipers or mops, can efficiently clean cleanroom surfaces. The liquid used allows some of the particle-to-surface bonds to be broken and particles to float off. Tacky rollers The particle removal efficiency of 'tacky' rollers is dependent on the strength of the adhesive force of the roller's surface.

207 dry brush should never be used to sweep a cleanroom
dry brush should never be used to sweep a cleanroom. they can produce over 50 million particles >= 0.5 μm per minute. String mops are not much better, as they can produce almost 20 million particles >= 0.5 μm per minute.

208 Dry vacuuming: popular method
relatively inexpensive no cleaning liquids are needed Note: unfiltered exhaust-air must not pass into the cleanroom. This is achieved by using either an external central-vacuum source, or providing a portable vacuum's exhaust air with a HEPA or ULPA filter.

209 Wet vacuum or 'pick-up' system: is more efficient than dry vacuum
more efficient than a mopping method, less liquid left to dry on the floor floor will also dry quicker. Wet pick-up systems are used on conventionally ventilated cleanroom floors, but may not be suitable for the pass-though type of floor used in the vertical unidirectional system.

210 Mopping systems mops for cleanroom:
materials that do not easily break up: PVA or polyurethane open-pore foam, or a fabric such as polyester. The compatibility of the material to sterilization, disinfectants and solvents should be checked Buckets should be made from plastic or stainless steel.

211 Two and three bucket systems

212 How to use a three-bucket mopping system

213 Wipers Purpose: wipe surfaces and remove contamination; to wipe contamination from products produced; used dry to mop-up liquids that may have been spilled. Sorbency Sorbency is an important property of wipers. Wipers are often used to mop up a spillage and other similar tasks. wiper's sorbency: both its capacity (the amount of liquid it can sorb) and its rate (how fast it can sorb liqu

214 Tacky rollers Tacky rollers are similar in size and shape to paint rollers used in the home, but they have a tacky material around the outside of the roller. An example of a tacky roller is shown in Figure 21.7.

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