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MEMs Sensors Max Tesch.

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Presentation on theme: "MEMs Sensors Max Tesch."— Presentation transcript:

1 MEMs Sensors Max Tesch

2 Common Uses Of MEMs Sensors
Hand-held Devices Automotive Industry Aerospace Industry Medical Applications

3 Types Of Sensors Inertial Sensors Gyroscopes Accelerometers
Compass Sensor Pressure Sensor Microphone

4 Accelerometers Measures linear acceleration Uses a “floating” mass Electric Potential Is measurable

5 Accelerometer Explained

6 Gyroscopes Measures angular acceleration Uses a “floating” mass Utilizes the Coriolis Effect

7 Gyroscope Explained

8 Compass

9 Microphone Uses capacitance to detect sound Soundwaves physically move a membrane Requires air flow to move membrane

10 Microphone Explained

11 Pressure Sensors Uses internal pressure as reference
Varying electric potential is measured Flex in membrane Changes resistance

12 Conclusion MEMs sensors are manufactured at a size in the micron range
Combine electrical properties to a mechanical operation Because of small output signals, they almost always require an IC to process data Uses a single crystal silicon structure because of preferred mechanical properties Change in electric potential is almost always the measurable variable for these devices

13 Sources


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