Inert Atmosphere Systems in OLED Research and Fabrication Copyright, 1996 © Dale Carnegie & Associates, Inc.

Inert Atmosphere System - Definition: An enclosure that provides a non reactive work area for processing materials sensitive to oxygen and/ or water. The system may be a single work-station or multiple work-station glove box or a large enclosure for automation of air sensitive processes. Inert Atmosphere: < 1 PPM oxygen and water

Typical Research Systems Single work station glove box

Typical Research Systems Multi station glove box

Inert Atmosphere Systems - Components: Enclosure or Glove Box - The work area Airlock or Antechamber - entry and exit from glove box Recirculating gas purifier - maintains inert conditions Pressure control - Maintains safe pressure Instruments - Monitor the environment

Applications in OLEDs Material Research Vapor Deposition of Metal Oxides and Polymers Polymer Deposition by Spin Coating Deposition by Printing Processes Sealing- Epoxy/UV Curing and LASER Welding Automated Pilot Production Facilities

Material Research - New Compound Synthesis Synthesis of light emitting polymers and small molecule organics. TFT polymers Substrates - both glass AND plastic Plastic barrier and sealant formulation Characterization - Voltammetry and probing stations

Glove Box Accessories for Research Cold Storage Unit - for temperature sensitive materials Cold Well - for low temperature synthesis Vacuum Oven - bake out water/volatiles from materials Mini-antechamber - Rapid transfer of small items Various Interface Assemblies - connect the glove box environment to the outside world

Applications in OLEDs Material Research Vapor Deposition of Metal Oxides and Polymers Polymer Deposition by Spin Coating Deposition by Printing Processes Sealing- Epoxy/UV Curing and LASER Welding Automated Pilot Production Facilities

Thermal Vapor Deposition of Metal Oxides and Polymers Integrated Glove Box/Vapor Deposition Systems “Outboard” Deposition Systems- connected to glove box

Integrated Glove Box/ Vapor Deposition Systems Multi source system with glass bell jar

Integrated Glove Box/ Vapor Deposition Systems Multi source system with glass bell jar. Another view.

Integrated Glove Box/ Vapor Deposition Systems Custom system with stainless deposition chamber integrated in laminar flow glove box

“Outboard” Deposition System - Integrated with glove box

Applications in OLEDs Material Research Vapor Deposition of Metal Oxides and Polymers Deposition by Spin Coating Deposition by Printing Processes Sealing- Epoxy/UV Curing and LASER Welding Automated Pilot Production Facilities

Polymer Deposition by Spin Coating Integrated glove box/ spin coater

Applications in OLEDs Material Research Vapor Deposition of Metal Oxides and Polymers Polymer Deposition by Spin Coating Deposition by Printing Processes Sealing- Epoxy/UV Curing and LASER Welding Automated Pilot Production Facilities

Deposition by Printing Processes Laminar flow glove box- “Clean room in a glove box.” This view shows the clean room filter at top of box

Laminar flow glove box- “Clean room in a glove box.” View showing perforated floor and return plenum

Applications in OLEDs Material Research Vapor Deposition of Metal Oxides and Polymers Polymer Deposition by Spin Coating Deposition by Printing Processes Sealing- Epoxy/UV Curing and LASER Welding Automated Pilot Production Facilities

Sealing - Epoxy/UV Curing and LASER Welding Proper integration of curing stations requires external UV source and quartz window for UV transmission into glove box. LASER Sealing processes may be adapted from other industries.

Applications in OLEDs Material Research Vapor Deposition of Metal Oxides and Polymers Polymer Deposition by Spin Coating Deposition by Printing Processes Sealing- Epoxy/UV Curing and LASER Welding Automated Pilot Production Facilities

Automated Pilot Production Roll to roll manufacturing within an inert atmosphere enclosure