Date of download: 6/26/2016 Copyright © 2016 SPIE. All rights reserved. Schematic of the planar probe in the (a) flat and (b) folded configurations. Figure Legend: From: Three-dimensional flexible microprobe for recording the neural signal J. Micro/Nanolith. MEMS MOEMS. 2010;9(3): doi: /

Date of download: 6/26/2016 Copyright © 2016 SPIE. All rights reserved. Fabrication process of the 3-D flexible probe. Figure Legend: From: Three-dimensional flexible microprobe for recording the neural signal J. Micro/Nanolith. MEMS MOEMS. 2010;9(3): doi: /

Date of download: 6/26/2016 Copyright © 2016 SPIE. All rights reserved. SEM image of a fabricated 3-D flexible microprobe: (a) The probe has one electrode on the tip. The geometry of developed probe is 3mm long, 100μm wide, and 6μm thick. The close view of the probe for which the electrode was isolated with Parylene. The width of tip is 5μm, and the opening size of gold electrode is 2500μm2. (b) The folding probe after electrostatic actuation. Figure Legend: From: Three-dimensional flexible microprobe for recording the neural signal J. Micro/Nanolith. MEMS MOEMS. 2010;9(3): doi: /

Date of download: 6/26/2016 Copyright © 2016 SPIE. All rights reserved. Electrostatic batches assembly of the probe. Figure Legend: From: Three-dimensional flexible microprobe for recording the neural signal J. Micro/Nanolith. MEMS MOEMS. 2010;9(3): doi: /

Date of download: 6/26/2016 Copyright © 2016 SPIE. All rights reserved. Photograph of Parylene probe coated with PEG penetrated into biogel. Figure Legend: From: Three-dimensional flexible microprobe for recording the neural signal J. Micro/Nanolith. MEMS MOEMS. 2010;9(3): doi: /

Date of download: 6/26/2016 Copyright © 2016 SPIE. All rights reserved. Interface impedances of gold electrodes on flexible probe submerged in a saline buffer solution (NaCl 0.9%), the average impedance of electrode is 566.5KΩ∕1kHz. Figure Legend: From: Three-dimensional flexible microprobe for recording the neural signal J. Micro/Nanolith. MEMS MOEMS. 2010;9(3): doi: /

Date of download: 6/26/2016 Copyright © 2016 SPIE. All rights reserved. Schematic of the electrophysiology system for recording the crayfish. Pairs of silver wires are placed on the mechanosensory primary afferent neurons for stimulation. The Parylene-based neural probe contacts on a LG neuron cell are for the measurement of the action potential. Figure Legend: From: Three-dimensional flexible microprobe for recording the neural signal J. Micro/Nanolith. MEMS MOEMS. 2010;9(3): doi: /

Date of download: 6/26/2016 Copyright © 2016 SPIE. All rights reserved. Extracellular recording signals of an LG neuron were measured from an electrode of the flexible neural probe by electrical stimulation. The response amplitude of each spike was ∼ 150μV, and the response time ∼ 1ms. Figure Legend: From: Three-dimensional flexible microprobe for recording the neural signal J. Micro/Nanolith. MEMS MOEMS. 2010;9(3): doi: /