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Photon detection with CMOS sensor for fast imaging Jerome Baudot, IPHC Strasbourg in collaboration with IPN-Lyon R.Barbier, E. Chabanat, P. Depasse, W.

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Presentation on theme: "Photon detection with CMOS sensor for fast imaging Jerome Baudot, IPHC Strasbourg in collaboration with IPN-Lyon R.Barbier, E. Chabanat, P. Depasse, W."— Presentation transcript:

1 Photon detection with CMOS sensor for fast imaging Jerome Baudot, IPHC Strasbourg in collaboration with IPN-Lyon R.Barbier, E. Chabanat, P. Depasse, W. Dulinski, N. Estre, M. Winter PSD 2008, Glasgow, September 1-5 CMOS sensors for Min.Ion.Part. Single photon with EBCMOS First tests for biology

2 2 Photon detection with CMOS for fast imaging, PSD'08 Basic principle of CMOS sensors Technology Industry standard for ICs Require an “epitaxial layer” 10-20 m m thick Monolithic sensors Tow layers in a single object: sensing + reading-out Many integration advantages

3 3 Photon detection with CMOS for fast imaging, PSD'08 Basic principle of CMOS sensors Technology Industry standard for ICs Require an “epitaxial layer” 10-20 m m thick Monolithic sensors Tow layers in a single object: sensing + reading-out Many integration advantages Developments since 1999 Originated in IPHC-Strasbourg >30 sensors produced Including ~MegaPixels sensors of few cm 2 “Standard” performances for Single charge particle detection Analog readout of each pixel Techno. AMS 0.35 um OPTO Noise ~ 10-15 e- Signal/Noise (MIP) > 15 Efficiency ~ 100%, fake rate ~ 10 -5 /pixel Spatial resolution ~ 1 um (10 um pitch) -> 3 um (40 m m pitch) Room temperature operation

4 4 Photon detection with CMOS for fast imaging, PSD'08 Readout possibilities Readout speed Analog readout limited ~ ms for MegaPixels sensors Column parallel readout ~100-200 ns / column readout ~100 m s for 1000 rows Requires discrimination/ADC Digital readout

5 5 Photon detection with CMOS for fast imaging, PSD'08 Readout possibilities Readout speed Analog readout limited ~ ms for MegaPixels sensors Column parallel readout ~100-200 ns / column readout ~100 m s for 1000 rows Requires discrimination/ADC Digital readout Digital Mimosa serie: M8, 16, 22 Mimosa 22 (2007) 576x128 pixels, 18.4 m m pitch 100 m s readout time Suze 01 (2007) Zero-suppression logic only 64 columns treatment in 160 ns Validated with test patterns PRELIMINARY results from SPS beam test

6 6 Photon detection with CMOS for fast imaging, PSD'08 Sensitivity Low energy particles Electrons of few keV, Visible photons Short range in IC material: can't reach the sensitive volume ! Back-thinning (industrial process) + Post-processing of sensitive volume back-plane back-illumination

7 7 Photon detection with CMOS for fast imaging, PSD'08 Sensitivity Low energy particles Electrons of few keV, Visible photons Short range in IC material: can't reach the sensitive volume ! Back-thinning (industrial process) + Post-processing of sensitive volume back-plane back-illumination Back-thinned Mimosa 5 MegaPixel sensor with 17 m m pitch Back-tinning within SUCIMA project HV accelerated electrons bombarding applications for electron imaging not covered here G.Deptuch

8 8 Photon detection with CMOS for fast imaging, PSD'08 Photon detection g rays No efficiency, bu seeable X rays > 10 keV: no efficiency Few keV range % level efficiency Energy resolution ~ % 55 Fe, 5.9 keV Mimosa 18

9 9 Photon detection with CMOS for fast imaging, PSD'08 Photon detection g rays No efficiency, bu seeable X rays > 10 keV: no efficiency Few keV range % level efficiency Energy resolution ~ % Visible photons Std camera applications for visible light For much less intense source: back-illumination Back-thinned Mimosa 5 In-pixel focused infrared led (1063 nm) Still looking for applications 55 Fe, 5.9 keV ~900 e- Back-thinned Mimosa 5 Mimosa 18

10 10 Photon detection with CMOS for fast imaging, PSD'08 Single photon detection: EBCMOS A new hybrid photo-detector: Electron-Bombarded CMOS Sensor Use back-thinned Mimosa 5 1024x1024 pixels, 17 m m pitch Readout time 27 ms (~30 frames/sec) Combined with photocathode S20-type QE @ 532 nm ~ 15% Vacuum tube integration by PHOTONIS, first prototypes june 2007 EBMIMOSA-5

11 11 Photon detection with CMOS for fast imaging, PSD'08 EBCMOS performances Characterization @ IPN-Lyon Optical bench: focalized laser diode Photon-counting calibration PSF studies Performances Dark count rate 100 Hz/mm @ 10 C Spatial resolution 11.6 m m (@ 540 nm) Dynamic 1-30 photo-electrons/pixel

12 12 Photon detection with CMOS for fast imaging, PSD'08 EBCMOS performances Characterization @ IPN-Lyon Optical bench: focalized laser diode Photon-counting calibration PSF studies Performances Dark count rate 100 Hz/mm @ 10 C Spatial resolution 11.6 m m (@ 540 nm) Dynamic 1-30 photo-electrons/pixel Known problems Ion feed-back Back-scattering ~ 18% Low to moderate quantum efficiency (restricted wavelength bandwith)

