Presentation is loading. Please wait.

Presentation is loading. Please wait.

Ischia, 21-23 giugno 2006Riunione Annuale GE 2006 Influence of the oxygen on the optical properties of RF-sputtered Zinco-Oxide thin films (1)Institute.

Similar presentations


Presentation on theme: "Ischia, 21-23 giugno 2006Riunione Annuale GE 2006 Influence of the oxygen on the optical properties of RF-sputtered Zinco-Oxide thin films (1)Institute."— Presentation transcript:

1 Ischia, giugno 2006Riunione Annuale GE 2006 Influence of the oxygen on the optical properties of RF-sputtered Zinco-Oxide thin films (1)Institute for Microelectronics and Microsystems National Council of Research (IMM-CNR), Naples, Italy (2) Mediterranea University of Reggio Calabria, Italy Mariano Gioffrè (2), Massimo Gagliardi (1) (2), Massimo Angeloni (1), Mario Iodice (3), Giuseppe Coppola (1) and Ivo Rendina (1)

2 Ischia, giugno 2006Riunione Annuale GE 2006ZnO ellipsometric model fit results X 2 = 0.32 Dispersion model of ZnO: Tauc-Lorentz single oscillator [4,5] immaginary part of dielectric function: real part from Kramer- Kroning relation: Fitting parameters: E 0, E g, A, C, References: [4] H. G. Tompkins, W. A. McGahan, "Spectroscopic Ellipsometry and Reflectometry ", Ed.John Wiley & Sons [5] G. E. Jellison and F. A. Modine, Appl. Phys. Lett. 69, 371 (1996) [6] G. E. Jellison, F.A. Modine, P. Doshi, A. Doshi, A. Rohatgi, Thin Solid Films, , 195 (1998) [7] A.R. Forouhi, I.Bloomer, Phys.Review B 34, (1986) [8] A.R.Forouhi, I.Bloomer, Phys.Review B 38, (1988) Dispersion model of glass: Forouhi & Bloomer [7, 8] Fitting parameters :

3 Ischia, giugno 2006Riunione Annuale GE 2006 Refractive index Comparison between measured and simulated transmittance The obteined index refractive is in good agreement with literature[9,10] The resullts of fitting parameters for sample 1 References: [9] E. Dumont, B. Dugnoille, S. Bienfait, Thin Solid Films, 353, 93 (1999) [10] W. L. Bond, J. Appl. Phys. 36, 1674 (1965) Samp le Po wer (W) Temperatur e ( 0 C) Flow argon (sccm) Flow oxigen (sccm) Pressure (mbar) Time (min) Sputtering deposition parameters sample1234 Eg Wavelength (nm)


Download ppt "Ischia, 21-23 giugno 2006Riunione Annuale GE 2006 Influence of the oxygen on the optical properties of RF-sputtered Zinco-Oxide thin films (1)Institute."

Similar presentations


Ads by Google