1. MEMs Sensors
Max Tesch

2. Common Uses Of MEMs Sensors
Hand-held Devices Automotive Industry Aerospace Industry Medical Applications

3. Types Of Sensors Inertial Sensors Gyroscopes Accelerometers
Compass Sensor
Pressure Sensor
Microphone

4. Accelerometers
Measures linear acceleration Uses a “floating” mass Electric Potential is measurable

5. Accelerometer Explained

6. Gyroscopes
Measures angular acceleration Uses a “floating” mass Utilizes the Coriolis Effect

7. Gyroscope Explained

8. Compass

9. Microphone
Uses capacitance to detect sound Soundwaves physically move a membrane Requires air flow to move membrane

10. Microphone Explained

11. Pressure Sensors Uses internal pressure as reference
Varying electric potential is measured
Flex in membrane
Changes resistance

12. Conclusion MEMs sensors are manufactured at a size in the micron range
Combine electrical properties to a mechanical operation
Because of small output signals, they almost always require an IC to process data
Uses a single crystal silicon structure because of preferred mechanical properties
Change in electric potential is almost always the measurable variable for these devices

13. Sources