中華系統性創新學會 The Society of Systematic Innovation copyright © D. Daniel Sheu & Hou Chun Ting Self-closing Embedded Slit-valve ( 內坎自閉式機台閘閥 ) Dongliang Daniel Sheu Chun Ting Hou National Tsing Hua University, Depart. of I.E. ( 清華大學工工系許棟樑、侯俊亭 ) ; Patent filed 2011/2 1

2 中華系統性創新學會 Society of Systematic Innovation copyright © D. Daniel Sheu & Hou Chun Ting Structure of Slit-valve Case background(Slit-valve position) IOC1IOC2 Transfer Module Process Chamber Process Chamber Process Chamber Slit-valve (Gate Valve) IOC: Input Output Cassette

3 中華系統性創新學會 Society of Systematic Innovation copyright © D. Daniel Sheu & Hou Chun Ting Case background(option of Slit-valve) Slit Valve down Cover plate move left To cover O-Ring Slit-valve Closing operation: 1.Slit-valve push down T-Bar to bottom 2.Cover plat move left press on Chamber wall slit O-ring, and it finish closing operation. (Vice versa) T-Bar Cover plate O-ring

4 中華系統性創新學會 Society of Systematic Innovation copyright © D. Daniel Sheu & Chun Ting Hou Slit-valve Exploded diagram Slit-valve had many parts ， many potential risks itemParts Name 1 Air pressure cylinder assembly （ left ） 2 Air pressure cylinder assembly （ right ） 3Piston assembly 4 Slit-valve （ S.V. ） Bellow/ G.V. Bellow 5Sliding guide assembly 6Cover assembly 7Connecting bar assembly 8Cover the bottom of S.V, 9Piston fixed block 10T Bar 11 Slider （ Angle plate ） 12 Upper and lower cover assembly 13~17Hexagon screws 18Cover

5 中華系統性創新學會 Society of Systematic Innovation copyright © D. Daniel Sheu & Chun Ting Hou Problem Point Break due to Stress concentration The pins of the guiding block assembly (# 5 Sliding guide assembly) cracks due to stress concentration causing uneven movements. Cause un-even movement of valve rubbing on O- ring and producing particles on wafer => defects.

6 中華系統性創新學會 Society of Systematic Innovation copyright © D. Daniel Sheu & Hou Chun Ting Current Slit-valve solution Issue parts #5 (using separation principle) Note: The original solution can assume an average distribution of the stress points in the interface surface, and enhance the life of parts used. Current Improvement by company: Because of more contact surface, it is hoped that the stress concentration can be eased. However, after prolonged operations, the same problem will occur again. Because of more contact surface, it is hoped that the stress concentration can be eased. However, after prolonged operations, the same problem will occur again. Using inserted longer pin to obtain bigger contact surface => Reduce stress concentration.

7 中華系統性創新學會 Society of Systematic Innovation copyright © D. Daniel Sheu & Hou Chun Ting Trimming Process We Used Function Analysis CECCA Key Disadv. Trimming Trimming Model (Model of Solution) Specific Solution K/E DB  Resource Matrix  Invented Principle

8 中華系統性創新學會 Society of Systematic Innovation copyright © D. Daniel Sheu & Chun Ting Hou Cause-Effect & Contradiction Chain Analysis Particles on wafer OGHFPara. 31 Sore pt: Target Disadv. Key Diadv O-ring generate particle OGHFPara. 31 friction on O-ring Loss of substanc e Para. 25 Uneven covering plate closing Area of stationary object 6 Steam holder of module ping broken Reliability3535 Aging O-ring Reliability35 abrasion resistance of O- ring is insufficient Durability of action of stationary object 13 stress concentration Strength20 Insufficient Strength of materials is Stress/ pressure 19 Structure of Sliding guide assembly Shape9 - Stress concentration and the structure design of sliding guide assembly is the key disadvantages. This is the core sore point. - The breakage of sliding guide assembly was due to the force exerted by the Piston Assembly – Problem maker => Trim Easy manufacturing Manufacturability41 C A OC -+

9 中華系統性創新學會 Society of Systematic Innovation copyright © D. Daniel Sheu & Hou Chun Ting FA (10) T Bar (5) Sliding guide assembly (5) Sliding guide assembly (4) Slit-valve (S.V.) Bellow (4) Slit-valve (S.V.) Bellow (18) Cover assembly O-ring Object Main Tool (MF) Cover Move Push (8) Cover the bottom of S.V. (8) Cover the bottom of S.V. (3) Piston assembly (left) (3) Piston assembly (left) (1) Air pressure cylinder assembly （ left ） (1) Air pressure cylinder assembly （ left ） (11) Slider （ Angle plate ） (11) Slider （ Angle plate ） support Move connect (7) Connecting bar assembly (7) Connecting bar assembly connect (9) fixed block (9) fixed block hold Move support Air Support Block (3) Piston assembly (right) (3) Piston assembly (right) (2) Air pressure cylinder assembly （ right ） (2) Air pressure cylinder assembly （ right ） Move means Slit- valve mechanism Move Air Block Damage Uneven force damage Hold Damage Chamber wall Function Analysis of Slit-valve under abnormal situation

