Sergio Calatroni TS/MME 1 Reactive sputtering Some references on TiN sputtering models –Berg et al. J. Appl. Phys. 63 (1988) 887 –Larsson Vacuum 39 (1989) 949 Some references on TiN sputtering for vacuum chambers by SLAC, BNL (also for KEKB) –Kennedy et al. Proc of PAC1997 –He et al, Proc. of PAC2001 –Todd et al, Proc. of PAC2005 Reference on properties of BNL coatings –He et al. Proc. of PAC2003

Sergio Calatroni TS/MME 2 Metal sputtering (from P. Costa Pinto) The NEG thin film is obtained by ion bombarding a target made of inter twisted wires of titanium, zirconium and vanadium. The atoms of the target are then sputtered and deposited on the beam pipe walls. Kr + beam pipe wall Ti, Zr, V Kr + 3mm wires of Ti, Zr and V Kr + Before coating after coating -U

Sergio Calatroni TS/MME 3 Reactive sputtering

Sergio Calatroni TS/MME 4 Composition control BNL results Theory

Sergio Calatroni TS/MME 5 Magnetron sputtering setup at BNL (SLAC -> pure diode) Ti 1 N 1 considered as best choice “Gold” colour (smooth surface) provides higher SEY/lower outgassing than “brown” colour (rougher surface) Composition control along length/cross section seen as the most difficult practical aspect

Sergio Calatroni TS/MME 6 SPS prototype? (Drawing from G. Arduini)

Sergio Calatroni TS/MME 7 LSS facility Chambers of diameter 130mm or 156 mm could be coated in the LSS facility (length up to ~ 7m) Modifications of the coating system are well understood (most hardware already available) Design and procurement/manufacturing of cathode and nitrogen distribution line are the main item and could take 2-3 months Setup of coating parameters for operation at the chosen working point could be achieved in 1 month (FTE…)

Sergio Calatroni TS/MME 8 SEM picture of standard coating (1.3x10 -3 mbar, 150ºC) on copper SEM picture of high pressure coating (1x10 -1 mbar, 150 ºC) on copper