13 13 Photon detection with CMOS for fast imaging, PSD'08 Fluorescence microscopy In life sciences Image cells/molecules in 3D+time dynamics Use fluorescent (all colors) proteins on defined targets Detector used: CCD: 2D but sensitivity limited EMCCD: 2D+single photon but speed limited (~30 frames/sec) PMT: single photon but not 2D Confocal microscop y Epifluorescenc e microscopy, if no pinhole

14 14 Photon detection with CMOS for fast imaging, PSD'08 Fluorescence microscopy Where can EBCMOS helps ? for single photon sensitivity for fast 2D imaging from 50 and beyond 1000 images/sec Decrease photodamage & photobleaching Observe a fast dynamic Build real-time 3D pictures In life sciences Image cells/molecules in 3D+time dynamics Use fluorescent (all colors) proteins on defined targets Detector used: CCD: 2D but sensitivity limited EMCCD: 2D+single photon but speed limited (~30 frames/sec) PMT: single photon but not 2D Confocal microscop y Epifluorescenc e microscopy, if no pinhole Spinning disk microscope

15 15 Photon detection with CMOS for fast imaging, PSD'08 EBMIMOSA-5 tests with biologists Biological samples from EBMIMOSA-5 operation by IPNL & IPHC IGBMC-Strasbourg, Angela Giangrande & Jean-Luc Vonesh Lilly root cells Latex beads (~100 nm) ENS-Paris, Maxime Dahan Quantum dots fixed on membranes of hela cells

16 16 Photon detection with CMOS for fast imaging, PSD'08 EBMIMOSA-5 tests with biologists Biological samples from EBMIMOSA-5 operation by IPNL & IPHC IGBMC-Strasbourg, Angela Giangrande & Jean-Luc Vonesh Lilly root cells Latex beads (~100 nm) ENS-Paris, Maxime Dahan Quantum dots fixed on membranes of hela cells Sensitivity / contrast Better than CCD Similar to EMCCD (for green fluorescence) Spatial resolution s of distribution after 30 frames and after microscope magnification 275 nm for EBMIMOSA-5 ( 145 nm with CCD of 6.5 m m pixel pitch) ZOOM zoom+filtering 3 indivual beads

17 17 Photon detection with CMOS for fast imaging, PSD'08 On-going developments CMOS sensor New chip LUCY fabricated in 2007 400x800 pixels, 10 m m pitch Analog readout on 8 outputs readout time 1 ms (1000 frames/sec) Std version OK (from 55 Fe test), noise~8 e- Back-thinned version expected Sept.08 Vacuum tube for EBCMOS Work on photocathode by Photonis to ↗ QE Reduced gap ~ 600 m m to improve spatial resolution Data acquisition 1 MegaPixels @ 40 frames/sec ~ 300 Mbits/s ! IPN-Lyon develops on-board (hit) analysis + Gbits/s PC-connection Goal: 1000 frames/sec on 320 kPixels (0.3 cm 2 ) Data analysis Various image treatments to be evaluated Filters Tracking

18 18 Photon detection with CMOS for fast imaging, PSD'08 Summary & outlooks CMOS sensors from single charged particle tracking Offer various sensitivity for photon imaging Low efficiency for X-rays but few% energy resolution @ few keV Single-photon when back-thinned + hybridized with a photocathode Offer fast readout with on chip signal treatment First applications expected: Single photon positionning with EBCMOS for fluorescence microscopy in biology Proof of principle passed Real measurement to come this year

19 19 Photon detection with CMOS for fast imaging, PSD'08 Thanks to IPN -Lyon Sylvain Vanzetto / Georges Maurelli / Rodolphe Della Negra / Cyrille Guérin / Didier Bon / Pierre-Yves Solane IPHC-Strasbourg Andrea Brognia / Auguste Besson / Claude Colledani / Rita De Masi / Guy Doziere / Christina Dritsa / Andrei Dorokhov / Gilles Clauss / Jean-Charles Fontaine / Mathieu Goffe / Abdelkader Himmi / Christine Hu / Kimo Jaaskelainen / Michal Koziel / Mathieu Goffe / Alexandre Merlin / Frederic Morel / Nicolas Pillet / Alexandre Shabetai PHOTONIS SA Henk Verboom / Patrick Clauzel /Carlo Kayser / Nicolas Laurent

20 20 Photon detection with CMOS for fast imaging, PSD'08 ! BACKUP SLIDES !

21 21 Photon detection with CMOS for fast imaging, PSD'08 CMOS charge collection principle

22 22 Photon detection with CMOS for fast imaging, PSD'08 CMOS analog readout principle

23 23 Photon detection with CMOS for fast imaging, PSD'08 EBCMOS characterization at IPN-Lyon XYZ 50X LWD Mitutoyo ebcmos

24 24 Photon detection with CMOS for fast imaging, PSD'08 EBCMOS contrast study / EMCCD EBMI5 Tint=27 msCascade 2 / EMCCD Tint=30 ms : Gmax=1000 C1C1 C2C2 C3C3 C1C1 C2C2 C3C3 C= (Imax- Imin)/(Imax+Imin) Imean = 7400 Imax=9400 Imin= 7300 C= 0,13 Imax=18000 Imin= 8000 C= 0,38 SNRmean = 30C3 SNRmax=48 SNRmin= 28 C= 0,26C2 SNRmax=175 SNRmin=45 C= 0,59C1 From R.Barbier & N.Estre

25 25 Photon detection with CMOS for fast imaging, PSD'08 Fluorescence microscopy applications PhotoActivated Localization Microscopy E.Betzig, Science vol 313, 2006 where 2D localization of single photons is required

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