10 中華系統性創新學會 Society of Systematic Innovation copyright © D. Daniel Sheu & Hou Chun Ting Final Trimming Model Cover assembly O-ring ObjectMain Tool Main Functioncover Rule C, (1) Something can move Cover assembly Air support block Hold Rule B, (2) Cover assembly can service itself? Fundamental Function needed: Move Solid Chamber wall Trimming Problem: ■ How can I make Cover assembly close and Tighten the door by itself? Are there any resources? After subsequent series of systematic trimming process

11 中華系統性創新學會 Society of Systematic Innovation copyright © D. Daniel Sheu & Chun Ting Hou Function Oriented Search/ Knowledge Effect Database- Existing Ways to Moves Solid Bird's Beak Effect Electrets Gravity Reuleaux triangle Boundary Layer Entrapment electromagnetic induction HyperboloidShape Memory Effect BrushesElectrophoresisInertia Spiral Coanda Effect Electrostatic FieldIon ConductivityThermophoresis Corona DischargeExplosionMagnetic Explosion Torque Oscillator Coulomb's Law Ferro-magnetism Mobius StripTriboelectricity DesorptionFluidizationPascal's LawVibration DiamagnetismFriction, Diffusion Photophoresis(Differential) Pressure Dopant SegregationFunnel EffectResonance … Best to use existing resources. => Gravity & Vacuum

12 中華系統性創新學會 Society of Systematic Innovation copyright © D. Daniel Sheu & Hou Chun Ting When most time Valve is closed (Normal case) When Most time valve is open (Opposite case) Rule B 1 +Rule B 2 B1 ： Close Valve by Gravity B2 ： Tighten Valve by existing Vacuum Rule C 1 +Rule C 2 C1 ： Close Valve by Electromagnet C2 ： Tighten Valve by Electromagnet Rule C 1 +Rule C 2 C1 ： Open Valve by Electromagnet C2 ： Loosen Valve by Electromagnet Rule B 1 +Rule B 2 B1 ： Open Valve by Gravity B2 ： Loosen Valve by existing Vacuum Integrating Solutions Close Valve Tighten Valve Integrating 4 possible solutions for Open/Loosen & Close/Tighten valve, Choose the best compatible set: Consider: The great majority of time (80~90%), Slit valve is closed for chamber processing. Best solution indicated in the table below. If it is the other way around, simply switch solution for best energy saving. (Right column) Open Valve Loosen Valve

13 中華系統性創新學會 Society of Systematic Innovation copyright © D. Daniel Sheu & Hou Chun Ting Original case vs. case Solution(1) Original case: - 18 Components / external valve - Use mechanism to implementation the two- dimensional movements of the slit valve. - Need large space, and the original problem will happen after a period of time. Our Solution (1): - 3 components / embedded valve - Electromagnetism to implementation the two- dimensional movement of the slit valve. - Substantial reduction of space, the original problem will not appear again. (Designed out) (Ferro-material)

14 中華系統性創新學會 Society of Systematic Innovation copyright © D. Daniel Sheu & Hou Chun Ting Benefits of this solution Savings: 95% of the component cost, 80 + percent of the part count. 99% Energy savings. (needs only 1% of original energy level.) Item BeforeAfterImprovement (%) Original Solution Component1820(18-20)/18=-11.1% Counts System cost229,00080,000NA Energy savings120 Energy to maintain 6 kg*20 (min) Our solution Component183(18-3)/18=83.3% Counts System cost229,000<10,000( )/ =95.6% Energy savings121.2from 6 (kg)* 20 (min) Full Cycle to 0.6 (kg)* 2 (min) Only opening pulse 1.The service cost of the original solution is 80K on overhaul, and price for new system is 229K. 2.Slit-valve : ‘Open’ for about 2 minutes, and the whole cycle is about 20 minutes. 3.Slit- valve use electrical pulse only during “open” status. (1/10 of the time) 4.(1/10 energy level during application) => need only 1% of original energy level.

15 中華系統性創新學會 Society of Systematic Innovation copyright © D. Daniel Sheu & Hou Chun Ting Advantages of the solution (1) Advantage of the solution (1) Eliminate the defects caused by O-Ring particles permanently by system re-design. Use existing gravity & pressure differential to close and tighten the valve save additional components. (Take advantage of existing Resources) Significantly reducing the number of parts more than 80 %. Save more than 95+% component costs, and Energy Savings 99.9% Slit-valve embedded in the Chamber wall, can saving space thus materials and costs. Allowing voids inside the cover plate to further reducing the weight thus energy and materials usage. (Trend: Space Segmentation) Patent pending. See the attached video animation for further insights.

16 中華系統性創新學會 Society of Systematic Innovation copyright © D. Daniel Sheu & Hou Chun Ting