1 CNEU Cleanroom Update Spring 2007 Terry Kuzma

2 Outline Goal of the Cleanroom Design/Selection Infrastructure Tools and Systems Invitation for a Tour

3 Cleanroom Goal To meet the needs of industry, the students should master safety protocol, processing system design and recipes, material characteristics, and contamination issues. Our feedback from both industry and students identifies the lab as a primary tool to accomplish the training goals The NMT students spend approximately 3 hours a day performing hands on activities

4 Outline Goal of the Cleanroom Design/Selection Infrastructure Tools and Systems Invitation for a Tour

5 Options to Obtain the Training Goal University Research Facility Approach –Not explicitly designed for teaching –No initial equipment costs, only re-occurring user fees (expensive?) Educational Laboratory Approach –Equipment in the low and medium cost tools are incorporated. –High cost equipment not easily incorporated due to size of equipment, facilities needed, cost of equipment and maintenance, etc. Hybrid Approach –Create an Educational Laboratory and partner with a research university that can provide access to equipment in the high cost echelon.

6 Design/Selection A cleanroom is not absolutely necessary, but it helps to inspire conscientiousness and prepares students for full range of industries Typically unfiltered lab space has a few million micron size particles per square foot. Depending upon the nature of the lab experiments, it is desirable to have a cleanroom. Typically class 100,000, or 10,000 are cost effective for education. Lower classification (class 1000) cleanrooms are generally not cost effective

7 Design/Selection We considered a class 1000 industrial cleanroom. –The same size class 1000 hardwall cleanroom in the same building was estimated to be 800,000 dollars (2005). –The large increase in cost was mainly due to HVAC environmental control –The class 1000 cleanroom also cost more to maintain. Gowns, filters, online monitoring, maintenance

Design/Selection Class 100,000 cleanroom design was selected because it did not need additional HVAC; i.e., it utilized existing infrastructure. –The facility did not require additional electrical service –Minimal state permits (Time) –No reoccurring charges for environmental monitoring. –Arguably the same impact for education as a costlier facility –Valid model, most pharmaceutical cleanrooms are this design –Less cost for gowns, filters, monitoring, maintenance. –The CNEU cleanroom is 1000 square feet. The cost was approximately 200,000 dollars (2006).

Educational Cleanroom-Spring

10 Outline Goal of the Cleanroom Design/Selection Infrastructure Tools and Systems Invitation for a Tour

11 Infrastructure DI water is a priority for contamination control and chemistry. Our facility has filtered water that is polished in our DI water system. Our system does not store water, and has a 15 gallon per hour limitation.

12 Infrastructure In support of our LPCVD system, we needed to safely monitor hydride gas. Annual preventative maintenance, tapes, and travel expense. Our system is connected to Fire/Police services at no annual cost.

13 Infrastructure Gas cabinets Store diborane and silane Both cabinets require hydride gas detection safety system

14 Additional infrastructure costs Fixed cost –Eye wash / shower –Chemical storage cabinets –SCBA air packs Compressed dry air –Card access system, –Police / fire monitoring –Fire extinguishers –Hand tools –Computers Reoccurring costs –Gowns, gloves, mats, etc –Process gas –Chemical spill kits –Consumables such as probe tips, beakers, chemicals, deposition metals, substrates, vacuum pumps, etc………

15 Outline Goal of the Cleanroom Design/Selection Infrastructure Tools and Systems Invitation for a Tour

16 Tools and Systems Wet chemistry area Solvent bench Acid and base bench

17 Tools and Systems Reactive ion processing The reactive ion processing system can be used to modify surface morphology, modify surface chemistry, dry phase cleaning, and etching Our system has CF 4, O 2, H 2, Ar

18 Tools and Systems Low Pressure Chemical Deposition (LPCVD) The LPCVD system is used to deposit nanowires and thin films Current chemistry are SiH 4, B 2 H 6, O 2, NH 3, CH 4.

19 Tools and Systems Atomic Force Microscope (AFM) Capable of remote access over the internet

20 Tools and Systems Scanning Electron Microscope (SEM) Capable of imaging samples with resolutions in the 1-20um range. One of the limitations is that the sample must be conductive, or be coated with a layer of conductive material in order to avoid charging effects Base unit $60,000 to $150,000 Our system is on lone from R.J. Lee company, and is valued at $200,000

21 Tools and Systems This sputter coater systems is designed for electron microscopy sample preparation A turbo pump is used on this systems to obtain fine grain, contamination free coatings Materials available are Au, Pt, and C

22 Tools and Systems This system is a thermal evaporator It is used to thermally deposit elemental metals. Current metals include Al, Au, Ag

23 Tools and Systems 3 inch tube furnace 3 zone temperature control with a maximum temperature of 1100 o C Gas – Ar, N 2, O 2 Used for anneals, crystallization, oxidation growth

24 Tools and Systems This system is the vacuum trainer It teaches the students about vacuum components and subsystems It has most of the common vacuum hardware, mechanical pump, turbo pump, various vacuum gauges, and RGA This system is used in conjunction with the computer based vacuum simulator.

Tools and Systems Microscopes with data storage. Dark Field: light scattered off features on the sample surface making features visible through the microscope Bright Field: A traditional light source is used to illuminate the sample and the reflection yields the image

Tools and Systems Ellipsometer Profilometer Spectrophotometer RTA

27 Tools and Systems

28 Outline Goal of the Cleanroom Design/Selection Infrastructure Tools and Systems Invitation for a Tour

29 Finally, Cleanroom Tour Tours of the CNEU cleanroom will start at 4:00 today. You can sign up at the registration desk. Any questions?