Date of download: 7/9/2016 Copyright © 2016 SPIE. All rights reserved. Schematic diagram of magnetic fields and their sensing on a tooth of an electric motor stator. Figure Legend: From: Fabrication of giant magneto resistance sensing devices with vertically grown Co∕Cu nanowires on a substrate J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /
Date of download: 7/9/2016 Copyright © 2016 SPIE. All rights reserved. Schematic diagram of cross-sectional view for GMR nanowire fabrication processes (not to scale). (a) Au∕Cr seed layer deposited on a substrate. (b) Bonding of a polycarbonate membrane on a substrate by photoresist coating and baking processes. (c) Selective opening of nanopores with lithography. (d) Top electrode deposition. (e) Initial Cu nanowires growth inside nanopores. (e′) Initial Cu nanowires growth inside nanopores for a GMR device. (f) Multilayer nanowires growth by pulsed deposition. (f′) Outgrowth of nanowires (6μm) and electrical contact between the top electrode and a nanowire. (A: Si, B: SiO2, C: polycarbonate membrane, D: photoresist, E: top electrode, F: Cu nanowires, G: multilayered nanowires, and G′: outgrowth of multilayered nanowire.) Figure Legend: From: Fabrication of giant magneto resistance sensing devices with vertically grown Co∕Cu nanowires on a substrate J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /
Date of download: 7/9/2016 Copyright © 2016 SPIE. All rights reserved. Microscope image of the bottom and top electrodes. Figure Legend: From: Fabrication of giant magneto resistance sensing devices with vertically grown Co∕Cu nanowires on a substrate J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /
Date of download: 7/9/2016 Copyright © 2016 SPIE. All rights reserved. (a) Deposition current recorded at the pulsed deposition with potential of −0.5V(120s) and 1.0V(3s) cycles, and (b) displacement current during the open circuit potential on the sample S-5. Dashed arrow indicates voltage, and Solid arrow indicates current axis. Figure Legend: From: Fabrication of giant magneto resistance sensing devices with vertically grown Co∕Cu nanowires on a substrate J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /
Date of download: 7/9/2016 Copyright © 2016 SPIE. All rights reserved. SEM images. (a) Co nanowires S-1, and Co∕Cu multilayered nanowires (b) S-2, (c) S-3, (d) S-4, and (e) S-5. (In the images of (c) and (d), bright layers are Cu and dark layers are Co.) Figure Legend: From: Fabrication of giant magneto resistance sensing devices with vertically grown Co∕Cu nanowires on a substrate J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /
Date of download: 7/9/2016 Copyright © 2016 SPIE. All rights reserved. X-ray diffraction patterns of Co nanowires: (a) S-1, (b) S-2, (c) S-3, and (d) S-5 samples. Figure Legend: From: Fabrication of giant magneto resistance sensing devices with vertically grown Co∕Cu nanowires on a substrate J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /
Date of download: 7/9/2016 Copyright © 2016 SPIE. All rights reserved. (a) VSM M-H loops and (b) coercive and remanence field comparison of Co∕Cu multilayered nanowires on polymer substrate, S-5. ( ⊥ : magnetic field is vertical to the substrate surface, and ∥ : magnetic field is parallel to the substrate surface.) Figure Legend: From: Fabrication of giant magneto resistance sensing devices with vertically grown Co∕Cu nanowires on a substrate J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /
Date of download: 7/9/2016 Copyright © 2016 SPIE. All rights reserved. (a) Current change during pulsed deposition during the electrode connection and (b) resistance change between the top and bottom electrodes during Co outgrowth. Figure Legend: From: Fabrication of giant magneto resistance sensing devices with vertically grown Co∕Cu nanowires on a substrate J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /
Date of download: 7/9/2016 Copyright © 2016 SPIE. All rights reserved. R∕R0−H curve for 100-nm-diam Co∕Cu nanowires with the magnetic field. ( ⊥ : magnetic field is vertical to the substrate surface, and ∥ : magnetic field is parallel to the substrate surface.) Figure Legend: From: Fabrication of giant magneto resistance sensing devices with vertically grown Co∕Cu nanowires on a substrate J. Micro/Nanolith. MEMS MOEMS. 2009;8(4): doi: /