From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine Date of download: 10/14/2017 Copyright © ASME. All rights reserved. From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine J. Tribol. 2009;131(3):032001-032001-9. doi:10.1115/1.3123343 Figure Legend: Cross sectional view of the gas-bearing supported MEMS-air turbine

From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine Date of download: 10/14/2017 Copyright © ASME. All rights reserved. From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine J. Tribol. 2009;131(3):032001-032001-9. doi:10.1115/1.3123343 Figure Legend: Key structural features of the MEMS-air turbine

From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine Date of download: 10/14/2017 Copyright © ASME. All rights reserved. From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine J. Tribol. 2009;131(3):032001-032001-9. doi:10.1115/1.3123343 Figure Legend: Exchange of neighboring rotors prior to the fusion bonding process results in devices with different journal bearing clearances

From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine Date of download: 10/14/2017 Copyright © ASME. All rights reserved. From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine J. Tribol. 2009;131(3):032001-032001-9. doi:10.1115/1.3123343 Figure Legend: Journal bearing flow characteristics. The symbols correspond to experimental measurements in devices with target journal bearing clearance of 16 μm.

From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine Date of download: 10/14/2017 Copyright © ASME. All rights reserved. From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine J. Tribol. 2009;131(3):032001-032001-9. doi:10.1115/1.3123343 Figure Legend: Measured top rotor speeds for different devices as a function of journal differential pressure ΔP

From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine Date of download: 10/14/2017 Copyright © ASME. All rights reserved. From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine J. Tribol. 2009;131(3):032001-032001-9. doi:10.1115/1.3123343 Figure Legend: Comparison of experimental and analytical-CFD predictions of isotropic journal bearing stability boundary as a function of hydrostatic differential pressure ΔP

From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine Date of download: 10/14/2017 Copyright © ASME. All rights reserved. From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine J. Tribol. 2009;131(3):032001-032001-9. doi:10.1115/1.3123343 Figure Legend: Comparison of typical operating protocols for previous and current-generation micro-air turbines. The top rotor speed for current-generation devices demonstrated at 1.7×106 rpm.

From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine Date of download: 10/14/2017 Copyright © ASME. All rights reserved. From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine J. Tribol. 2009;131(3):032001-032001-9. doi:10.1115/1.3123343 Figure Legend: Whirl-ratio for different devices as a function of journal bearing damping ratio

From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine Date of download: 10/14/2017 Copyright © ASME. All rights reserved. From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine J. Tribol. 2009;131(3):032001-032001-9. doi:10.1115/1.3123343 Figure Legend: SEM pictures of fillet at the root of a turbine blade