1. Team Corrosion EE412 Week 3 Alex and Joey Mentor: J Provine

2. This Week Corrosion fundamentals Transparency mask layout
Fabrication/testing results so far

3. Corrosion fundamentals
Anode reaction:
Cathode reaction:
Oxidation and proton production at the anode
Hydroxide ions produced at cathode

4. Pourbaix diagram for Al
anode
cathode
Aluminum will corrode at the anode or cathode
-> coat with an inert, defect free dielectric
Al cathode reaction:
Not unique to metals or aluminum:
The ions matter: KCl = bad

5. Measurement Concept

6. Resistors: ~5 ohms (100nm Al)
Mold 20:1 PDMS to structure to form reusable, sticky gaskets
Multiple sizes in case larger/smaller structures don’t work (film defects or measurement resolution limits)
Minimum line width: 100um
Resistors: ~5 ohms (100nm Al)
5mm cleaving lanes shown

7. Fabrication and Testing Progress
Oxidized and coated test wafers
1um oxide, 100nm Al
Patterned, etched, and ALD coated another test wafer
100 cycles HfO2, 400nm thick Al

8. PDMS Gasket

9. Testing Setup
Edge of gasket
-5V V
GND
Testing area

10. Results

11. Unpassivated

12. Passivated

13. Up Next Order transparency mask Design of experiments
Check reference electrode size first
Design of experiments
Plan timing and start prioritizing
Pattern wafers and start ALD coating
AlO and HfO in April, ZrO in May