Vacuum Related Procedures and Tools of IHEP ILC Test Cryomodule Assembly Jiyuan Zhai (IHEP) TTC Topical Workshop on SRF Cryomodule Clean Room Assembly CEA Saclay, November 2014

FP (with purge valve after VT) FPC HOM2 HOM1 Mass Flow Control V1 V2 V3 Relief valve 0.02 micron filter V5 Flow meter N2 Needle valve LD TMP V4 V11 V7V8 V9 V10 GV1 Angle Valve GV2 V11 Ion Gun (20-65psi) （ 0.1 micron filter ） 0.02 micron filter Class 10 (movable) Class 10 Pumping and Venting System Bellow 0.02 micron filter Slow pump down (130 ml/min, 3 torr/min) Slow vent (0.2 L/min) V6 V12

All components cleaned, dried and assembled in Class 10. All metal needed?

Angle Valve Cleaning Very hard to clean by blowing. Ethanol rinse and then blow.

How to clean long bellow to Class 10?

Beam Pipes Baking Beam pipes and bellow ultrasonic cleaned by UPW and dried. Bake 120 C (too low?), 12 hrs. Cavity vacuum 4E-5 Pa when cool down to 80K. Outgassing? Leak?

Vacuum Outside Cleanroom What is the component cleanness requirement? Assemble in local clean room? Repeat pump and slow backfill three times. Local clean room to connect beam pipes? Bake 120 C (time not enough). Ion pump too small. Will change to a 400L/s pump and add a 400L/s NEG pump, and all metal. Cavity upstream gate valve closed. Separate vacuum for the beam pipe.

N 2 Flushing Flush the cavity and beam pipes (~0.2 L/min), check particles of N 2 No flushing of the gate valve, power coupler and when connect beam pipes and gate valves (already installed on the cavity)

Bolt Holes Cleaning After cleaning four bolt holes, install and tight four clean bolts by hand (wrench), blow and clean the other holes, cavity flushing. Particles into the cavity?

Angle Valve Screw Lubricant MoS 2 ?

Thank you