1. Metrology of Prototype Nanolaminate Deformable Mirrors John Ruiz San Antonio College Lawrence Livermore National Laboratories Principle Investigator: Scot Olivier Research Supervisor: Kevin Baker Research Advisor: Stacie Hvisc

2. Overview  Introduction to current and new deformable mirrors.  Methods used to measure prototype.  Results from measuring the prototype.  Discussion of the results.  Conclusion of my presentation.

3. Introduction Introduction to current and new deformable mirrors (DM). Current DM New DM Nanolaminate Integrated Actuation Mirror Displacement From presentation “Integrated Active Nanolaminate Optics” at LLNL

4. Nanolaminate Mirror Produced by sputtering alternating layers of two metals onto a pre-formed mandrel. Nanolaminate mirrors areal density can be as low as 1kg/m. Nanolaminate mirrors can be fabricated in less than a week and can be ~ 1  m thick. From presentation “Integrated Active Nanolaminate Optics” at LLNL 2

5. Integrated Actuation Private communication from Alexandros Papavasiliou papavasiliou1@llnl.govpapavasiliou1@llnl.gov Mirror Layer Spring Layer Base & Electrodes

6. Mirror Displacement Electroplated posts and ridges From presentation “Integrated Active Nanolaminate Optics” at LLNL Ridges are electroplated on base layer. Spring layer is bonded to ridges on base layer. Posts are electroplated on the back side of the mirror. Posts on mirror are bonded to spring layer.

7. Methods Methods used to measure the prototypes. UBM Laser Profilometer Reference Standard

8. Metrology

9. Results Results from measuring the prototype. Continuous Spring Layer Data Etched Spring Layer Data

10. Continuous Spring Layer Data +- Scanning Direction

11. Continuous Spring Layer Data 97 64 31

12. Etched Spring Layer Data +- Scanning Direction

13. Discussion Discussion of the results Calibrating the Absolute Displacement

14. Calibrating Calibrated measurements of NL reference ~7.16  m. UBM measurements of NL reference ~ 6.25  m. 13% difference. Pixel # Displacement (  m) Absolute Measurement (  m) 11.842.08 21.872.11 3 44.274.83 52.392.70 62.492.81 72.693.04 82.22.49 91.591.80 Pixel # Displacement (  m) Absolute Measurement (  m) 24.995.64 51.541.74 80.820.93 Continuous Spring Layer Etched Spring Layer Average Displacement ~ 2.73  m Average Displacement ~ 2.77  m

15. Conclusion  Continuous Spring Layer DM  more consistent actuation  Gaussian influence function  ~ 2.73 μm average deflection  Etched Spring Layer DM  less consistent actuation  Super Gaussian influence function  ~ 2.77 μm average deflection  2 nd and 3 rd generation prototypes  Scaling to meter size DM  Lightweight space telescopes From presentation “Integrated Active Nanolaminate Optics” at LLNL

16. Acknowledgements & Thanks  Rosa Maria Gonzalez  MAES  Tony Leiva  HACU  Malika Bell  CfAO  Scot Olivier  Kevin Baker  Stacie Hvisc  Jay & Shannon Ayers  Rick Levesque  LLNL  This project is supported by the National Science Foundation Science and Technology Center for Adaptive Optics, managed by the University of California at Santa Cruz under cooperative agreement No. AST - 9876783