The roots of innovation NID Objective To develop novel devices and systems for information processing or storage with critical dimensions in the nanometer regime, that are scalable to ultra high level integration.

The roots of innovation MotivationMotivation MELARI (Microelectronics Advanced Research Initiative) –Physical, engineering and financial limits –CMOS showstoppers visible (Power density, interconnects, lithography, etc.) NID (Nanotechnology Information Devices) –alternative to the limits of evolutionary “shrink” technology –support for the next wave of innovation (Quantum devices/circuits, manufacturing at the molecular scale by self- assembly, etc.) –address also non CMOS applications

The roots of innovation Current NID projects

The roots of innovation AttributesAttributes The devices and systems should have potential for high performance, driven either by new applications or by the “post CMOS” era n power consumption n operation speed n input/output compatibility n robustness n defect tolerance n etc. Responding to the research needs as specified in ITRS for the year 2011 onwards. Applications with new functionality, such as hybrid systems that would integrate optical devices, logic elements, radio frequency modules, etc. in a single system

The roots of innovation Two Action Lines 1. Beyond CMOS Silicon Compatible Devices 2. Molecular Computing Proposals for training of for shared nanofabrication facilities, or other relevant nanotechnology infrastructure are welcome in both action lines

The roots of innovation n Novel architectures for information processing systems, adequate for nano-scale implementation – Issues: fault-tolerance, self-test, topological regularity, local power, parallelism, general purpose vs. application-specific,... n Novel devices at the level of a logic gate, memory cell, or elementary processor – What molecules, atoms, or nano-structures? – Issues: scalability, RT operation, interconnects, interfaces to the macroscopic world, low power n Nanofabrication tools and techniques for the fabrication of structures with critical dimensions below 10 nm – Combination of techniques from biology, biotechnology and chemistry with surface patterning and SPM – Issue: cost!

The roots of innovation FOCUS A: Beyond CMOS, silicon compatible devices n Aim: Proposed devices and circuits should be expected to be superior to “ultimate CMOS” n Implementation: Devices might be either –implemented through concepts such as interband tunnelling devices, single electronics, 3D approaches, sub-20nm gate ballistic devices, etc –or of hybrid nature integrating magnetic, superconducting or other effect with a Si-interface

The roots of innovation FOCUS B: Molecular Computing n Aim: Novel devices and systems operating at the atomic or molecular scale. Hardware implementations of predefined architectures using molecular scalable devices at the level of a logic gate or memory cell. n Implementation: can be based upon chemical, electronic, photonic, biological and/or mechanical principles.

The roots of innovation The way ahead n 15 January 2001: –Publication of the NID call for proposals –Option to submit “pre-proposal” with short description of the proposed work n 1 March 2001: –Deadline for receiving “pre-proposal” –response to “pre-proposal” two weeks later. n 25 April 2001: –Deadline for submitting full Proposals

The roots of innovation InformationInformation

MELARI 1996: projects CHARGE: Coulomb blockade applied to the realisation of electronics FASEM: Fabrication and architecture of single electron memories QUEST: Quantum electronics using STM-based lithography SIQUIC: Silicon quantum integrated circuits QUADRANT: Quantum devices for advanced nanoelectronic technology LASMEDS: Laser fabrication of elementary molecular electronic devices NANOWIRES Conductance characteristics and mass fabrication of nanoscale IC nanowires SPIDER: Spin-dependent nanoelectronics RSFQ-HTS: High temperature superconducting single flux quantum logic

The roots of innovation MELARI 1998: projects LOCOM : Logic circuits with reduced complexity based on devices with higher functionality ANSWERS : Autonomous nanoelectronic systems evaluation, simulation and design NANOTECH : Nano-imprinting technique for large area mass production of nan-scale patterns SPINUP : Semiconductor processing by imprint of ultra-small patterns Q-SWITCH : Electron waveguides for low power switching

The roots of innovation NID 2000: projects Nanomem: Semiconductor free nanoscale non-volatile electronics and memories based on magnetic tunnel junctions Nanolith: Arrays of microguns for parallel e-beam nanolithography Chanil: Nanoimprint based fabrication of charge sensing devices for information processing Cortex: Design and construction of elements of hybride molecular / electronic retina cortex structure Saneme: self assembly of functional nanscale elements for intra- molecular electronics Bioand: Biomolecule driven assembly of nanoparticle based electronic devices Bun: Bottom-up Nanomachines DNA-based electronics

