1. TXZ Heated Gas Line and Hot Box Valve Replacements Spire

2. Chamber 2/3 Upper Process Gas Line and Final Gas Line Assembly

3. Chamber 3 Mid Process Gas Line

4. TXZ Hot Box Valve Replacements

5.  Spire has replaced the standard Swagelok valves used for the hotbox and final line with valves from Fujikin. These valves are rated at 80°C, vs. 65°C for the Swagelok valves.

6.  In an effort to remove sharp corners that can create cold spots for liquid to pool in and create a source for particles, the standard micro-fit 90° & 45° weld fittings can be replaced with sweeping bends. Spire will modify lines to meet the needs of our customers. Below is an example requested by some customers.

7. Using swept 90° bends allows for a tighter fit of the heat trace against the corners of the gas lines. This in turn allows for a more uniform heating of the gas line assembly, and decreases the chances of developing cold spots, where TDMAT can build up and cause particle failures.

8. Testing  Spire will helium leak check all gas lines and valve assemblies to verify integrity.  All heated lines are heated to process temp and all TCs tested for functionality, as well as to verify constant temp across the assembly.