1. Date of download: 11/14/2017
Copyright © ASME. All rights reserved.
From: Optimization of Gallium Nitride Metalorganic Chemical Vapor Deposition Process
J. Heat Transfer. 2015;137(6): doi: /
Figure Legend:
Cross section of reactor geometry [47]

2. Date of download: 11/14/2017
Copyright © ASME. All rights reserved.
From: Optimization of Gallium Nitride Metalorganic Chemical Vapor Deposition Process
J. Heat Transfer. 2015;137(6): doi: /
Figure Legend:
Effect of Vin on average deposition rate

3. Date of download: 11/14/2017
Copyright © ASME. All rights reserved.
From: Optimization of Gallium Nitride Metalorganic Chemical Vapor Deposition Process
J. Heat Transfer. 2015;137(6): doi: /
Figure Legend:
Deposition rate along the radius for different Vin

4. Date of download: 11/14/2017
Copyright © ASME. All rights reserved.
From: Optimization of Gallium Nitride Metalorganic Chemical Vapor Deposition Process
J. Heat Transfer. 2015;137(6): doi: /
Figure Legend:
Effect of Cin on average deposition rate

5. Date of download: 11/14/2017
Copyright © ASME. All rights reserved.
From: Optimization of Gallium Nitride Metalorganic Chemical Vapor Deposition Process
J. Heat Transfer. 2015;137(6): doi: /
Figure Legend:
Deposition rate along the radius for different Cin

6. Date of download: 11/14/2017
Copyright © ASME. All rights reserved.
From: Optimization of Gallium Nitride Metalorganic Chemical Vapor Deposition Process
J. Heat Transfer. 2015;137(6): doi: /
Figure Legend:
Schematic of the deposition profile over the wafer

7. Date of download: 11/14/2017
Copyright © ASME. All rights reserved.
From: Optimization of Gallium Nitride Metalorganic Chemical Vapor Deposition Process
J. Heat Transfer. 2015;137(6): doi: /
Figure Legend:
Pareto front for equal weight optimization problem in smaller domain

8. Date of download: 11/14/2017
Copyright © ASME. All rights reserved.
From: Optimization of Gallium Nitride Metalorganic Chemical Vapor Deposition Process
J. Heat Transfer. 2015;137(6): doi: /
Figure Legend:
Pareto frontiers in Fig. 10 represented in the design space

9. Date of download: 11/14/2017
Copyright © ASME. All rights reserved.
From: Optimization of Gallium Nitride Metalorganic Chemical Vapor Deposition Process
J. Heat Transfer. 2015;137(6): doi: /
Figure Legend:
Pareto front for optimization problem in Eqs. (10) and (11)

10. Date of download: 11/14/2017
Copyright © ASME. All rights reserved.
From: Optimization of Gallium Nitride Metalorganic Chemical Vapor Deposition Process
J. Heat Transfer. 2015;137(6): doi: /
Figure Legend:
Response surface: uniformity parameter, UP90

11. Date of download: 11/14/2017
Copyright © ASME. All rights reserved.
From: Optimization of Gallium Nitride Metalorganic Chemical Vapor Deposition Process
J. Heat Transfer. 2015;137(6): doi: /
Figure Legend:
Response surface: uniformity parameter, UP95

12. Date of download: 11/14/2017
Copyright © ASME. All rights reserved.
From: Optimization of Gallium Nitride Metalorganic Chemical Vapor Deposition Process
J. Heat Transfer. 2015;137(6): doi: /
Figure Legend:
Response surface: average deposition rate