1. Semiconductor Processing Single Crystal Silicon
Professor Masoud Agah
ECE Department

2. Crystal Structure Solid  in crystalline and amorphous forms
Crystalline solids: constituent atoms of the solid are spatially arranged in periodic fashion.
Crystalline solid  single crystal or polycrystalline
Amorphous materials are devoid of long-range periodic structure.

3. Crystal Structure
Lattice: the periodic arrangement of atoms in a crystal
Unit cell: the smallest volume representing the lattice
Simple Cubic
(SC)
Body-Centered Cubic (BCC)
Face-Centered Cubic (FCC)

4. Crystal Structure Directions are expressed similar to vectors in [ ].
In a cubic lattice, [100] = [010] = [001]  <100>

5. Crystal Structure
Deriving Miller indices to define a set of parallel planes:
The intercepts of the plane with the crystal axes are found.
The reciprocal of the three integers are taken.
The smallest set of integers h, k, and l are found that have the same relationship to each other as the three reciprocals (1/4, 1/3, and 1/2 are converted to 3, 4, and 6). These integers are Miller indices of the plane, and the plane is labeled (h k l).
Equivalent planes are labeled as {h k l}.
In cubic cells, direction [h k l] is perpendicular to a plane (h k l).

6. Crystal Structure

7. Crystal Structure Silicon has a diamond cubic lattice.
The diamond lattice also contains four lattice points per unit cell but contains 8 atoms per unit cell.
The number of silicon atoms: 5x1022 atoms/cm3

8. SCS Manufacturing

9. SCS Manufacturing