Nanotechnology Symposium

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3 Theory and structure Specifications How to use / select Applications

4 Theory and structure

5 What is a Linear Shaft Motor? It is a direct drive linear brushless servomotor!

6 Linear Servomotor Classification Linear Induction Motor (LIM) Linear Pulse Motor (LPM) Linear DC Motor (LDM) --- Voice Coil Motor Linear Synchronous Motor (LSM) –Flat type With core Coreless –Cylindrical type With core Coreless ---- Linear Shaft Motor

7 Output Efficiency F - V S605Q Specification Curve Actually, linear F-V curve is a characteristic of DC motor. Force Velocity Curve Published Continuous Force Published Peak Force

8 Synchronous Motor F vs. C

9 Design Concept Simple High precision Non-contact

10 Design Concept: Simple US Patent 06,040,642 US Patent A

11 Design Concept: Simple Magnetic field distribution Simulated by FEMActual

12 Linear Shaft Motor Principle Flux Force Current Fleming’s law

13 Design Concept: High Precision –Coreless design –No iron in forcer or shaft –No cogging –Stiff design The coils themselves are the core, thus the stiffness of an iron core design

14 Design Concept: Non-Contact Large Air Gap 0.5mm to 1.75mm nominal annular air gap Non-critical No variation in force as gap varies over stroke of device

15 Coil Magnetic Flux (a)Flat type Ineffective use of flux (b) Cylindrical type Effective use of flux Only upper side flux is effective All flux is effective Magnets Coil Design Concept: Non-Contact

16 Linear Shaft Motor N S S N N S S N N S S N Core(Iron ） Back York(Iron) Coil Magnet Absorption Force No influence by change of gap Linear Motor Cogging by concentration of flux

17 Comparison of Linear Motors Linear Motor Type Flat & Cylindrical type with core Coreless Flat Coreless Cylindrical Linear Shaft Motor OutputHighLowHigh StiffnessHighLowHigh Adsorption force Very HighNon Result of adsorption force Need more space for assembly No effect CoggingLargeNon

18 Theory and structure Specifications

19 Largest Linear Shaft Motor S1000T

20 Longest Linear Shaft Motor S427Q 4600mm （ 15’ 1” ） Stroke

21 Smallest Shaft Motor S040: Diameter 4mm(0.16) Width 10mm(0.4”) Stroke 30mm(1.2”) 10 cycle/sec

22 Maximum velocity: 6.3 m/sec (20.7 ft/sec) Motor: S435Q Maximum velocity: 6.3m/sec Acceleration: 13.5G Payload: 20kg (44lbs) Stroke: 800mm 2’7” High speed drive Encoder: Heidenhain Resolution: 1µm Driver: Servoland SVDM 40P Guide: LM guide

23 Velocity fluctuation is under 1%. Slow speed drive Motor: 2-S160T in parallel Maximum velocity: 8 µm /sec Payload: 25kg (55 lbs) Encoder: Heidenhain Resolution: 10 nm Driver: Delta Tau P-Mac Guide: Air bearing

24 Acceleration: 20G (198 m/sec 2 ) Motor: S435Q Maximum velocity: 5m/sec Acceleration: 20G Payload: 1.7kg (4 lbs) Encoder: Mitsutoyo Resolution: 0.5 µm Driver: Servoland SVDM 40P Guide: LM guide Acceleration

25 Motor: S160T Velocity: 1m/sec Acceleration: 1G Payload: 3kg (6.6lbs) Stroke: 800mm Encoder: Heidenhain Resolution: 0.1µm Driver: Servoland SVDM 2P Guide: LM guide There is no overshoot. And positioning is 0.1 micron. High speed positioning

26 Stage: GTX 250 Motor: S200Q Velocity: 100mm/sec Acceleration: 1G Payload: 25kg (55 lbs) Velocity fluctuation is under 0.006%. Encoder: Heidenhain Resolution: 0.1µm Driver: Servoland SVDM 5P Guide: Air bearing Velocity fluctuation medium speed

