RFID Shelving ARD Presentation: 11 Dec 2006 Guy Shtub Idit Gershoni

Introduction  A Fab is a factory where integrated circuits devices are manufactured.  Fab 18 - Intel’s 200mm Fab located in Kiryat Gat, Israel.

Some basic terms Reticle - An optical template inserted into the manufacturing machines in the Lithography area. RFID – Radio Frequency identification is a technology that uses devices attached to objects that transmit data to a (RFID) receiver. Alternative to bar coding. Its advantages include data capacity, read/write capability, and no line-of-sight requirements. RFI D chip Reticl e Lithography = The process of imprinting patterns

About the Fab and the Process The production process for a single silicon wafer can take as much as a few months. In some areas of the clean room, when a wafer is handled by a machine, a reticle is placed into the machine by a technician. Wafer Wafer = silicon slice (raw material)

Current Situation (1) Until recently, reticles were automatically stored and transported between the storage room and the working stations. This ensured that the technician could not make an error in placing a different reticle then the one needed. Such an error could infect many silicon wafers and as a result, cause severe financial damage to the company.

Current Situation (2) “Railway” Tracks in the clean room’s ceiling A single lot Being transported Lot = pack of 25 silicon wafers

The Problem Recently Intel’s Fab18 started using a new manufacturing technology. For this technology new reticles are used. The new reticles are larger and don’t fit in the old reticle storing and transportation system. The technicians manually bring the reticles from the storage room to the work stations. Human errors can occur. No control. The project aims at preventing critical human errors from occurring.

The Solution RFID technology. RFID tags that will be used: Passive RFID employee tag. RFID tag that will be placed on the reticles. The reticles will be stored in the 3rd party shelves (Cabinet). When a technician needs a reticle an order is made. If the order is for a reticle that cannot be transferred through the automatic conveyer system our system will come into action.

The solution – step by step A technician goes to storage room through the gate. The gate contains an RFID reader that reads the technicians employee tag. The system will identify the employee, link the data to the specific order, and indicate the correct POD (cell) where the reticle is placed. When a reticle is taken or inserted into a POD, a placement sensor will recognize the change. The reticles will be identified by using a RFID reader placed in each POD.

The solution – The Shelves This is How it will look??

System Component Architecture Built from scratch 3 rd party hardware Existing components

Functional Requirements(1) Reticle insertion to the Cabinet Identifying a technician going to the reticle shelves. Allowing a technician to place a reticle in an empty space. Providing positive acknowledgement when the employee RFID is read. Read RFID tags from a reticle and send it to the PDA Reticle information will be stored in the RTS and PAS.

Functional Requirements(2) Reticle removal from the Cabinet Enabling a technician to order a certain reticle via the MTUI system. Verify that the reticle exists and currently stored inside the cabinet. Approve a technician’s request, and keeps the information in the RTS and PAS systems. Automatically recognize a technician passing through the gate. Cabinet beeps, blinking the LED in the shelf where the required reticle is stored. When the desired reticle is removed, the cabinet beeps again. Information regarding the specific reticle that was removed and the employee will be sent to the PDA and from there to the Control System. This information will be stored in the RTS and PAS databases.

Functional Requirements(3) Update reticle data in the system The operator will be able to place a reticle in the association station RFID reader. System will read the reticle’s RFID value and displays it to the operator. The operator will be able to insert the required information into the PAS and RTS database, by using the PAS GUI. Data will be written to the reticle RFID tag using the RFID writer.

Non Functional Requirements (1) Speed, Capacity & Throughput: Technician identification process at the gate will take up to 2 seconds. In 95% of the cases, the system will succeed in reading & identifying the employee passing through the gate. In the rest of the cases the system will indicate the identification failure. The system will never falsely identify a technician. If a technician removes a wrong reticle (different than the one ordered), the system will indicate wrong action within 2 seconds. Only one person can pass through the gate at a time.

Non Functional Requirements (2) Safety & Security: The system is an internal organization system. The data does not need to be encrypted. No cryptographic protocols will be used. Availability: – Being part of the manufacturing floor the system will work around the clock. – The system will be available 98% of the time.

Non Functional Requirements (3) Usability: Technician will use the system without any learning. The usage of the system is based on previous knowledge they posses. The system operator will require about a day to learn how to operate the system.

Use Cases

Use Case 1 : Name: Reticle insertion to the Cabinet Description: Technician inserts a reticle into a POD of a shelf. Post-Condition: Reticle is identified & placed in a POD.

Use Case 1 :

Name: Reticle removal from the Cabinet Description: Technician places an order for a reticle, goes to the shelves and gets it. Post-Condition: Technician receives the desired reticle. Use Case 2 :

Name: Update reticle data in the system Description: System Operator needs to define a new reticle in the system, or update data for existing reticle. Post-Condition: Reticle information is updated. Use Case 3 :

Risks The success of the project depends (among other things) on 3 rd Party company.

The End Questions?

Thank You