1. Characterizing Multilayer Thin films
Ahsan Uddin

2. Characterization Methods
X Ray Diffraction
Transmission Electron Microscopy
X Ray Photoelectron Spectroscopy
Raman spectroscopy
Ellipsometry
X-ray Reflectivity (XRR)
Scanning Electron Microscopy (SEM)

3. Ellipsometry
Ellipsometry analyzes the dielectric properties of a supported ultrathin film
Usually, film thickness and/or optical constants (like refractive index) are qualities measured with an ellipsometer
Ellipsometry can be used to characterize
composition, roughness, thickness (depth), crystalline nature, doping concentration, electrical conductivity
very sensitive in the optical response

4. Transmission Electron Microscopy
EELS
X-ray detector
Electron beam
~ 0.1nm
XEDS and EELS
Scanning transmission electron microscopy (STEM)
Annu. Rev. Mater. Res :559–84 A.Genc- et al./Ultramicroscopy109(2009)1276–1281

5. Characterization of multilayer TiO2 /ZnΟ nanostructured thin films using Raman spectroscopy
OPTOELECTRONICS AND ADVANCED MATERIALS – RAPID COMMUNICATIONS Vol. 9, No. 5-6, May – June 2015, p

6. Characterization of Multilayer Thin Films by Laser- Induced Thermal Desorption Mass Spectrometry
ANALYTICAL CHEMISTRY, VOL. 59. NO. 24. DECEMBER 15,

7. Scanning Electron Microscopy (SEM)