27 Velocity fluctuation is under 0.01%. Velocity fluctuation very slow speed Motor: 2-S160T in parallel Maximum velocity: 8 µm /sec Payload: 25kg (55 lbs) Encoder: Heidenhain Resolution: 10 nm Driver: Delta Tau P-Mac Guide: Air bearing

28 No overshoot No backlash 5 nanometer step motion Motor: 2- S320D in parallel Payload: 25kg (55 lbs) Guide: Air bearing Encoder: Heidenhain Resolution: 1 nm Driver: Delta Tau P-Mac

29 Parallel Motor Example

30 Following error is very small. Maximum following error is under 100 nm. Red line: command velocity Blue line: actual velocity Following error Parabolic move Constantly changing velocity Stage: GTX 250 Motor: 2-S160T in parallel Maximum Velocity: 3mm/sec Payload: 10kg (22 lbs) Encoder: SONY BS78 TS13 Resolution: 0.14nm Driver: P-Mac U-mac system Guide: Air bearing

31 Summary Linear Shaft motor’s capabilities Maximum force36000N (S1150T) Smallest motor S040D 25x10x10mm Longest stroke4.6m (15’ 1”) Fastest speed6.3m/sec (21ft/sec) Slowest speed8 µm/sec Maximum acceleration20G Velocity fluctuationunder 0.05% Finest resolution70pm ( µm)

32 Theory and structure Specifications How to use / select

33 Table Forcer (coil) Linear encoder Linear Guide Cable carrier Shaft Support How to construct? Linear Shaft Motor

34 Linear Shaft Motor Linear guide Table Encoder Shaft Support Actual stage (Moving Forcer)

35 Shaft motor Cross Roller Bearings Table Encoder Shaft Support Actual stage (Moving Shaft)

36 Operating Conditions Linear Shaft Motor Selection

37 Calculations In these equations, “ μ ” is the coefficient of friction on the guide. "g" is as the acceleration of gravity. g = 9.81 m/sec2 Continuous Force => F eff Peak Force => larger F a or F d Linear Shaft Motor Selection -

38 Acceleration time 0.15s Const. speed period 0.6s Deceleration time 0.15s Dwell time 0.1s Mass ( Load & Forcer ) 25kg Speed 1.5m/s Duty 34 % Acceleration 10m/s 2 Acceleration force 250N Temperature rise is 38 ℃ Linear Shaft Motor Selection

39 System input Move input Motor Selection Create Data Sheet Create Move Data Move data updated LSMART Motion Profile Motor Suggestions Motion Calculator Application testing

40 Motion Data Motion & Force Profile Linear Shaft Motor Data Suggested Part number Amplifier and Encoder sizing data LSMART Data Sheet Force Duty Force Velocity

41 Advantages of Linear Shaft Motor The ability to use commercially available servo drivers. Higher speeds are able to be achieved while retaining high precision. –At the same time, extremely high precision low speed uniformity and high repeatability are possible. Because of the non-contact design, no lubrication or adjustment necessary. Very simple setup and operation time. No need for extended burn in. Simple alignment and QC period. Eco-friendly - no noise, no dust. Energy efficient, - power requirements are lower then that of ball screw systems. （ In comparison to types of liner motion ）

42 Theory and structure Specifications How to use / select Applications

43 World Wide Markets Served by Linear Shaft Motor

44 Inspection machines HDD LCD PCB 3D Microscope Semiconductor Other

45 Machining Milling Machine Grinders Press EDM Machining center Laser machine Wire cut EDM Other

46 Manufacturing equipment LCD Boiling machine Injection Stage Eject robot Handling Semiconductor before process Semiconductor after process Bonding Surface mounter Organic Electroluminescence (OEL) Display Robot Other

47 Other applications Office Automation Medical Printer Machine parts Health Automatic sliding doors Food handling Fiber Research Other

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