Date of download: 10/5/2017 Copyright © ASME. All rights reserved. From: Microtribological Behavior of W-S-C Films Deposited by Different Sputtering Procedures J. Tribol. 2012;135(1):011001-011001-9. doi:10.1115/1.4007537 Figure Legend: Raman spectra obtained from the investigated films

Date of download: 10/5/2017 Copyright © ASME. All rights reserved. From: Microtribological Behavior of W-S-C Films Deposited by Different Sputtering Procedures J. Tribol. 2012;135(1):011001-011001-9. doi:10.1115/1.4007537 Figure Legend: Deflection of the AFM cantilever tip as a function of the distance from the film surface for all three films: (a) reactively sputtered film, (b) film obtained by co-sputtering two targets, and (c) film obtained by sputtering a composite target

Date of download: 10/5/2017 Copyright © ASME. All rights reserved. From: Microtribological Behavior of W-S-C Films Deposited by Different Sputtering Procedures J. Tribol. 2012;135(1):011001-011001-9. doi:10.1115/1.4007537 Figure Legend: The variation of the friction coefficient as a function of the number of cycles for all three films at different applied loads: (a) applied load = 200 mN, (b) applied load = 50 mN, and (c) applied load = 25 mN

Date of download: 10/5/2017 Copyright © ASME. All rights reserved. From: Microtribological Behavior of W-S-C Films Deposited by Different Sputtering Procedures J. Tribol. 2012;135(1):011001-011001-9. doi:10.1115/1.4007537 Figure Legend: Topographic images obtained by white light confocal microscopy of the investigated films: (a) reactively sputtered film, (b) film obtained by co-sputtering two targets, and (c) film obtained by sputtering a composite target

Date of download: 10/5/2017 Copyright © ASME. All rights reserved. From: Microtribological Behavior of W-S-C Films Deposited by Different Sputtering Procedures J. Tribol. 2012;135(1):011001-011001-9. doi:10.1115/1.4007537 Figure Legend: Total wear of the investigated films at different loads

Date of download: 10/5/2017 Copyright © ASME. All rights reserved. From: Microtribological Behavior of W-S-C Films Deposited by Different Sputtering Procedures J. Tribol. 2012;135(1):011001-011001-9. doi:10.1115/1.4007537 Figure Legend: Topographic images obtained using SPM from the worn surfaces of the investigated films: (a) reactively sputtered film, (b) film obtained by co-sputtering two targets, and (c) film obtained by sputtering a composite target

Date of download: 10/5/2017 Copyright © ASME. All rights reserved. From: Microtribological Behavior of W-S-C Films Deposited by Different Sputtering Procedures J. Tribol. 2012;135(1):011001-011001-9. doi:10.1115/1.4007537 Figure Legend: Raman spectra obtained from the worn surfaces of the investigated films

Date of download: 10/5/2017 Copyright © ASME. All rights reserved. From: Microtribological Behavior of W-S-C Films Deposited by Different Sputtering Procedures J. Tribol. 2012;135(1):011001-011001-9. doi:10.1115/1.4007537 Figure Legend: XPS survey spectra obtained from the worn surfaces of the investigated films

Date of download: 10/5/2017 Copyright © ASME. All rights reserved. From: Microtribological Behavior of W-S-C Films Deposited by Different Sputtering Procedures J. Tribol. 2012;135(1):011001-011001-9. doi:10.1115/1.4007537 Figure Legend: XPS detail spectra of S, C, O, and W from the worn surface of the reactively sputtered film

Date of download: 10/5/2017 Copyright © ASME. All rights reserved. From: Microtribological Behavior of W-S-C Films Deposited by Different Sputtering Procedures J. Tribol. 2012;135(1):011001-011001-9. doi:10.1115/1.4007537 Figure Legend: Load dependence of the friction force for the films under microtribological test conditions