The roots of innovation NID 2000: projects Saturn: Self Assembly with nanotubes: towards devices for information processing Nanomol: Manufacturing and modelling of nano-scale molecular electronic devices NanoMASS Nanoresonators with integrated circuitry for high sensitivity and high spacial resolution mass detection NanoTCAD Nanotechnology Computer Added Design Nice Nanoscale Integrated Circuits using Endohedral fullerenes Atoms Assembler tool for molecular structures Fracture Nanoelectronic devices and fault-tolerant architectures Dew Double electron waveguides

The roots of innovation Overview nanotech related activities IST programme (1) Future and Emerging Technologies "Nanotechnology Information devices” (IST 2001 FET VI.2.1) Silicon compatible devices, whose performance is expected to be superior to "ultimate CMOS". Molecular computing: Novel devices and systems operating at the atomic or molecular level on the basis of chemical, electronic, photonic biological and / or mechanical principles. Call 15 Jan Deadline 25 April 2001 EC contactperson: Ramon Compano helpdesk:

The roots of innovation Overview nanotech related activities IST programme (2) Future and Emerging Technologies "Open Domain” (IST 2001 FET VI.1.1) Long term or high risk nanotechnology related research that is not covered by other IST action lines. Open guichet EC contactpersons: Jakub Wejchert & Kostas Glinos helpdesk: Jakub Wejchert Kostas

The roots of innovation Overview nanotech related activities IST programme (3) Cross Programme Action "Next generation micro and nano-technologies” (IST 2001 V CPA 10) Micro- and nanotechnologies for highly integrated miniature applications. Target areas include life sciences, heath, environmental and communications systems. Call expected June 2001 Deadline October 2001 (draft IST workprogramme 2001) EC contactperson: Dirk Beernaert helpdesk:

The roots of innovation Overview nanotech related activities IST programme (4) KA IV Microelectronics Technologies” (IST 2001 IV.8.2 & IV.8.3) Within 8.2: Device, process and material integration challenges on a nanoscale anticipated for the microelectronics technologies planned for industrialisation in the next 8-12 years. Within 8.3: optoelectronic technologies with a planned 5 to 10 year industrial impact. Low cost, manufacturability and scalability for large computational and communication bandwidths Call expected June 2001 Deadline October 2001 (draft IST workprogramme 2001) EC contactperson: Rainer Zimmermann helpdesk:

The roots of innovation Overview nanotech related activities IST programme (5) KA IV Microsystems (IST 2001 IV.7.2) Multifunctional intelligent micro- and nanosystems to integrate and to validate these in real application systems Call 15 January 2001 Deadline 25 April 2001 EC contactperson: Dirk Beernaert helpdesk:

The roots of innovation Overview nanotech related activities Quality of Life (QoL) programme KA3 (3.3.1) "Exploiting the cellular and molecular characteristics of organisms for new nano- and microtechnologies" or areas relevant to the initiative of "Genome Research for Human Health" Nanobiotechnology covering both the applications of new scientific tools to biological systems and the use of biological systems as tools in the development of new products and technologies. Studies will be at the level of molecules, the coupling of molecules and cells to natural and synthetic surfaces and the functional structures. Call launched: 15 Nov Deadlines 15 March 2001, 18 October 2001 EC contactperson: Alfredo Aguilar Romanillos helpdesk: Aguilar

The roots of innovation Overview nanotech related activities Growth programme KA1 Innovative products, processes and organisation Micro and nano systems Call launched 14 Dec Deadline 15 May 2000 Generic Activities 1A Materials and their technolgoies for production and transformation One of the principal objective of the GA 1A refers to research at nanoscale, such as LEDs, lasers, GMR and magnetic storage, nano-carbon, polymer (opto)electronics, nano-powders, catalysis, nano-composites, coatings, biological compatibility, microscopes, biosensors. Call launched 14 December 2000 Deadline 15 May 2000 Generic Activity A2 Measurement and Testing Area 6.1.3: Research for instrumentation for improvement of quality. Area Measurement and testing methodologies in support for quatlity - projects on nanoscale inspection and analysis are welcome. Call launched 14 December 2000 Deadline 15 March 2000 EC contactpersons: Heico Frima - Paolo Salieri - Ben Tubbing FrimaPaolo Salieri Ben

The roots of innovation Overview nanotech related activities Improve programme Research Training Networks To promote training through research, especially of young researchers at pre-doctoral and at post-doctoral level, within the frame of high-quality trans-national collaborative research projects, including those in emerging fields of research Call launched: 15 Dec Deadline: 4 May 2001 EC contactperson: Francis du Bois de Vroylande helpdesk: du Bois de